Patent US3654110A successfully refreshed from Google Patents.
US3654110A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of applying a coating by cathode sputtering
Assignee: Siemens AG
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Filing: 1969-02-06
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Granted: 1972-04-04
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Expires: 1989-02-06
Abstract
Abstract THE INVENTION RELATES TO A METHOD OF COATING A LAYER OF INORGANIC, SOLID MATERIAL UPON A BASE BY CATHODE SPUTTERING. THE INVENTION IS CHARACTERIZED BY THE FACT THAT A GRID OR SIEVE-LIKE PERFORATED CATHODE, WHICH IS COMPRISED, AT LEAST AT ITS SURFACE, OF THE MATERIAL IS TO BE DEPOSITED, IS ARRANGED BETWEEN ANODE AND SUBSTRATE AND IS NEGATIVELY BIASED AGAINST BOTH. THE SUBSTRATE IS BROUGH SO CLOSE TO THE CATHODE THAT THE SPACE BETWEEN THE TWO IS INSUFFICIENT TO MAINTAIN AN INDEPENDENT GAS DISCHARGE, AT THE ADJUSTED PRESSURE AND THE APPLIED VOLTAGE.
Inventors
- 👤 Friedrich Kraus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 09:41
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-04-04 | 1975-10-04 | 1976-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-04-04 | 1979-10-04 | 1980-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-04-04 | 1983-10-04 | 1984-04-04 | $7700.00 | Window Closed / Lapsed |