US5709588A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing slurry and polishing process using the same
Assignee: Sony Corp
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Filing: 1996-09-10
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Granted: 1998-01-20
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Expires: 2016-09-10
Abstract
Abstract A polishing slurry used for a process of polishing a workpiece by bringing the workpiece in sliding-contact with a polishing plate supplied with the slurry, and a polishing process using the slurry. The slurry includes polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material. The slurry is effective to polish a workpiece without occurrence of scratches on the surface of the workpiece.
Inventors
- 👤 Masakazu Muroyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 08:10
CPC Classifications
C; C09; C09G; C09G1/00; C09G1/02; H; H10; H10P; H10P52/00; H10P52/40; H10P52/402; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
56 words
A polishing slurry used for a process of polishing a workpiece by bringing said workpiece in sliding-contact with a polishing plate supplied with said slurry, said slurry comprising polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material.
Claim 2
Dependent Claim
56 words
A polishing slurry used for a process of polishing a workpiece by bringing said workpiece in sliding-contact with a polishing plate supplied with said slurry, said slurry comprising polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material.
Claim 3
Dependent Claim
22 words
A polishing slurry according to claim 1, wherein said carboxyl group containing material in said surface finishing agent is an hydroxycarboxylic acid.
Claim 4
Dependent Claim
23 words
A polishing slurry according to claim 1, wherein said sulfonic acid group containing material in said surface finishing agent is an alkylsulfonic acid.
Claim 5
Dependent Claim
16 words
A polishing slurry according to claim 1, wherein said amino group containing material is an alkylamine.
Claim 6
Dependent Claim
52 words
A process of polishing a workpiece by bringing said workpiece in sliding-contact with a polishing plate supplied with a slurry, wherein said slurry comprises polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material.
Claim 7
Dependent Claim
52 words
A process of polishing a workpiece by bringing said workpiece in sliding-contact with a polishing plate supplied with a slurry, wherein said slurry comprises polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material.
Claim 8
Dependent Claim
22 words
A polishing process according to claim 5, wherein said carboxyl group containing material in said surface finishing agent is an hydroxycarboxylic acid.
Claim 9
Dependent Claim
23 words
A polishing process according to claim 5, wherein said sulfonic acid group containing material in said surface finishing agent is an alkylsulfonic acid.
Claim 10
Dependent Claim
21 words
A polishing method according to claim 5, wherein said amino group containing material in said surface finishing agent is an alkylamine.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-01-19 | 2001-07-21 | 2002-01-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-01-19 | 2005-07-21 | 2006-01-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-01-19 | 2009-07-21 | 2010-01-20 | $7700.00 | Window Closed / Lapsed |