US3297465A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing organic plasma and for depositing polymer films
Assignee: International Business Machines Corp
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Filing: 1963-12-31
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Granted: 1967-01-10
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Expires: 1983-12-31
Abstract
No abstract record available.
Inventors
- 👤 Richard A Connell
- 👤 Lawrence V Gregor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 18:32
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; C; C08; C08F; C08F2/00; C08F2/46; C08F2/52; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321; H01J37/32431; H01J37/3266; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/338; H01J2237/3382; Y; Y10; Y10S; Y10S8/00; Y10S8/12; Y10S8/18
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
112 words
A METHOD FOR DEPOSITING POLYMER FILMS ONTO A SUBSTRATE COMPRISING: CONFINING MONOMER VAPORS AND A SUBSTRATE IN A CHAMBER, SUBJECTING SAID MONOMER VAPORS TO A RADIO-FREQUENCY ELECTROMAGNETIC FIELD HAVING A PEAK MAGNETIC FIELD COMPONENT OF UP TO ABOUT 2 OERSTEDS, SIMULTANEOUSLY SUBJECTING SAID MONOMER VAPORS TO A D.C. MAGNETIC FIELD HAVING A STRENGTH OF A LEAST ABOUT 300 OERSTEDS AND FORMED TO CONFINE SAID MONOMER VAPORS, CONFINING OF SAID MONOMER VAPORS INCREASING THE PROBABILITY OF COLLISION BETWEEN PARTICLES THEREIN TO PRODUCE A GLOW DISCHARGE AND TO FORM A PLASMA, AND CONTACTING SAID SUBSTRATE WITH SAID PLASMA TO EFFECT CONDENSATION OF SAID PLASMA ONTO SAID SUBSTRATE IN THE FORM OF A POLYMERIZED FILM.
Claim 2
Independent Claim
112 words
A METHOD FOR DEPOSITING POLYMER FILMS ONTO A SUBSTRATE COMPRISING: CONFINING MONOMER VAPORS AND A SUBSTRATE IN A CHAMBER, SUBJECTING SAID MONOMER VAPORS TO A RADIO-FREQUENCY ELECTROMAGNETIC FIELD HAVING A PEAK MAGNETIC FIELD COMPONENT OF UP TO ABOUT 2 OERSTEDS, SIMULTANEOUSLY SUBJECTING SAID MONOMER VAPORS TO A D.C. MAGNETIC FIELD HAVING A STRENGTH OF A LEAST ABOUT 300 OERSTEDS AND FORMED TO CONFINE SAID MONOMER VAPORS, CONFINING OF SAID MONOMER VAPORS INCREASING THE PROBABILITY OF COLLISION BETWEEN PARTICLES THEREIN TO PRODUCE A GLOW DISCHARGE AND TO FORM A PLASMA, AND CONTACTING SAID SUBSTRATE WITH SAID PLASMA TO EFFECT CONDENSATION OF SAID PLASMA ONTO SAID SUBSTRATE IN THE FORM OF A POLYMERIZED FILM.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-01-09 | 1970-07-11 | 1971-01-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-01-09 | 1974-07-11 | 1975-01-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-01-09 | 1978-07-11 | 1979-01-10 | $7700.00 | Window Closed / Lapsed |