US5332352A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Robot prealigner
Assignee: ADE Corp
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Filing: 1992-04-06
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Granted: 1994-07-26
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Expires: 2012-04-06
Abstract
Abstract An alignment station for elements such as semiconductor wafers on a robot arm uses a rotating support and edge detector which in combination are operative to place a wafer on the rotating support, detect wafer alignment, move the wafer to bring it into alignment either on the rotating support itself or onto a separate station.
Inventors
- 👤 Noel S. Poduje
- 👤 Roy S. Mallory
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:00
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/50; H10P72/53; B; B25; B25J; B25J13/00; B25J13/08; B25J13/088; B25J9/00; B25J9/02; B25J9/04; B25J9/041; B25J9/042; B25J9/16; B25J9/1679
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
188 words
A system for combined element transport and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that said misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm, having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 2
Independent Claim
188 words
A system for combined element transport and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that said misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm, having means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, having means for providing both a second direction of motion about an axis and a third direction of motion in elevation, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 3
Dependent Claim
27 words
The system of claim 1, wherein said characterizing means includes means for rotating said element and detecting a position of an edge of said element during rotation.
Claim 4
Dependent Claim
36 words
The system of claim 1, wherein said manipulator legs are coupled to move at an angular rate relative to each other which is twice the angular rate by which either leg moves relative to the holder.
Claim 5
Dependent Claim
35 words
The system of claim 2 wherein: said means for moving is operative to lift the element from the pedestal in a misalignment position and to replace the element on the pedestal in an aligned position.
Claim 6
Dependent Claim
12 words
The system of claim 4, wherein said element is a semiconductor wafer.
Claim 7
Dependent Claim
29 words
The system of claim 5, wherein: said means for controlling includes means for locating a fiducial of said wafer at a predetermined alignment relative to said straight line direction.
Claim 8
Dependent Claim
42 words
The system of claim 1, wherein said angling means, said means providing both a second direction of motion about an axis, and a third direction of motion in elevation are operative to deliver said element on said holder to a work station.
Claim 9
Independent Claim
167 words
A method for combined element transport and alignment comprising the steps of: dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of the pedestal; positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; producing, with a linear manipulator having an element holder on an articulated two leg arm and means for angling the legs of the arm, a first direction of motion for said holder along a straight line, a second direction of motion about an axis and a third direction of motion in elevation; maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; and aligning the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 10
Independent Claim
167 words
A method for combined element transport and alignment comprising the steps of: dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of the pedestal; positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; producing, with a linear manipulator having an element holder on an articulated two leg arm and means for angling the legs of the arm, a first direction of motion for said holder along a straight line, a second direction of motion about an axis and a third direction of motion in elevation; maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; and aligning the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 11
Dependent Claim
25 words
The method of claim 8, wherein said characterizing step includes rotating said element and detecting a position of an edge of said element during rotation.
Claim 12
Dependent Claim
34 words
The method of claim 8, wherein the moving step includes the steps of lifting the element from the pedestal in a misaligned position and replacing the element on the pedestal in an aligned position.
Claim 13
Dependent Claim
12 words
The method of claim 10, wherein said element is a semiconductor wafer.
Claim 14
Dependent Claim
26 words
The method of claim 11, wherein said aligning step includes positioning a fiducial of said wafer at a predetermined alignment relative to said straight line direction.
Claim 15
Dependent Claim
20 words
The method of claim 8, further including the step of delivering said element on said holder to a work station.
Claim 16
Dependent Claim
56 words
The method of claim 8, wherein said producing step includes the steps of providing a preliminary motion, prior to moving said element, in the same direction of at least one of r and theta directions, and a concluding motion in moving said element where said preliminary motion is in the same direction as said concluding motion.
Claim 17
Dependent Claim
22 words
The method of claim 8, further including the step of angularly positioning an artifact of said element at a predetermined angular orientation.
Claim 18
Independent Claim
222 words
A system for combined element transport to and from a station and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm, means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; means coupled to the linear manipulator and cooperative with the station and the pedestal for providing a controlled relative motion of said holder and station and said holder and pedestal in a second direction of motion about an axis and a third direction of motion in elevation; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means cooperative with the linear manipulator for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 19
Independent Claim
222 words
A system for combined element transport to and from a station and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm, means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, and having means for maintaining the angular position of the holder relative to said straight line during motion of the holder in the first direction; means coupled to the linear manipulator and cooperative with the station and the pedestal for providing a controlled relative motion of said holder and station and said holder and pedestal in a second direction of motion about an axis and a third direction of motion in elevation; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means cooperative with the linear manipulator for moving said element on said holder in the straight line direction as a function of the misalignment thereof.
Claim 20
Independent Claim
183 words
A system for combined element transport and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, a second direction about an axis and a third direction of motion in elevation; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof; said means for moving being operative to lift the element from the pedestal in a misaligned position and to replace the element on the pedestal in an aligned position.
Claim 21
Independent Claim
183 words
A system for combined element transport and alignment comprising: means for dimensionally characterizing a misalignment of an element on a pedestal, said misalignment including the position of the element centroid relative to the center of rotation of said pedestal; means for positioning the element on the pedestal so that misalignment occurs along a predetermined straight line direction; a linear manipulator having an element holder on an articulated two leg arm means for angling the legs of the arm to produce a first direction of motion for said holder along a straight line, a second direction about an axis and a third direction of motion in elevation; and means for controlling the means for positioning to align the first direction of motion along said predetermined straight line direction when said element misalignment is therealong and means for moving said element on said holder in the straight line direction as a function of the misalignment thereof; said means for moving being operative to lift the element from the pedestal in a misaligned position and to replace the element on the pedestal in an aligned position.
Claim 22
Dependent Claim
205 words
Apparatus for aligning an element comprising: a robot arm comprising a base and an arm coupled to the base for supporting said element, said arm being moveable radially, along an axis passing through the center of said base, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent of one another; a rotatable pedestal for receiving said element from said arm, wherein said axis further passes through the center of said pedestal; an edge sensor disposed adjacent to said rotatable pedestal for sensing the position on an edge of said element relative to a predetermined location of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal; and electronics, responsive to said sensed edge position, for providing a rotation control signal representing said sensed angle of offset, wherein said rotatable pedestal is responsive to said rotation control signal to rotate said pedestal so that said offset is aligned with said axis, wherein said element is supported by said arm and moved radially along said axis to reduce said sensed magnitude of offset.
Claim 23
Dependent Claim
205 words
Apparatus for aligning an element comprising: a robot arm comprising a base and an arm coupled to the base for supporting said element, said arm being moveable radially, along an axis passing through the center of said base, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent of one another; a rotatable pedestal for receiving said element from said arm, wherein said axis further passes through the center of said pedestal; an edge sensor disposed adjacent to said rotatable pedestal for sensing the position on an edge of said element relative to a predetermined location of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal; and electronics, responsive to said sensed edge position, for providing a rotation control signal representing said sensed angle of offset, wherein said rotatable pedestal is responsive to said rotation control signal to rotate said pedestal so that said offset is aligned with said axis, wherein said element is supported by said arm and moved radially along said axis to reduce said sensed magnitude of offset.
Claim 24
Dependent Claim
22 words
The apparatus recited in claim 18 wherein said edge sensor senses said edge position as said element is rotated on said pedestal.
Claim 25
Dependent Claim
26 words
The apparatus recited in claim 19 wherein said robot arm comprises means for delivering said element on said arm to a station with a predetermined alignment.
Claim 26
Independent Claim
151 words
A method for aligning an element comprising the steps of: placing said element on a rotatable pedestal, said element having an edge and a centroid associated therewith; sensing the position of said edge relative to a center of rotation of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal; rotating said element on said pedestal in response to said sensed angle of offset so that said offset is aligned with a predetermined axis; and supporting said element with a robot arm, said robot arm being moveable radially along said predetermined axis, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent, to move said element radially along said predetermined axis to reduce said sensed magnitude of offset.
Claim 27
Independent Claim
151 words
A method for aligning an element comprising the steps of: placing said element on a rotatable pedestal, said element having an edge and a centroid associated therewith; sensing the position of said edge relative to a center of rotation of said pedestal, wherein said sensed edge position corresponds to an offset characterized by an angle of offset and a magnitude of offset between the centroid of said element and said center of rotation of said pedestal; rotating said element on said pedestal in response to said sensed angle of offset so that said offset is aligned with a predetermined axis; and supporting said element with a robot arm, said robot arm being moveable radially along said predetermined axis, rotationally with respect to said axis, and elevationally, wherein said radial, rotational, and elevational movements are independent, to move said element radially along said predetermined axis to reduce said sensed magnitude of offset.
Claim 28
Dependent Claim
37 words
The method recited in claim 4 further comprising the step of transporting said element to a station with a predetermined alignment by supporting said element with said robot arm and moving said robot arm to said station.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-07-25 | 1998-01-24 | 1998-07-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-07-25 | 2002-01-24 | 2002-07-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-07-25 | 2006-01-24 | 2006-07-26 | $7700.00 | Window Closed / Lapsed |