Abstract This invention relates to a fabrication method of field emission device by using a carbon nano-tubes and, more particularly, to a fabrication method of field emission device by using the carbon nano-tubes, gathering much attention as a new material, as a field emission tips which have thin and stiff edges so that a threshold voltage required for emitting electron of the field emission device is to be lowered drastically. This invention provides a fabrication method of the field emission device using a thermally and chemically stable carbon nano-tubes, which have very stiff and nano-meter-thick edges, as a field emission tips so that the field emission device using the carbon nano-tubes as the tips, which have an excellent electron beam coherency, can emit electrons at a very low voltage and very stable during a long period.
A method of fabricating a field emission device, comprising the steps of: forming a silicon oxide layer on a silicon substrate; forming a plurality of holes by etching selected portions of said silicon oxide layer on a silicon substrate; filling said holes with carbon nano-tube, in which the carbon nanotube is vertically and reqularly filed in said holes; forming field emission tips by eliminating the carbon nanotube which is not filled in said holes; and sequentially forming a grids and a fluorescent plate on a portion spaced from said field emission tips.
Claim 2
Independent Claim
92 words
A method of fabricating a field emission device, comprising the steps of: forming a silicon oxide layer on a silicon substrate; forming a plurality of holes by etching selected portions of said silicon oxide layer on a silicon substrate; filling said holes with carbon nano-tube, in which the carbon nanotube is vertically and reqularly filed in said holes; forming field emission tips by eliminating the carbon nanotube which is not filled in said holes; and sequentially forming a grids and a fluorescent plate on a portion spaced from said field emission tips.
Claim 3
Dependent Claim
16 words
The method of claim 1, wherein said carbon nano-tubes have a nano-meter-sized radius of curvature edges.