US3306768A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming thin oxide films
Assignee: Motorola Solutions Inc
•
Filing: 1964-01-08
•
Granted: 1967-02-28
•
Expires: 1984-01-08
Abstract
No abstract record available.
Inventors
- 👤 Peterson David Ralph
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:59
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45514; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; C23C16/403; C23C16/405; C23C16/45561; C23C16/45563; C23C16/45576; Y; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/118
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
119 words
A PROCESS FOR COATING A SOLID SUBSTRATE WITH A SUBSTANTIALLY ANHYDROUS OXIDE FILM WHILE KEEPING THE SUBSTRATE AT A RELATIVELY LOW TEMPERATURE, SAID PROCESS INCLUDING THE STEPS OF (A) FORMING FIRST AND SECOND GAS STREAMS OF SPECIFICALLY NON-REACTIVE GAS SELECTED FROM THE GROUP CONSISTING OR ARGON, HELIUM, NITROGEN, CARBON DIOXIDE AND AIR, (B) INTRODUCING VAPOR PHASE WATER INTO SAID FIRST GAS STREAM TO FORM A FIRST GASEOUS MIXTURE, (C) INTRODUCING INTO SAID SECOND GAS STREAM VAPORS OF A HYDROLYSABLE HALIDE OF AT LEAST ONE ELEMENT SELECTED FROM THE GROUP CONSISTING OF TITANIUM, SILICON AND ALUMINUM TO FORM A SECOND GASEOUS MIXTURE, (D) MIXING SAID FIRST AND SECOND GASEOUS MIXTURES WITH EACH OTHER TO FORM A THIRD GASEOUS MIXTURE HAVING
Claim 2
Dependent Claim
119 words
A PROCESS FOR COATING A SOLID SUBSTRATE WITH A SUBSTANTIALLY ANHYDROUS OXIDE FILM WHILE KEEPING THE SUBSTRATE AT A RELATIVELY LOW TEMPERATURE, SAID PROCESS INCLUDING THE STEPS OF (A) FORMING FIRST AND SECOND GAS STREAMS OF SPECIFICALLY NON-REACTIVE GAS SELECTED FROM THE GROUP CONSISTING OR ARGON, HELIUM, NITROGEN, CARBON DIOXIDE AND AIR, (B) INTRODUCING VAPOR PHASE WATER INTO SAID FIRST GAS STREAM TO FORM A FIRST GASEOUS MIXTURE, (C) INTRODUCING INTO SAID SECOND GAS STREAM VAPORS OF A HYDROLYSABLE HALIDE OF AT LEAST ONE ELEMENT SELECTED FROM THE GROUP CONSISTING OF TITANIUM, SILICON AND ALUMINUM TO FORM A SECOND GASEOUS MIXTURE, (D) MIXING SAID FIRST AND SECOND GASEOUS MIXTURES WITH EACH OTHER TO FORM A THIRD GASEOUS MIXTURE HAVING
References Cited (Backward Citations)
US2375482A
Cited
US2478817A
Cited
US2572497A
Cited
US2953483A
Cited
US2967113A
Cited
US3089793A
Cited
US3067071A
Cited
US3093507A
Cited
US3220880A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1970-02-27 | 1970-08-29 | 1971-02-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1974-02-27 | 1974-08-29 | 1975-02-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1978-02-27 | 1978-08-29 | 1979-02-28 | $7700.00 | Window Closed / Lapsed |