Cryopump

Abstract

Abstract PURPOSE:To efficiently regenerate a pump by speedily melting the ice coagulat ed onto a cold buffle by attaching a heater onto a reflector and discharging the water obtained from the molten ice from a water reservoir and a water drain conduit. CONSTITUTION:Exhaust for an exhausted container connected to a cryopump is started by cooling a cold buffle 3 and a cold panel 4 by operating a refrigerator 6. If, in this case, the storage quantity of the pump is saturated, and reactivation is necessitated, the refrigerator 6 is put-OFF, and a valve 11 is opened, and a heater 14 is raised by an elevator 15, and attached onto a reflector 2, and then said heater 14 is put into electric conduction, and the reflector 2 and the above-described buffle 3 are heated. Therefore, the gas stored into the buffle 3, panel 4, etc. is vaporized, and the coagulated ice on the buffle 3 is melted, and accumulated into a water reservoir 9 from a drain hole 8, and then discharged from a drain through 10 and a drain pipe 12.

Inventors

• 👤 Chutaro Hiraide
• 👤 平出　忠太郎

Bibliographic Details