Thin films of alpha fe2o3 and method of forming
Abstract
Abstract A METHOD OF MAKING THIN FILMS OF ALPHA FE2O3 BY APPLYING TO AN UNHEATED SUBSTRATE A FILM OF A HIGHLY PERMEABLE NON-CRYSTALLINE FORM OF IRON OXIDE BY SUBJECTING THE SUBSTRATE TO VAPOR PRODUCED BY EVAPORATING A SOURCE OF IRON OXIDE AT A PRESSURE LESS THAN 10-4 TORR AND THEREAFTER HEATING THE DEPOSITED FILM IN AN OXIDIZING ATMOSPHERE AT A TEMPERATURE OF AT LEAST 425*C. FOR A PERIOD OF TIME SUFFICIENT TO CONVERT IT TO A STABLE, CRYSTALLINE FILM OF HEMATITE, ALPHA FE2O3. A FILM OF HEMATITE SO FORMED HAVING A THICKNESS IN THE RANGE OF 1000 A.-3600 A. ON A SUBSTRATE OF TRANSPARENT, ALKALI-FREE GLASS MAY BE PATTERNED TO FORM A MICROCIRCUIT MASK HAVING INCREASED TRANSMISSION IN THE VISIBLE PORTION OF THE SPECTRUM.
Inventors
- 👤 Raymond E Szupillo
Bibliographic Details
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