Amorphous thin film as solid lubricant on a substrate and method for production thereof

Claim 2

An amorphous thin film as a solid lubricant coated upon a base which comprises silicon (Si), oxygen (O), carbon (C), and hydrogen (H), said thin film having a composition defined by the formula: Si.sub.x (O.sub.m, C.sub.n, H.sub.1-m-n).sub.1-x where, x=0.03-0.20, m=0.05-0.5, n=0.1-0.9, and 0.6≦m+n≦0.95.

Claim 3

An amorphous thin film according to claim 1, wherein said thin film has a thickness of 0.5-10 μm.

Claim 4

A process for producing an amorphous thin film as a solid lubricant, which comprises disposing an article to be treated in a vacuum container, heating and depositing an organic substance on said article in a vacuum atmosphere, of 1×10 -4 Torr or less said organic substance comprising Si, O, C, and H such that the resulting deposited film has a composition defined by the formula: Si.sub.x (O.sub.m, C.sub.n, H.sub.1-m-n).sub.1-x where, x=0.02-0.15, m=0.05-0.3, n=0.1-0.6, and 0.4≦m+n≦0.65, thereby forming the deposited film on said article, and simultaneously irradiating on said article ions of a gaseous element having energy of 2 keV or more at a dose of 1×10 15 ions/cm 2 or more in a vacuum atmosphere of 1×10 -4 Torr or less.

Claim 5

A process for producing an amorphous thin film as a solid lubricant, which comprises disposing an article to be treated in a vacuum container, heating and depositing an organic substance on said article in a vacuum atmosphere, of 1×10 -4 Torr or less said organic substance comprising Si, O, C, and H such that the resulting deposited film has a composition defined by the formula: Si.sub.x (O.sub.m, C.sub.n, H.sub.1-m-n).sub.1-x where, x=0.02-0.15, m=0.05-0.3, n=0.1-0.6, and 0.4≦m+n≦0.65, thereby forming the deposited film on said article, and simultaneously irradiating on said article ions of a gaseous element having energy of 2 keV or more at a dose of 1×10 15 ions/cm 2 or more in a vacuum atmosphere of 1×10 -4 Torr or less.

Claim 6

A process according to claim 3, wherein He + ions are used for ion irradiation at a dose of 1×10 16 ions/cm 2 or more.

Claim 7

A process for producing an amorphous thin film as a solid lubricant, which comprises: disposing an article to be treated in a vacuum container, evacuating any remaining gas from said vacuum container, introducing a heating gas into said vacuum container, and heating the surface of said article to a predetermined temperature, and introducing into said vacuum container a film forming gas comprising a silicon compound gas, an oxygen compound gas, a carbon compound gas, and a hydrogen compound gas, and causing discharge, thereby forming an amorphous thin film on said article, and said amorphous thin film has a composition defined by the following formula: Si.sub.x (O.sub.m,C.sub.n,H.sub.1-m-n).sub.1-x wherein, x=0.03=0.20, m=0.05-0.5, n=0.1-0.9, and 0.6≦m+n≦0.95.

Claim 8

A process for producing an amorphous thin film as a solid lubricant, which comprises: disposing an article to be treated in a vacuum container, evacuating any remaining gas from said vacuum container, introducing a heating gas into said vacuum container, and heating the surface of said article to a predetermined temperature, and introducing into said vacuum container a film forming gas comprising a silicon compound gas, an oxygen compound gas, a carbon compound gas, and a hydrogen compound gas, and causing discharge, thereby forming an amorphous thin film on said article, and said amorphous thin film has a composition defined by the following formula: Si.sub.x (O.sub.m,C.sub.n,H.sub.1-m-n).sub.1-x wherein, x=0.03=0.20, m=0.05-0.5, n=0.1-0.9, and 0.6≦m+n≦0.95.

Claim 9

A process according to claim 5, wherein said film forming gas comprises SiCl 4 H 2 O, CH 4 , H 2 , and Ar in relative amounts of 1, 5-50, 5-50, 50-500, and 30-300, respectively, in terms of flow rates thereof.