Patent US3428546A successfully refreshed from Google Patents.
US3428546A
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US
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Apparatus for vacuum deposition on a negatively biased substrate
Assignee: United States Atomic Energy Commission
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Filing: 1966-09-27
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Granted: 1969-02-18
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Expires: 1986-09-27
Abstract
No abstract record available.
Inventors
- 👤 Gary Allen Baum
- 👤 Richard L Beno
- 👤 Theodore Van Vorous
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:48
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; H; H01; H01J; H01J37/00; H01J37/32; H01J37/36
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
87 words
APPARATUS FOR DEPOSITING LOW ENERGY ACCELERATED IONS ON A SUBSTRATE COMPRISING, IN COMBINATION, A CHAMBER, MEANS FOR CONTROLLABLY EVACUATING THE CHAMBER, MEANS FOR CONTROLLABLY ADMITTING AN INERT IONIZABLE GAS INTO THE CHAMBER, MEANS FOR SUPPORTING AND POSITIONING A SUBSTRATE WITHIN SAID CHAMBER, AN EVAPORANT SOURCE FOR SUPPORTING EVAPORANT MATERIAL WITHIN THE CHAMBER SPACED FROM THE SUBSTRATE, MEANS ASSOCIATED WITH THE EVAPORANT SOURCE FOR HEATING THE SOURCE AND THE EVAPORANT MATERIAL, THEREMIONIC FILAMENT MEANS FOR PROVIDING A SOURCE OF ELECTRONS FOR IONIZING THE INERT GAS AND THE EVAPORANT,
Claim 2
Dependent Claim
87 words
APPARATUS FOR DEPOSITING LOW ENERGY ACCELERATED IONS ON A SUBSTRATE COMPRISING, IN COMBINATION, A CHAMBER, MEANS FOR CONTROLLABLY EVACUATING THE CHAMBER, MEANS FOR CONTROLLABLY ADMITTING AN INERT IONIZABLE GAS INTO THE CHAMBER, MEANS FOR SUPPORTING AND POSITIONING A SUBSTRATE WITHIN SAID CHAMBER, AN EVAPORANT SOURCE FOR SUPPORTING EVAPORANT MATERIAL WITHIN THE CHAMBER SPACED FROM THE SUBSTRATE, MEANS ASSOCIATED WITH THE EVAPORANT SOURCE FOR HEATING THE SOURCE AND THE EVAPORANT MATERIAL, THEREMIONIC FILAMENT MEANS FOR PROVIDING A SOURCE OF ELECTRONS FOR IONIZING THE INERT GAS AND THE EVAPORANT,
References Cited (Backward Citations)
CA567633A
Cited
US3329601A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1972-02-18 | 1972-08-19 | 1973-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1976-02-18 | 1976-08-19 | 1977-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1980-02-18 | 1980-08-19 | 1981-02-18 | $7700.00 | Window Closed / Lapsed |