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US3690290A
Expired / Lapsed
US
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Apparatus for providing epitaxial layers on a substrate
Assignee: Motorola Solutions Inc
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Filing: 1971-04-29
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Granted: 1972-09-12
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Expires: 1991-04-29
Abstract
Abstract Epitaxial deposition apparatus includes a bell jar disposed within a furnace and having therein a closed annulus adapted to contain material to be vaporized when heated. First tubular means delivers gaseous reactant to the annulus and second tubular means delivers the reaction product, of the vaporized material and gaseous reactant, to a top portion of the bell jar. Means deliver a second gaseous reactant to said top portion. Means support a substrate at an intermediate portion of the bell jar.
Inventors
- 👤 Gary Nicholas Jarvela
- 👤 Howard Nassime Klink
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:50
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/14; C30B25/12
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
19 words
The invention of claim 1 in which said bell jar is substantially surrounded top and sides by said heater.
Claim 2
Dependent Claim
19 words
The invention of claim 1 in which said tubes extend inside said bell jars from the open end thereof.
Claim 3
Dependent Claim
32 words
The invention of claim 1 in which said tubes extend along the outside of said bell jar and between said bell jar and said furnace for the major portion of their length.
Claim 4
Dependent Claim
13 words
The invention of claim 1 in which said support for wafers is rotatable.
References Cited (Backward Citations)
US2789062A
Cited
US3213827A
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US3407783A
Cited
US3464846A
Cited
US3492175A
Cited
US3441000A
Cited
US3460510A
Cited
US3635771A
Cited
US3594227A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-09-12 | 1976-03-13 | 1976-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-09-12 | 1980-03-13 | 1980-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-09-12 | 1984-03-13 | 1984-09-12 | $7700.00 | Window Closed / Lapsed |