Production of thin film metallic patterns

Claim 1

A DEVICE FOR DEPOSITING THIN FILM METAL PATTERNS UPON A SOLID SURFACE COMPRISING: A GAS FILLED IONIZATION CHAMBER; A POSITIVELY CHARGED ELECTRODE HAVING A FACE EXPOSED IN SAID CHAMBER; A GAS ION CONCENTRATING LENS ACROSS THE CHAMBER FROM SAID ELECTRODE, THE POTENTIAL OF THE LENS BEING NEGATIVE WITH RESPECT TO THE ELECTRODE; A SPUTTER CHAMBER INTO WHICH THE LENS OPENS; A BLOCK CONTAINING THE METAL TO BE DEPOSITED, HAVING A METALLIC FACE POSITIONED IN SAID SPUTTER CHAMBER ACROSS THE CHAMBER FROM THE LENS IN ALIGNMENT WITH THE LENS AXIS; MEANS OPERABLE TO ESTABLISH A CYLINDRICAL MAGNETIC FIELD IN SAID SPUTTER CHAMBER HAVING A MAGNETIC AXIS PERPENDICULAR TO AND INTERSECTING THE LENS AXIS, WHEREBY IONIZED METAL AND GAS PARTICLES WILL BE CONCENTRATED ALONG THE MAGNETIC AXIS, SAID SPUTTER CHAMBER INCLUDING AN OUTLET OPENING ON SAID MAGNETIC AXIS; AN ION CONCENTRATING LENS IN SAID OUTLET OPENING; MEANS OPERABLE TO ESTABLISH AN ELECTROSTATIC FIELD ALONG SAID MAGNETIC AXIS ADAPTED TO ACCELERATE IONIZED GAS AND METAL PARTICLES TOWARD AND THROUGH SAID OUTLET OPENING; AN ENCLOSED SEPARATING CHAMBER LOCATED OUTWARDLY ADJACENT SAID OUTLET OPENING AND HAVING AN INLET IN COMMUNICATION THEREWITH; MEANS IN SAID SEPARATING CHAMBER OPERABLE TO ESTABLISH A MAGNETIC FIELD INTERCEPTING AND DEFLECTING THE STREAM OF IONIZED PARTICLES AS THEY LEAVE SAID OUTLET OPENING; A FIRST OUTLET APERATURE IN THE WALL OF SAID SEPARATING CHAMBER OPPOSITE ITS INLET ADAPTED TO ADMIT IONIZED METAL PARTICLES DEFLECTED BY SAID LAST NAMED MAGNETIC FIELD; A SECOND OUTLET APERTURE ANGULARLY OFFSET FROM THE FIRST NAMED APERATURE IN THE WALL OF SAID SEPARATING CHAMBER POSITIONED TO RECEIVE IONIZED GAS PARTICLES DEFLECTED BY SAID LAST NAMED MAGNETIC FIELD; MEANS LOCATED OUTWARDLY ADJACENT TO SAID FIRST OUTLET APERTURE ADAPTED TO RECEIVE, ALIGN AND ACCELERATE METAL PARTICLES PASSED THROUGH SAID FIRST OUTLET APERTURE; AND RECIRCULATING MEANS OUTWARDLY ADJACENT TO SAID SECOND OUTLET APERTURE AND OPENING IN COMMUNICATION BETWEEN SAID SEPARATING CHAMBER AND SAID IONIZATION CHAMBER ADAPTED TO DIRECT IONIZED GAS PARTICLES PASSED THROUGH SAID SECOND OUTLET APERTURE TO SAID IONIZATION CHAMBER.

Claim 2

A DEVICE FOR DEPOSITING THIN FILM METAL PATTERNS UPON A SOLID SURFACE COMPRISING: A GAS FILLED IONIZATION CHAMBER; A POSITIVELY CHARGED ELECTRODE HAVING A FACE EXPOSED IN SAID CHAMBER; A GAS ION CONCENTRATING LENS ACROSS THE CHAMBER FROM SAID ELECTRODE, THE POTENTIAL OF THE LENS BEING NEGATIVE WITH RESPECT TO THE ELECTRODE; A SPUTTER CHAMBER INTO WHICH THE LENS OPENS; A BLOCK CONTAINING THE METAL TO BE DEPOSITED, HAVING A METALLIC FACE POSITIONED IN SAID SPUTTER CHAMBER ACROSS THE CHAMBER FROM THE LENS IN ALIGNMENT WITH THE LENS AXIS; MEANS OPERABLE TO ESTABLISH A CYLINDRICAL MAGNETIC FIELD IN SAID SPUTTER CHAMBER HAVING A MAGNETIC AXIS PERPENDICULAR TO AND INTERSECTING THE LENS AXIS, WHEREBY IONIZED METAL AND GAS PARTICLES WILL BE CONCENTRATED ALONG THE MAGNETIC AXIS, SAID SPUTTER CHAMBER INCLUDING AN OUTLET OPENING ON SAID MAGNETIC AXIS; AN ION CONCENTRATING LENS IN SAID OUTLET OPENING; MEANS OPERABLE TO ESTABLISH AN ELECTROSTATIC FIELD ALONG SAID MAGNETIC AXIS ADAPTED TO ACCELERATE IONIZED GAS AND METAL PARTICLES TOWARD AND THROUGH SAID OUTLET OPENING; AN ENCLOSED SEPARATING CHAMBER LOCATED OUTWARDLY ADJACENT SAID OUTLET OPENING AND HAVING AN INLET IN COMMUNICATION THEREWITH; MEANS IN SAID SEPARATING CHAMBER OPERABLE TO ESTABLISH A MAGNETIC FIELD INTERCEPTING AND DEFLECTING THE STREAM OF IONIZED PARTICLES AS THEY LEAVE SAID OUTLET OPENING; A FIRST OUTLET APERATURE IN THE WALL OF SAID SEPARATING CHAMBER OPPOSITE ITS INLET ADAPTED TO ADMIT IONIZED METAL PARTICLES DEFLECTED BY SAID LAST NAMED MAGNETIC FIELD; A SECOND OUTLET APERTURE ANGULARLY OFFSET FROM THE FIRST NAMED APERATURE IN THE WALL OF SAID SEPARATING CHAMBER POSITIONED TO RECEIVE IONIZED GAS PARTICLES DEFLECTED BY SAID LAST NAMED MAGNETIC FIELD; MEANS LOCATED OUTWARDLY ADJACENT TO SAID FIRST OUTLET APERTURE ADAPTED TO RECEIVE, ALIGN AND ACCELERATE METAL PARTICLES PASSED THROUGH SAID FIRST OUTLET APERTURE; AND RECIRCULATING MEANS OUTWARDLY ADJACENT TO SAID SECOND OUTLET APERTURE AND OPENING IN COMMUNICATION BETWEEN SAID SEPARATING CHAMBER AND SAID IONIZATION CHAMBER ADAPTED TO DIRECT IONIZED GAS PARTICLES PASSED THROUGH SAID SECOND OUTLET APERTURE TO SAID IONIZATION CHAMBER.