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Patent US3479269A successfully refreshed from Google Patents.
US3479269A
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Method for sputter etching using a high frequency negative pulse train
Assignee: AT&T Inc
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Filing: 1967-01-04
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Granted: 1969-11-18
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Expires: 1987-01-04
Abstract
No abstract record available.
Inventors
- 👤 Peter A Byrnes Jr
- 👤 Martin P Lepselter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:58
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/35; B; B23; B23P; B23P9/00; C08; C08L; C08L25/00; H; H01; H01H; H01H11/00; H01H11/04
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
US2163480A
Cited
US3021271A
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US3282814A
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US3210263A
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US3271286A
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US3287243A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-11-17 | 1973-05-19 | 1973-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-11-17 | 1977-05-19 | 1977-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-11-17 | 1981-05-19 | 1981-11-18 | $7700.00 | Window Closed / Lapsed |