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US6100628A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron emissive film and method

Assignee: Motorola Solutions Inc
•
Filing: 1999-05-28
•
Granted: 2000-08-08
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Expires: 2019-05-28
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Abstract

Abstract A method for forming an electron emissive film (200, 730, 830) includes the steps of: (i) evaporating a graphite source (120, 620) in a cathodic arc deposition apparatus (100, 600) to create a carbon plasma (170, 670), (ii) applying a potential difference between the graphite source (120, 620) and a glass or silicon deposition substrate (130, 630, 710, 810) for accelerating the carbon plasma (170, 670) toward the deposition substrate (130, 630, 710, 810), (iii) providing a working gas within the cathodic arc deposition apparatus (100, 600), and (ii) depositing the carbon plasma (170, 670) onto the deposition substrate (130, 630, 710, 810).

Inventors

  • 👤 Bernard F. Coll
  • 👤 Eric P. Menu
  • 👤 Albert Alec Talin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 18:14
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/06; C23C14/0605; B; B82; B82Y; B82Y30/00; C23C14/24; C23C14/32; C23C14/325; H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 120 words
A field emission device comprising: a supporting substrate having a major surface; an electron emitter disposed on the major surface of the supporting substrate and including an electron emissive film made from partially graphitized nanocrystalline carbon, the electron emitter having an emissive surface and being operably coupled to a first voltage source; and an anode spaced from the electron emitter to define an interspace region between the electron emitter and the anode, the anode being operably coupled to a second voltage source whereby the first and second voltage sources provide a suitable electric field between the electron emitter and the anode to cause electrons emitted by the electron emitter to traverse the interspace region and be received by the anode.
Claim 2
Dependent Claim 120 words
A field emission device comprising: a supporting substrate having a major surface; an electron emitter disposed on the major surface of the supporting substrate and including an electron emissive film made from partially graphitized nanocrystalline carbon, the electron emitter having an emissive surface and being operably coupled to a first voltage source; and an anode spaced from the electron emitter to define an interspace region between the electron emitter and the anode, the anode being operably coupled to a second voltage source whereby the first and second voltage sources provide a suitable electric field between the electron emitter and the anode to cause electrons emitted by the electron emitter to traverse the interspace region and be received by the anode.
Claim 3
Dependent Claim 23 words
A field emission device as claimed in claim 1 wherein the electron emissive film has a thickness within a range of 0.01-2 micrometers.
Claim 4
Dependent Claim 17 words
A field emission device as claimed in claim 1 wherein the supporting substrate is made from glass.
Claim 5
Dependent Claim 72 words
A field emission device as claimed in claim 1 further including a dielectric layer having a major surface and defining an emitter well and being disposed on the major surface of the supporting substrate, the emissive surface of the electron emitter being disposed within the emitter well, the field emission device further including a gate electrode disposed on the major surface of the dielectric layer and peripherally disposed about the electron emitter.
Claim 6
Dependent Claim 81 words
A field emission display comprising: an anode plate having a major surface including a conductive layer disposed thereon and a plurality of cathodoluminescent deposits formed on the conductive layer; a cathode plate having a major surface including a plurality of selectively addressable field emitters having a electron emissive film made from partially graphitized nanocrystalline carbon; and a frame disposed between the anode plate and the cathode plate to define an interspace region therebetween having a pressure of about 10 -6 Torr.
Claim 7
Dependent Claim 81 words
A field emission display comprising: an anode plate having a major surface including a conductive layer disposed thereon and a plurality of cathodoluminescent deposits formed on the conductive layer; a cathode plate having a major surface including a plurality of selectively addressable field emitters having a electron emissive film made from partially graphitized nanocrystalline carbon; and a frame disposed between the anode plate and the cathode plate to define an interspace region therebetween having a pressure of about 10 -6 Torr.

References Cited (Backward Citations)

US5458754A Cited
US5536193A Cited
US5279723A Cited
US5413684A Cited
WO1994012680A1 Cited
US5848925A Cited
US5804909A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-08-08 2004-02-07 2004-08-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-08-08 2008-02-07 2008-08-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-08-08 2012-02-07 2012-08-08 $7700.00 Window Closed / Lapsed

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