Glow discharge vapor deposition apparatus

Claim 1

IN AN IONIZATION TUBE APPARATUS FOR THE GLOW-DISCHARGE DEPOSITION UPON A SUBSTRATE OF A SOLID COATING FROM AN IONIZED GAS, THE COMBINATION WITH SUCH A TUBE OF AN ELECTRODE-NOZZLE UNIT OF ELECTRICALLY CONDUCTIVE MATERIAL WHICH COMPRISES A SUBSTRATE PASSAGE THERETHROUGH, AN INLET CONDUIT IN COMMUNICATION WITH A SUPPLY RESERVOIR OF THE DEPOSITION GAS, DISTRIBUTION PASSAGES WITHIN THE WALL OF SAID UNIT IN COMMUNICATION WITH SAID INLET CONDUIT AND WITH THE INTERIOR SURFACE OF SAID SUBSTRATE PASSAGE AT A PLURALITY OF CIRCUMFERENTIALLY SPACED OPENINGS THEREON, MEANS FOR REDUCING THE PRESSURE OF THE ATMOSPHERE WITHIN SAID TUBE RELATIVE TO THE PRESSURE OF THE GAS IN THE SUPPLY RESERVOIR, MEANS FOR ELECTRICALLY ENERGIZING SAID ELECTRODE-NOZZLE UNIT AND SAID SUBSTRATE WHEREBY AN ELECTROMOTIVE FORCE AT LEAST EQUAL TO THE IONIZATION POTENTIAL OF THE DEPOSITION GAS IS ESTABLISHED BETWEEN THEM, MEANS FOR MOVING SAID SUBSTRATE THROUGH SAID PASSAGE AND SAID DISTRIBUTION PASSAGES BEING INCLINED FROM A PLANE TRANSVERSE TO THE MOVEMENT OF SAID SUBSTRATE AT AN ANGLE WITHIN THE RANGE OF FROM 10 TO 60 DEGREES OPENING IN THE DIRECTION OF MOVEMENT OF SAID SUBSTRATE.