Production method of metal foil and metal foil produced by the method

Abstract

Abstract The present invention provides a production method of a metal foil comprising the steps of: depositing component particles from a deposition source material consisting of predetermined metal components in a vapor phase onto a substrate disposed to face the deposition source material and having an inert surface moving continuously, by a physical vapor phase deposition method in vacuum or in an inert gas atmosphere so as to form sequentially a thin film having a predetermined film thickness; and peeling off the thin film from the substrate surface to obtain a metal foil. The metal foils thus obtained may be in the state of an amorphous phase, a crystalline phase or a composite thereof by adjusting the gas pressure inside the apparatus, the distance between the substrate surface and the deposition source material, etc. Particularly, metal foils having at least 50 vol.% of an amorphous phase or a surface roughness (Rmax) not greater than 0.2 µm are very useful for various industrial applications because of their superior properties.

Inventors

• 👤 Hiroshi Yamagata
• 👤 Junichi Nagahora

Bibliographic Details