US5858566A
Expired / Lapsed
US
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Seeded underlayer in magnetic thin films
Assignee: Seagate Technology LLC
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Filing: 1996-07-03
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Granted: 1999-01-12
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Expires: 2016-07-03
Abstract
Abstract A seed layer is deposited under an underlayer in magnetic thin film media. The seed layer material has a similar lattice parameter and a similar crystal structure to the underlayer material. The preferred structure involves a nickel-aluminum seed layer, under a chromium underlayer, under a cobalt-based magnetic layer. Use of the nickel-aluminum seed layer produces higher coercivity and lower media noise in the resultant magnetic thin film. The coercivity and media noise values for the resultant magnetic thin film are dependent upon deposition parameters, and recommended deposition parameters are given.
Inventors
- 👤 Bing Zhang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:20
CPC Classifications
G; G11; G11B; G11B5/00; G11B5/62; G11B5/73; G11B5/7368; G11B5/7379; G11B5/7369; Y; Y10; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
73 words
A thin film medium for magnetic recording of information, the thin film medium comprising: a substrate; a seed layer of nickel-aluminum alloy deposited over the substrate, the seed layer having a seed layer thickness; an underlayer of chromium-based metal deposited over the seed layer, the underlayer having an underlayer thickness which is about as thick or thicker than the seed layer thickness; and a film of a magnetic material deposited over the underlayer.
Claim 2
Dependent Claim
73 words
A thin film medium for magnetic recording of information, the thin film medium comprising: a substrate; a seed layer of nickel-aluminum alloy deposited over the substrate, the seed layer having a seed layer thickness; an underlayer of chromium-based metal deposited over the seed layer, the underlayer having an underlayer thickness which is about as thick or thicker than the seed layer thickness; and a film of a magnetic material deposited over the underlayer.
Claim 3
Dependent Claim
21 words
The thin film medium of claim 1 wherein the seed layer has a molar ratio of from 41.5 to 55% aluminum.
Claim 4
Dependent Claim
19 words
The thin film medium of claim 2 wherein the seed layer has a molar ratio of about 50% aluminum.
Claim 5
Dependent Claim
14 words
The thin film medium of claim 1 wherein the underlayer is substantially pure chromium.
Claim 6
Dependent Claim
17 words
The thin film medium of claim 1 wherein the film of magnetic material is a cobalt-based alloy.
Claim 7
Dependent Claim
16 words
The thin film medium of claim 5 wherein the cobalt-based magnetic material is a cobalt-chromium-tantalum alloy.
Claim 8
Dependent Claim
24 words
The thin film medium of claim 1, further comprising: an overcoat over the film of magnetic material; and a lubricant layer over the overcoat.
Claim 9
Dependent Claim
22 words
The thin film medium of claim 1 wherein the seed layer has a thickness within the range of 150 to 450 Angstroms.
Claim 10
Dependent Claim
18 words
The thin film medium of claim 8 wherein the seed layer has a thickness of about 270 Angstroms.
Claim 11
Dependent Claim
21 words
The thin film medium of claim 1 wherein the underlayer has a thickness within the range of 300 to 650 Angstroms.
Claim 12
Dependent Claim
17 words
The thin film medium of claim 10 wherein the underlayer has a thickness of about 500 Angstroms.
Claim 13
Dependent Claim
21 words
The thin film medium of claim 1 wherein the underlayer is 1.5 to 2.5 times as thick as the seed layer.
Claim 14
Independent Claim
72 words
A method of manufacturing a thin film medium for magnetic recording of information, comprising the acts of: depositing a seed layer of nickel-aluminum alloy over a substrate to a seed layer thickness; depositing an underlayer of chromium-based metal over the seed layer to an underlayer thickness, the underlayer thickness being about as thick or thicker than the seed layer thickness; and depositing a magnetic thin film of cobalt-based alloy over the underlayer.
Claim 15
Independent Claim
72 words
A method of manufacturing a thin film medium for magnetic recording of information, comprising the acts of: depositing a seed layer of nickel-aluminum alloy over a substrate to a seed layer thickness; depositing an underlayer of chromium-based metal over the seed layer to an underlayer thickness, the underlayer thickness being about as thick or thicker than the seed layer thickness; and depositing a magnetic thin film of cobalt-based alloy over the underlayer.
Claim 16
Dependent Claim
13 words
The method of claim 13 wherein the depositing acts are achieved by sputtering.
Claim 17
Dependent Claim
54 words
The method of claim 14, wherein the sputtering of the seed layer is performed at a power within the range of about 0.5 to 1.5 kilowatts, a bias within the range of about 0 to 250 volts, and a gas flow within the range of about 8 to 15 standard cubic centimeters per minute.
Claim 18
Dependent Claim
39 words
The method of claim 15, wherein the sputtering of the seed layer is performed at a power of about 0.9 kilowatts, a bias of about 0 volts, and a gas flow of about 12 standard cubic centimeters per minute.
Claim 19
Dependent Claim
24 words
The method of claim 14, wherein the sputtering of the underlayer is performed at a power within the range of 1.25 to 2.5 kilowatts.
Claim 20
Dependent Claim
38 words
The method of claim 17, wherein the sputtering of the underlayer is performed at a power of about 2.0 kilowatts, a bias of about -250 volts, and a gas flow of about 25 standard cubic centimeters per minute.
Claim 21
Dependent Claim
31 words
The method of claim 14, wherein the sputtering of the magnetic thin film is performed at a gas flow within the range of 12 to 35 standard cubic centimeters per minute.
Claim 22
Dependent Claim
40 words
The method of claim 14, wherein the sputtering of the magnetic thin film is performed at a power of about 0.98 kilowatts, a bias of about -250 volts, and a gas flow of about 30 standard cubic centimeters per minute.
Claim 23
Dependent Claim
18 words
The method of claim 13, further comprising the act of heating the substrate before depositing the seed layer.
Claim 24
Dependent Claim
18 words
The method of claim 13, further comprising the act of applying an overcoat over the magnetic thin film.
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| 3.5 Years (Year 4) | 2002-01-11 | 2002-07-13 | 2003-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-11 | 2006-07-13 | 2007-01-12 | $3760.00 | Window Closed / Lapsed |
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