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Piezoelectric actuator

Assignee: Mitsubishi Chemical Corp
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Filing: 1987-09-28
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Granted: —
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Expires: 2007-09-28
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Abstract

Abstract A piezoelectric actuator comprising a longitudinal effect-type laminated piezoelectric element composed of piezoelectric ceramic sheets laminated in their thickness direction, and a supporting member fixed to one side in the longitudinal direction of the element and being bending and capable of constraining expansion of the element.

Inventors

  • 👤 Yukio Mitsubishi Chemical Industries Chida
  • 👤 Tetsuhiko C/O Mitsubishi Chem.Ind.Ltd. Nishimura
  • 👤 Yasuo C/L Mitsubishi Chemical Ind.Ltd. Oguri

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-23 19:19
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 46 words
A piezoelectric actuator comprising a longitudinal effect-type laminated piezoelectric element composed of piezoelectric ceramic sheets laminated in their thickness direction, and a supporting member fixed to one side in the longitudinal direction of the element and being bending and capable of constraining expansion of the element.
Claim 2
Dependent Claim 46 words
A piezoelectric actuator comprising a longitudinal effect-type laminated piezoelectric element composed of piezoelectric ceramic sheets laminated in their thickness direction, and a supporting member fixed to one side in the longitudinal direction of the element and being bending and capable of constraining expansion of the element.
Claim 3
Dependent Claim 34 words
The piezoelectric actuator according to Claim 1, wherein the supporting member is a transversal effect-type piezoelectric element contractible in a direction opposite to the direction of expansion of the longitudinal effect-type laminated piezoelectric element.
Claim 4
Dependent Claim 78 words
The piezoelectric actuator according to Claim 1, which is a unimorph-type and wherein the Young's modulus of the supporting member is at least 2.5 times the Young's modulus of the piezoelectric element; the thickness t₂ of the piezoelectric element is within a range of 100 µm ≦ t₂ ≦ 5000 µm; and the ratio of t₂/t₁ where t₂ is the thickness of the piezoelectric element and t₁ is the thickness of the supporting member, is at least 1.6.
Claim 5
Dependent Claim 72 words
The piezoelectric actuator according to Claim 1, wherein the thickness t₂ of the piezoelectric element and the thickness t₁ of the supporting member satisfy the following formulas I and II, repectively: 100 µm ≦ t₂ ≦ 5000 µm      (I) t₂ µm ≦ t₁ ≦ 2√Y t₂ µm      (II) where Y = Y₂/Y₁ where Y₂ is the Young's modulus of the piezoelectric element and Y₁ is the Young's modulus of the supporting member.
Claim 6
Dependent Claim 45 words
The piezoelectric actuator according to Claim 1, wherein the supporting member is made of a material selected from the group consisting of alumina, zirconia, magnesium aluminate, beryllia, mullite, cordierite, tungsten carbide, titanium carbide, boron carbide, silicon carbide, silicon nitride, aluminum nitride and an iron-nickel alloy.
Claim 7
Dependent Claim 22 words
The piezoelectric actuator according to Claim 1, wherein the piezoelectric element is made of a ceramic composition containing Pb, Zr and Ti.
Claim 8
Dependent Claim 37 words
The piezoelectric actuator according to Claim 1, wherein the suppporting member is fixed to the longitudinal effect-type piezoelectric element with an insulating layer interposed therebetween, when at least the surface of the supporting member is electrically conductive.

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