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US5216259A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus and method for improved determination of the spatial location of object surface points

Assignee: Rudolph Technologies Inc
•
Filing: 1991-05-10
•
Granted: 1993-06-01
•
Expires: 2011-05-10
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Abstract

Abstract Apparatus and method for use in determining the location of object surface points wherein a short pulse of optical energy is projected at the object surface and a time dependent gain function is used to modify the reflected optical energy resulting from the pulse so that time delay information indicative range can be developed and processed.

Inventors

  • 👤 Howard K. Stern
  • 👤 Stanley Elstein

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-22 16:38
CPC Classifications
G; G01; G01S; G01S17/00; G01S17/88; G01S17/89; G01S17/02; G01S17/06; G01S17/08; G01S17/10; G01S17/18; G01S7/00; G01S7/48; G01S7/483; G01S7/486; G01S7/4865; G01S7/487

Claims Analysis

Total Claims: 59
Claim 1
Independent Claim 143 words
Apparatus for use in determining the spatial location of the points on an object surface in response to projection of a first short pulse of optical energy at said object surface, said apparatus comprising: means for receiving first optical energy reflected by said object surface as a result of said projected first short pulse of optical energy; means for modifying said received first optical energy by a first time dependent gain function, said first time dependent gain function undergoing a change during the time of occurrence said first time dependent gain function; and means for processing said modified received first optical energy to determine a measure of the gain modification made to individual parts of said modified received first optical energy for use in determining the location of the surface points corresponding to said individual parts of said modified received first optical energy.
Claim 2
Dependent Claim 143 words
Apparatus for use in determining the spatial location of the points on an object surface in response to projection of a first short pulse of optical energy at said object surface, said apparatus comprising: means for receiving first optical energy reflected by said object surface as a result of said projected first short pulse of optical energy; means for modifying said received first optical energy by a first time dependent gain function, said first time dependent gain function undergoing a change during the time of occurrence said first time dependent gain function; and means for processing said modified received first optical energy to determine a measure of the gain modification made to individual parts of said modified received first optical energy for use in determining the location of the surface points corresponding to said individual parts of said modified received first optical energy.
Claim 3
Dependent Claim 28 words
Apparatus in accordance with claim 1 wherein: said processing means includes means for converting said individual parts of said modified received first optical energy into corresponding electrical signals.
Claim 4
Dependent Claim 81 words
Apparatus in accordance with claim 2 wherein: said processing means further includes: means for analyzing each of said electrical signals to determine a measure of the gain factor modification made to its respective individual part of said modified received first optical energy, said gain factor modification being a measure of the time delay of receipt by said receiving means of said individual part of said modified received first optical energy and of the range dimension of the associated object surface point.
Claim 5
Dependent Claim 14 words
Apparatus in accordance with claim 3 wherein: said converting means includes a detector array.
Claim 6
Dependent Claim 22 words
Apparatus in accordance with claim 4 wherein: said detector array includes one of a charge-coupled device array and a charge-injection device array.
Claim 7
Dependent Claim 64 words
Apparatus in accordance with claim 3 wherein: said means for modifying includes: one of an optical amplifier and a transducer for amplifying said received reflected first optical energy in accordance with said first time dependent gain function; and function generator means for generating said first first time dependent gain function and providing said time dependent function to one of said optical amplifier and transducer.
Claim 8
Dependent Claim 25 words
Apparatus in accordance with claim 6 wherein: said means for modifying includes said optical amplifier and said optical amplifier comprises a microchannel plate image intensifier.
Claim 9
Dependent Claim 26 words
Apparatus in accordance with claim 6 wherein: said means for modifying includes said optical transducer and said optical transducer includes a photocathode optical to electron transducer.
Claim 10
Dependent Claim 24 words
Apparatus in accordance with claim 8 wherein: said optical transducer further includes a microchannel plate electron amplifier following such photocathode optical to electron transducer.
Claim 11
Dependent Claim 62 words
Apparatus in accordance with claim 3 wherein: said means for modifying includes: an optical amplifier having a substantially constant gain for amplifying said received first optical energy; and variable optical attenuator means for attenuating said received first optical energy; said optical amplifier and variable optical attenuator together acting to apply said first time dependent gain function to said received first optical energy.
Claim 12
Dependent Claim 196 words
Apparatus in accordance with claim 1 wherein: said receiving means includes a first receiving channel for receiving said first optical energy and a plurality of further receiving channels each for receiving further optical energy reflected by said object surface as a result of said first short pulse of optical energy; and said modifying means modifies the received further optical energy in a number of said plurality of further receiving channels by different time dependent gain functions, said first receiving channel and number of said plurality of further receiving channels defining a first set of channels; and said processing means: further processes the modified received further optical energy in each of said number of said plurality of further receiving channels of said first set of channels to determine a measure of the gain modification made to each of the individual parts of said modified received further optical energy of that further receiving channel; and uses the determined gain modifications for corresponding individual parts of the modified received first and further optical energy of said first set of said channels to determine the spatial location of the point on the object surface associated with said corresponding individual parts.
Claim 13
Dependent Claim 43 words
Apparatus in accordance with claim 11 wherein: a second time dependent gain function is used by said modifying means for the received further optical energy in one of said number of said plurality of further receiving channels of said first set of channels.
Claim 14
Dependent Claim 18 words
Apparatus in accordance with claim 13 wherein: said first and second time dependent gain functions are inverse functions.
Claim 15
Dependent Claim 19 words
Apparatus in accordance with claim 13 wherein: said first and second time dependent gain functions are each linear functions.
Claim 16
Dependent Claim 13 words
Apparatus in accordance with claim 14 wherein: said linear functions are ramp functions.
Claim 17
Dependent Claim 23 words
Apparatus in accordance with claim 12 wherein: said second time dependent gain function is substantially constant in gain over a given time period.
Claim 18
Dependent Claim 21 words
Apparatus accordance with claim 16 wherein: said first time dependent gain function is a ramp function over said given time period.
Claim 19
Dependent Claim 45 words
Apparatus in accordance with claim 11 further comprising: gating means for gating said receiving means so that said receiving means is able to receive optical energy in a second set of said receiving channels in accordance with a plurality of different time dependent gating functions.
Claim 20
Dependent Claim 32 words
Apparatus in accordance with claim 18 wherein: said processing means further uses said gated received optical energy in said second set of channels to determine the location of said object surface points.
Claim 21
Dependent Claim 25 words
Apparatus in accordance with claim 19 wherein: said first set of channels and said second set of channels have one or more channels in common.
Claim 22
Dependent Claim 29 words
Apparatus in accordance with claim 20 wherein: the time dependent gating function and the time dependent gain function used in a common channel are combined into a common function.
Claim 23
Dependent Claim 202 words
Apparatus in accordance with claim 1 wherein: said apparatus is further responsive to projection of a plurality of further short pulses of optical energy at said object surface; said receiving means receives a succession of further optical energies reflected by said object surface as a result of said succession of projected further short pulses of optical energy; said modifying means modifies a number of said succession of received further optical energies by different time dependent gain functions, said received first optical energy and said number of said succession of received further optical energies defining a first set of received optical energies: and said processing means; further processes each of said number of said succession of received further optical energies of said first set of received optical energies to determine a measure of the gain modification made to each of the individual parts of each of said received further optical energies of said first set of received optical energies; and uses the determined gain modifications for corresponding individual parts of said received first and further optical energies of said first set of received optical energies in determining the spatial location of the point on the object surface associated with said corresponding individual parts.
Claim 24
Dependent Claim 40 words
Apparatus in accordance with claim 22 wherein: a second time dependent gain function is used by said modifying means for one of said number of said succession of received further optical energies in said first set of received optical energies.
Claim 25
Dependent Claim 18 words
Apparatus in accordance with claim 23 wherein: said first and second time dependent gain functions are inverse functions.
Claim 26
Dependent Claim 19 words
Apparatus in accordance with claim 24 wherein: said first and second time dependent gain functions are each linear functions.
Claim 27
Dependent Claim 13 words
Apparatus in accordance with claim 25 wherein: said linear functions are ramp functions.
Claim 28
Dependent Claim 23 words
Apparatus in accordance with claim 22 wherein: said second time dependent gain function is substantially constant in gain over a given time period.
Claim 29
Dependent Claim 22 words
Apparatus in accordance with claim 27 wherein: said first time dependent gain function is a ramp function over said given time period.
Claim 30
Dependent Claim 45 words
Apparatus in accordance with claim 22 further comprising: gating means for gating said receiving means so that said receiving means is able to receive optical energies in a second set of received optical energies in accordance with a plurality of different time dependent gating functions.
Claim 31
Dependent Claim 35 words
Apparatus in accordance with claim 29 wherein: said processing means further uses said gated received optical energies in said second set of said received optical energies in determining the location of said object surface points.
Claim 32
Dependent Claim 27 words
Apparatus in accordance with claim 30 wherein: said first and second sets of received optical energies have one or more of said received optical energies in common.
Claim 33
Dependent Claim 31 words
Apparatus in accordance with claim 31 wherein: the time dependent gain function and the time dependent gating function applied to a common received optical energy are combined into a common function.
Claim 34
Dependent Claim 72 words
Apparatus in accordance with claim 1 wherein: said means for modifying said received first optical energy modifies said received first optical energy by a time dependent gating function; and said means for processing determines for each individual part of the modified received first optical energy whether it is present or absent during said gating function and uses this information in determining the location of the surface point corresponding to the individual part.
Claim 35
Dependent Claim 20 words
Apparatus in accordance with claim 33 wherein: said time dependent gain and gating functions are combined into a composite function.
Claim 36
Independent Claim 139 words
A method for use in determining the spatial location of the points on an object surface in response to projection of a first short pulse of optical energy at said object surface, said method comprising; receiving fist optical energy reflected by said object surface as a result of said projected first short pulse of optical energy; modifying said received first optical energy by a first time dependent gain function, said first time dependent gain function undergoing a change during the time of occurrence of said first time dependent gain function; and processing said modified received first optical energy to determine a measure of the gain modification made to individual parts of said modified received first optical energy for use in determining the location of the surface points corresponding to said individual parts of said modified received first optical energy.
Claim 37
Independent Claim 139 words
A method for use in determining the spatial location of the points on an object surface in response to projection of a first short pulse of optical energy at said object surface, said method comprising; receiving fist optical energy reflected by said object surface as a result of said projected first short pulse of optical energy; modifying said received first optical energy by a first time dependent gain function, said first time dependent gain function undergoing a change during the time of occurrence of said first time dependent gain function; and processing said modified received first optical energy to determine a measure of the gain modification made to individual parts of said modified received first optical energy for use in determining the location of the surface points corresponding to said individual parts of said modified received first optical energy.
Claim 38
Dependent Claim 26 words
A method in accordance with claim 35 wherein: said processing includes converting said individual parts of said modified received first optical energy into corresponding electrical signals.
Claim 39
Dependent Claim 75 words
A method in accordance with claim 36 wherein: said processing further includes: analyzing each of said electrical signals to determine a measure of the gain factor modification made to its respective individual part of said modified received first optical energy, said gain factor modification being a measure of the time delay of receipt of said individual part of said modified received first optical energy and of the range dimension of the associated object surface point.
Claim 40
Dependent Claim 195 words
A method in accordance with claim 35 wherein: said step of receiving includes receiving in a first receiving channel said first optical energy and in a plurality of further receiving channels further optical energy reflected by said object surface as a result of said first pulse of optical energy; and said step of modifying includes modifying the received further optical energy in a number of said plurality of further receiving channels by different time dependent gain functions, said first receiving channel and number of said plurality of further receiving channels defining a first set of channels; and said processing step includes: further processing the modified received further optical energy in each of said number of said plurality of further receiving channels of said first set to determine a measure of the gain modification made to each of the individual parts of said modified received optical energy of that further receiving channel; and using the determined gain modifications for corresponding individual parts of the modified received first and further optical energy of said first set of said channels to determine the spatial location of the point on the object surface associated with said corresponding individual parts.
Claim 41
Dependent Claim 41 words
A method in accordance with claim 38 wherein: a second time dependent gain function is used to modify the received further optical energy in one of said number of said plurality of further receiving channels of said first set of channels.
Claim 42
Dependent Claim 19 words
A method in accordance with claim 39 wherein: said first and second time dependent gain functions are inverse functions.
Claim 43
Dependent Claim 20 words
A method in accordance with claim 40 wherein: said first and second time dependent gain functions are each linear functions.
Claim 44
Dependent Claim 14 words
A method in accordance with claim 41 wherein: said linear functions are ramp functions.
Claim 45
Dependent Claim 40 words
A method in accordance with claim 39 wherein: said second time dependent gain function is substantially constant in gain over a given time period; and said first time dependent gain function is a ramp function over said given time period.
Claim 46
Dependent Claim 32 words
A method in accordance with claim 38 further comprising: gating optical energy received in a second set of said receiving channels in accordance with a plurality of different time dependent gating functions.
Claim 47
Dependent Claim 33 words
A method in accordance with claim 44 wherein: said processing further includes using said gated received optical energy in said second set of channels to determine the location of said object surface points.
Claim 48
Dependent Claim 49 words
A method in accordance with claim 45 wherein: said first set of channels and said second set of channels have one or more channels in common; and the time dependent gating function and the time dependent gain function used in a common channel are combined into a common function.
Claim 49
Dependent Claim 185 words
A method in accordance with claim 35 wherein: said receiving step includes receiving a succession of further optical energies reflected by said object surface as a result of a succession of projected further short pulses of optical energy; said modifying step includes modifying a number of said succession of received further optical energies by different time dependant gain functions, said received first optical energy and said number of said succession of received further optical energies defining a first set of received optical energies; and said processing step includes: further processing each of said number of said succession of received further optical energies of said first set of received optical energies to determine a measure of the gain modification made to each of the individual parts of each of said received further optical energies of said first set of received optical energies; and using the determined gain modifications for corresponding individual parts of said received first and further optical energies of said first set of received optical energies in determining the spatial location of the point on the object surface associated with said corresponding individual parts.
Claim 50
Dependent Claim 37 words
A method in accordance with claim 47 wherein: a second time dependent gain function is used to modify one of said number of said succession of received optical energies in said first set of received optical energies.
Claim 51
Dependent Claim 19 words
A method in accordance with claim 48 wherein: said first and second time dependent gain functions are inverse functions.
Claim 52
Dependent Claim 20 words
A method in accordance with claim 49 wherein: said first and second time dependent gain functions are each linear functions.
Claim 53
Dependent Claim 14 words
A method in accordance with claim 50 wherein: said linear functions are ramp functions.
Claim 54
Dependent Claim 40 words
A method in accordance with claim 48 wherein: said second time dependent gain function is substantially constant in gain over a given time period; and said first time dependent gain function is a ramp function over said given time period.
Claim 55
Dependent Claim 32 words
A method in accordance with claim 47 further comprising: gating received optical energies in a second set of received optical energies in accordance with a plurality of different time dependent gating functions.
Claim 56
Dependent Claim 35 words
A method in accordance with claim 53 wherein: said processing further uses said gated received optical energies in said second set of said received optical energies in determining the location of said object surface points.
Claim 57
Dependent Claim 56 words
A method in accordance with claim 54 wherein: said first and second sets of said succession of received optical energies have one or more of said received optical energies in common; and the time dependent gain function and the time dependent gating function applied to a common received optical energy are combined into a common function.
Claim 58
Dependent Claim 67 words
A method in accordance with claim 35 wherein: said modifying step includes modifying said received first optical energy by a time dependant gating function; and said processing includes: determining for each individual part of the modified received first optical energy whether it is present or absent during said gating function; and using this information in determining the location of the surface point corresponding to the individual part.
Claim 59
Dependent Claim 21 words
A method in accordance with claim 56 wherein: said time dependent gain and gating functions are combined into a composite function.

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-05-31 1996-11-30 1997-06-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-05-31 2000-11-30 2001-06-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-05-31 2004-11-30 2005-06-01 $7700.00 Window Closed / Lapsed

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