Abstract An improved ion microprobe mass spectrometer type apparatus is provided that is suitable for analyzing trace amounts of a fluid. The present invention utilizes a target electrode for holding the sample, and a means for cooling the surfaces of the target to below a fixed temperature for a determined period of time. A stream of sample fluid is directed over the cooled surfaces of the target and is condensed thereon after which the target surface is sputtered by an incident, high intensity primary beam directed obliquely onto the surface thereof. Thereafter, means is provided for focusing the electrically charged ions of sample material that result in a secondary beam produced due to the bombardment of the sample layer. Additional means is provided to remove the prior material from the target surfaces after each analysis, so that the target surface is prepared for another sample layer. The invention described herein was made by an employee of the United States Government and may be manufactured and used by or for the Government for governmental purposes without the payment of any royalties thereon or therefor.
The apparatus of claim 1 further comprising: heater means for cleaning the target electrode by heating the surface thereof to volatilize the tested sample layer.
Claim 2
Dependent Claim
15 words
The apparatus of claim 2 wherein the heater means is integral with the target electrode.
Claim 3
Dependent Claim
17 words
The apparatus of claim 1 wherein the cooling means is an integral element of said target electrode.
Claim 4
Dependent Claim
14 words
The apparatus of claim 1 wherein the primary beam consists of noble gas ions.
Claim 5
Independent Claim
82 words
A method of analyzing trace amounts of fluid materials comprising the steps of: cryogenically cooling the surface of a target electrode to below a fixed temperature; directing a stream of fluid to be analyzed over the cooled surface of the electrode to condense and solidify a layer of the stream thereon; directing an intensified primary ion beam obliquely onto the surface of said target to sputter a portion of the layer; and mass analyzing the resultant secondary ions of the sputtered layer.
Claim 6
Dependent Claim
22 words
The method of claim 6 comprising the further step of heating the surface of the target electrode to volatilize the analyzed layer.
Claim 7
Dependent Claim
14 words
The method of claim 6 wherein the primary beam consistS of noble gas ions.