Patent US440952A successfully refreshed from Google Patents.
US7307697B2
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Adaptive shape substrate support system
Assignee: The University of Texas System
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Filing: 2005-05-25
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Granted: 2007-12-11
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Expires: 2025-05-25
Abstract
Abstract The present method and system features an active compliant pin chuck to hold a substrate, having opposed first and second surfaces, and compensates for non-planarity in one of the surfaces of the substrate. To that end, the support system includes a chuck having a plurality of piezo pins and reference pins, with the piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins. These and other embodiments are discussed more fully below.
Inventors
- 👤 Mahadevan GanapathiSubramanian
- 👤 Sidlgata V. Sreenivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/70; G03F7/70691; G03F7/707
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
60 words
A support system for a substrate, said support system comprising: a chuck having a plurality of piezo pins and reference pins, with said piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins; and a support resting upon said reference with a region of said support being in superimposition with said piezo pins.
Claim 2
Dependent Claim
60 words
A support system for a substrate, said support system comprising: a chuck having a plurality of piezo pins and reference pins, with said piezo pins being coupled to piezo actuators to undergo relative movement with respect to said reference pins; and a support resting upon said reference with a region of said support being in superimposition with said piezo pins.
Claim 3
Dependent Claim
28 words
The support system as recited in claim 1 further including a vacuum system in fluid communication with said chuck to selectively vacuum chuck said support to said chuck.
Claim 4
Dependent Claim
42 words
The support system as recited in claim 1 further including a stage system to facilitate movement along two orthogonal directions with said piezo actuators coupled to facilitate movement of said piezo pins along an additional direction, orthogonal to said two orthogonal directions.
Claim 5
Dependent Claim
39 words
The support system as recited in claim 3 further including a flexure system, with said chuck being coupled to said stage system through said flexure system, with said flexure system constraining movement of said chuck along said additional direction.
Claim 6
Dependent Claim
36 words
The support system as recited in claim 1 further including a processor and a memory in data communication with said processor, with said processor being in data communications with said actuators to generate control signals therefor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-12-10 | 2011-06-11 | 2011-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-12-10 | 2015-06-11 | 2015-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-12-10 | 2019-06-11 | 2019-12-11 | $7700.00 | Window Closed / Lapsed |