EP0305903A1
Expired / Lapsed
EP
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Method for synthesis of diamond and apparatus therefor
Assignee: Idemitsu Petrochemical Co Ltd
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Filing: 1988-08-25
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Granted: —
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Expires: 2008-08-25
Abstract
Abstract This invention provides a method for synthesis of diamond by contacting a substrate with a mixed gas of carbon source gas and hydrogen gas activated by irradiation with microwave to produce plasma, thereby to deposit diamond on the surface of the substrate wherein microwave is introduced from a plurality of directions to the substrate and an apparatus for synthesis of diamond which comprises at least one microwave oscillator which oscillates microwave, a plurality of waveguides for introducing from a plurality of directions the microwave oscillated from said microwave oscillator to a substrate for deposition of diamond, and a reaction chamber which is connected to said waveguides and in which diamond is deposited by generation of plasma thereby to form a diamond thin film on the surface of said substrate.
Inventors
- 👤 Toshimichi C/O Idemitsu Petrochemical Ito
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-23 09:11
CPC Classifications
B; B01; B01J; B01J3/00; B01J3/06; B01J3/08; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/274; C03; C03B; C03B29/00; C03B29/04; C23C16/277; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
51 words
A method for synthesis of diamond by contacting a substrate with a mixed gas of carbon source gas and hydrogen gas activated by irradiation with microwave to produce plasma, thereby to deposit diamond on the surface of the substrate wherein microwave is introduced from a plurality of directions to the substrate.
Claim 2
Independent Claim
51 words
A method for synthesis of diamond by contacting a substrate with a mixed gas of carbon source gas and hydrogen gas activated by irradiation with microwave to produce plasma, thereby to deposit diamond on the surface of the substrate wherein microwave is introduced from a plurality of directions to the substrate.
Claim 3
Dependent Claim
33 words
A method according to claim 1 wherein the carbon source gas is at least one compound selected from the group consisting of an oxygen-containing carbon compound, a nitrogen-containing carbon compound and a hydrocarbon.
Claim 4
Dependent Claim
16 words
A method according to claim 1 wherein the carbon source gas is an oxygen-containing carbon compound.
Claim 5
Dependent Claim
29 words
A method according to claim 1 wherein the carbon source gas is at least one compound selected from the group consisting of carbon monoxide, carbon dioxide,acetone and methyl alcohol.
Claim 6
Dependent Claim
40 words
A method according to claim 1 wherein the substrate is at least one member selected from the group consisting of a metal, a metal oxide, a metal nitride, a metal carbide, an alloy, a cermet, a glass and a ceramic.
Claim 7
Dependent Claim
11 words
A method according to claim 1 wherein the substrate is silicon.
Claim 8
Dependent Claim
23 words
A method according to claim 1 wherein concentration of the carbon source gas in the mixed gas is 0.1 - 90% by volume.
Claim 9
Dependent Claim
28 words
A method according to claim 1 wherein temperature of the surface of the substrate is 400-1,200°C, reaction pressure is 0.001-1,000 Torr and microwave is of ISM frequency band.
Claim 10
Dependent Claim
12 words
A method according to claim 8 wherein microwave is of 2.45 GHz.
Claim 11
Independent Claim
74 words
An apparatus for synthesis of diamond which comprises at least one microwave oscillator which oscillates microwave, a plurality of waveguides for introducing from a plurality of directions the microwave oscillated from said microwave oscillator to a substrate for deposition of diamond, and a reaction chamber which is connected to said waveguides and in which diamond is deposited by generation of plasma thereby to form a diamond thin film on the surface of said substrate.
Claim 12
Independent Claim
74 words
An apparatus for synthesis of diamond which comprises at least one microwave oscillator which oscillates microwave, a plurality of waveguides for introducing from a plurality of directions the microwave oscillated from said microwave oscillator to a substrate for deposition of diamond, and a reaction chamber which is connected to said waveguides and in which diamond is deposited by generation of plasma thereby to form a diamond thin film on the surface of said substrate.
References Cited (Backward Citations)
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