US5388577A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrode array microchip
Assignee: Boston University
•
Filing: 1993-05-04
•
Granted: 1995-02-14
•
Expires: 2013-05-04
Abstract
Abstract An electrode array microchip, fabricated preferrably using CMOS technology, comprising electrodes made with overglass cuts over metal2 regions is disclosed. Overglass cuts of dimensions approximately an order of magnitude smaller than dimensions quoted in current design rules for CMOS technology are successfully employed to make exposed electrodes of dimensions on the order of microns. Thus, the electrode array chip can be produced cheaply on commercial fabrication lines. The invention finds many uses in biology and medicine, particularly when applied to the measurement of neural electrical activity.
Inventors
- 👤 Allyn E. Hubbard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:24
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; G; G01; G01N; G01N33/00; G01N33/48; G01N33/483; G01N33/4833; G01N33/4836; H10W72/251
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
140 words
An electrode army microchip for receiving biological electrical signals comprising: a plurality of substantially planar metal regions supported on a surface of a substrate, insulating material covering said plurality of metal regions and said surface, cuts in said insulating material, at least one of said cuts having a width of at least one micron, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry.
Claim 2
Dependent Claim
140 words
An electrode army microchip for receiving biological electrical signals comprising: a plurality of substantially planar metal regions supported on a surface of a substrate, insulating material covering said plurality of metal regions and said surface, cuts in said insulating material, at least one of said cuts having a width of at least one micron, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry.
Claim 3
Dependent Claim
166 words
A CMOS electrode array microchip for receiving biological electrical signals comprising: a pattern of adjacently arranged and substantially planar metal regions on a surface of a substrate, adjacent regions separated by a distance, insulating material covering said pattern of metal regions and said surface, a plurality of cuts in said insulating material, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, at least one cut of said plurality of cuts having a width of three microns, said width at least equal to the distance between two adjacent metal regions, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry.
Claim 4
Dependent Claim
166 words
A CMOS electrode array microchip for receiving biological electrical signals comprising: a pattern of adjacently arranged and substantially planar metal regions on a surface of a substrate, adjacent regions separated by a distance, insulating material covering said pattern of metal regions and said surface, a plurality of cuts in said insulating material, said cuts arranged to expose portions of said metal regions, whereby each exposed portion forms a substantially planar electrode for engagement with a biological material, at least one cut of said plurality of cuts having a width of three microns, said width at least equal to the distance between two adjacent metal regions, and regions of metal electrically connected to said electrodes to form electrical connections from said electrodes to wire bonding or probe sites on a surface of said microchip or to integrated circuitry within said microchip, whereby biological electrical signals from said biological material detectable at said electrodes are transmitted to said wire bonding or probe sites or to said integrated circuitry.
Claim 5
Dependent Claim
16 words
The microchip of claims 1 or 2 wherein said insulating material is comprised of silicon dioxide.
Claim 6
Dependent Claim
14 words
The microchip of claims 1 or 2 wherein said substrate is comprised of silicon.
Claim 7
Dependent Claim
13 words
The microchip of claims 1 or 2 wherein said microchip comprises integrated circuitry.
Claim 8
Dependent Claim
24 words
The microchip of claim 5 wherein said integrated circuitry provides multiplexing means for electrical signals between the electrodes and wire bonding or probe pads.
Claim 9
Dependent Claim
20 words
The microchip of claims 1 or 2 attached to a support, whereby said support permits manual manipulation of said microchip.
Claim 10
Dependent Claim
38 words
The microchip of claim 7 further comprising means for electrically connecting said wire bonding or probe sites or said integrated circuitry of said microchip to a display or recording device, whereby said electrical signals are displayed or recorded.
Claim 11
Dependent Claim
35 words
The microchip of claims 1 or 3 further comprising a conducting material deposited on each said electrode, whereby the resulting electrode is made to extend to the surface or above the surface of said microchip.
Claim 12
Dependent Claim
20 words
The microchip of claim 9 wherein said conducting material is gold, deposited to form a point on each said electrode.
Claim 13
Dependent Claim
37 words
The microchip of claim 9 further comprising a post fabrication line insulating coating over the surface of said microchip, said coating being removed over a portion of each extended electrode, whereby effective electrode surface area is reduced.
Claim 14
Dependent Claim
24 words
The microchip of clam 9 wherein said-conducting material is platinum black electrochemically deposited on each said electrode, whereby effective electrode surface area is increased.
Claim 15
Dependent Claim
24 words
The microchip of clam 9 wherein said-conducting material is platinum black electrochemically deposited on each said electrode, whereby effective electrode surface area is increased.
References Cited (Backward Citations)
US4319264A
Cited
US4947114A
Cited
US4628338A
Cited
US4499440A
Cited
US4597167A
Cited
US4589191A
Cited
US4821094A
Cited
US4969468A
Cited
US4924276A
Cited
US5593304A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-02-13 | 1998-08-15 | 1999-02-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-02-13 | 2002-08-15 | 2003-02-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-02-13 | 2006-08-15 | 2007-02-14 | $7700.00 | Window Closed / Lapsed |