US5569968A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microfabricated acoustic source and receiver
Assignee: University of California, San Diego
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Filing: 1994-09-14
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Granted: 1996-10-29
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Expires: 2014-09-14
Abstract
Abstract A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.
Inventors
- 👤 Amit Lal
- 👤 Richard M. White
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 05:19
CPC Classifications
A; A61; A61B; A61B17/00; A61B17/32; A61B17/320068; A61B18/00; A61B18/04; A61B18/12; A61B18/14; A61B18/1402; B; B06; B06B; B06B1/00; B06B1/02; B06B1/06; B06B1/0688; H; H04; H04R; H04R17/00; H04R17/005; H10; H10N; H10N30/00; H10N30/20; H10N30/204; H10N30/2041; H10N30/2042; H10N30/2047; A61B17/00234; A61B2017/00345; A61B2017/00831; A61B2017/0088; A61B2018/00053; A61B2018/00107; A61B2018/00119; H04R17/04; H04R17/08
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
121 words
A microfabricated acoustic source or receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.
Claim 2
Dependent Claim
121 words
A microfabricated acoustic source or receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.
Claim 3
Dependent Claim
11 words
The structure of claim 1 wherein said first material is silicon.
Claim 4
Dependent Claim
11 words
The structure of claim 1 wherein said membrane has elasto-optic properties.
Claim 5
Dependent Claim
13 words
The structure of claim 1 wherein said inputting means includes a piezoelectric transducer.
Claim 6
Dependent Claim
33 words
The structure of claim 4 wherein said transducer means includes a zinc oxide layer and two layers of a conductive material, said zinc oxide layer disposed between said layers of a conductive material.
Claim 7
Dependent Claim
19 words
The structure of claim 1 wherein the thickness of said first section is between about 500 and 550 microns.
Claim 8
Dependent Claim
19 words
The structure of claim 6 wherein the thickness of said second section is between about 40 and 100 microns.
Claim 9
Dependent Claim
19 words
The structure of claim 6 wherein the thickness of said second section is between about 50 and 70 microns.
Claim 10
Dependent Claim
18 words
The structure of claim 1 wherein the thickness of said membrane is between about one and four microns.
Claim 11
Dependent Claim
15 words
The structure of claim 9 wherein the thickness of said membrane is about two microns.
Claim 12
Dependent Claim
131 words
A microfabricated acoustic source structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; transducer means mechanically coupled to said membrane; means for supplying electrical power to said transducer means to cause a flexural wave action in said second section of said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, a lateral extent of said preselected region being less than a lateral extent of said second section.
Claim 13
Dependent Claim
131 words
A microfabricated acoustic source structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; transducer means mechanically coupled to said membrane; means for supplying electrical power to said transducer means to cause a flexural wave action in said second section of said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, a lateral extent of said preselected region being less than a lateral extent of said second section.
Claim 14
Dependent Claim
11 words
The structure of claim 11 wherein said first material is silicon.
Claim 15
Dependent Claim
12 words
The structure of claim 11 wherein said second material is silicon nitride.
Claim 16
Dependent Claim
13 words
The structure of claim 11 wherein said transducer means includes a piezoelectric film.
Claim 17
Dependent Claim
19 words
The structure of claim 11 wherein the thickness of said first section is between about 500 and 550 microns.
Claim 18
Dependent Claim
19 words
The structure of claim 15 wherein the thickness of said second section is between about 40 and 100 microns.
Claim 19
Dependent Claim
18 words
The structure of claim 11 wherein the thickness of said membrane is between about one and four microns.
Claim 20
Dependent Claim
15 words
The structure of claim 17 wherein the thickness of said membrane is about two microns.
Claim 21
Dependent Claim
26 words
The structure of claim 11 wherein said transducer means includes a plurality of parallel finger elements of conductive material connected to said electrical power supplying means.
Claim 22
Dependent Claim
46 words
The structure of claim 11 wherein said transducer means includes first and second conductive elements wherein said first conductive element is connected to said electrical power supplying means and said second conductive element is connected in a feedback loop for controlling frequency response of the structure.
Claim 23
Dependent Claim
118 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section comprises a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.
Claim 24
Dependent Claim
118 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section comprises a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section.
Claim 25
Dependent Claim
11 words
The structure of claim 21 wherein said first material is silicon.
Claim 26
Dependent Claim
12 words
The structure of claim 21 wherein said second material is silicon nitride.
Claim 27
Dependent Claim
13 words
The structure of claim 21 wherein said transducer means includes a piezoelectric film.
Claim 28
Dependent Claim
19 words
The structure of claim 21 wherein the thickness of said first section is between about 500 and 550 microns.
Claim 29
Dependent Claim
19 words
The structure of claim 25 wherein the thickness of said second section is between about 40 and 100 microns.
Claim 30
Dependent Claim
18 words
The structure of claim 21 wherein the thickness of said membrane is between about one and four microns.
Claim 31
Dependent Claim
20 words
The structure of claim 21 wherein said transducer means is connected to an amplification means for amplifying the electrical signal.
Claim 32
Dependent Claim
110 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second sections; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a notch structure that does not enclose said transducer means.
Claim 33
Dependent Claim
110 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second sections; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a notch structure that does not enclose said transducer means.
Claim 34
Dependent Claim
14 words
The structure of claim 29 wherein said notch structure includes at least one beam.
Claim 35
Dependent Claim
112 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a cantilever structure that encloses at least part of said transducer means.
Claim 36
Dependent Claim
112 words
A microfabricated acoustic receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; transducer means mechanically coupled to said substrate for sensing mechanical vibration in said second section to produce an electrical signal; and wherein said second section has a preselected region from which said first material has been removed, said preselected region having a lateral extent less than a lateral extent of said second section, said second section including a plate shaped to produce a predetermined acoustic response and said preselected region defines a cantilever structure that encloses at least part of said transducer means.
Claim 37
Dependent Claim
14 words
The structure of claim 31 wherein said cantilever structure includes at least one beam.
Claim 38
Dependent Claim
12 words
The structure of claim 11 wherein said plate has an open end.
Claim 39
Dependent Claim
14 words
The structure of claim 33 wherein said open end has an angled cutting edge.
Claim 40
Dependent Claim
13 words
The structure of claim 34 wherein said open end has a beak-like configuration.
Claim 41
Dependent Claim
12 words
The structure of claim 1 wherein said second material is silicon nitride.
Claim 42
Independent Claim
128 words
A method for producing acoustic signals, comprising: providing an acoustic source including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; means, a membrane disposed on said substrate over said first and second sections, means, mechanically coupled to said membrane, for inputting mechanical energy in said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and activating said means for inputting mechanical energy in said substrate.
Claim 43
Independent Claim
128 words
A method for producing acoustic signals, comprising: providing an acoustic source including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; means, a membrane disposed on said substrate over said first and second sections, means, mechanically coupled to said membrane, for inputting mechanical energy in said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and activating said means for inputting mechanical energy in said substrate.
Claim 44
Independent Claim
132 words
A method for receiving acoustic signals, comprising: providing an acoustic receiver including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane disposed on said substrate over said first and second sections; means, mechanically coupled to said substrate, for sensing mechanical energy in said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and using said means for sensing mechanical energy in said substrate to sense said acoustic signals.
Claim 45
Independent Claim
132 words
A method for receiving acoustic signals, comprising: providing an acoustic receiver including a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane disposed on said substrate over said first and second sections; means, mechanically coupled to said substrate, for sensing mechanical energy in said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane, said preselected region having a lateral extent less than a lateral extent of said second section; and using said means for sensing mechanical energy in said substrate to sense said acoustic signals.
Claim 46
Dependent Claim
105 words
A microfabricated acoustic source or receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane.
Claim 47
Dependent Claim
105 words
A microfabricated acoustic source or receiver structure, comprising: a substrate of a first material, said substrate having first and second sections wherein said first section is thicker than said second section; a membrane of a second material disposed on said substrate over said first and second sections; means, mechanically coupled to said membrane, for inputting or sensing mechanical energy in said membrane and said substrate; and wherein said second section of said substrate includes a plate shaped to produce a predetermined acoustic response, said plate shaped by removing said first material from a preselected region of said second section of said substrate exposing said membrane.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-10-29 | 2000-04-29 | 2000-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-10-29 | 2004-04-29 | 2004-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-10-29 | 2008-04-29 | 2008-10-29 | $7700.00 | Window Closed / Lapsed |