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US3617824A
Expired / Lapsed
US
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Mos device with a metal-silicide gate
Assignee: NEC Corp
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Filing: 1968-07-10
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Granted: 1971-11-02
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Expires: 1988-07-10
Abstract
Abstract A semiconductor device obtains in which a silicide film of 3d, 4d and 5d transition metal such as iron (Fe), cobalt (Co), nickel (Ni), molybdenum (Mo), palladium (Pd), platinum (Pt), or the like, is used as a conductive means in place of the conventional simple metal and whose structure is semiconductor-insularsilicide.
Inventors
- 👤 Daizaburo Shinoda
- 👤 Masaoki Ishikawa
- 👤 Hiroki Muta
- 👤 Shizuo Asanbe
- 👤 Nobuo Kawamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:33
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/66; H10D64/667; H10D64/668; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/053; Y10S148/139; Y10S148/147
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
29 words
The improvement as claimed in claim 1, wherein said metal silicide is cobalt silicide and wherein a layer of metal of low electrical resistance covers the metal silicide layer.
Claim 2
Dependent Claim
66 words
The improvement as claimed in claim 1, wherein two impurity-diffused regions having the opposite conductivity type to said substrate are formed in said substrate in such a relation that the portion of the surface of said semiconductor substrate lying under said metal silicide layer may be interposed between said two regions, and electrical leadout members are applied to each of said regions said metal silicide layer.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-11-01 | 1975-05-03 | 1975-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-11-01 | 1979-05-03 | 1979-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-11-01 | 1983-05-03 | 1983-11-02 | $7700.00 | Window Closed / Lapsed |