US5212147A
Expired / Lapsed
US
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Method of forming a patterned in-situ high Tc superconductive film
Assignee: Agilent Technologies Inc
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Filing: 1991-05-15
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Granted: 1993-05-18
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Expires: 2011-05-15
Abstract
Abstract A method of forming a patterned in-situ photoconductive film on a substrate including providing a patterned photoresist layer on upper and lower metallic layers formed on a substrate. The patterned photoresist layer is used to form an opening in the upper layer. The pattern in the upper layer thereby has an opening having a geometry substantially similar to a desired pattern of photoconductive material to be formed on the substrate. A portion of the lower layer is removed to form cantilevered regions of the upper layer adjacent to the opening. Superconductive material is then deposited on the substrate by directing the material through the opening at an angle generally perpendicular to the substrate. The superconductive film on the substrate within the lower layer is coated with a polymer. The upper and lower layers and all superconductive material on those layers are removed to leave the polymer-encapsulated superconductive material on the substrate. The polymer is removed by plasma etching that does not adversely affect the superconductive material. Thus, the superconductive material on the substrate is subjected only to post-deposition process steps of depositing the polymer and removing the polymer.
Inventors
- 👤 James R. Sheats
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:47
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/4572; C04B41/459; C04B41/4592; C04B41/4594; C04B41/52; C04B41/80; C04B41/81; C04B41/89; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/728; Y10S505/73; Y10S505/732
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
171 words
A method of forming an in-situ superconductive film on a surface comprising, forming a sacrificial masking structure on said surface to include a lower portion adjacent to said surface and an upper portion spaced apart from said surface by said lower portion, said forming including removing masking material from said lower portion to provide a first gap in said lower portion and including removing masking material from said upper portion to provide a second gap in said upper portion such that the area of said first gap as measured parallel to said surface is greater than the area of said second gap, depositing high T c superconductive material through said second gap such that a superconductive layer within said first gap has an area less than the area of said first gap, covering said superconductive layer within said first gap with a sacrificial polymer to seal said superconductive material from the ambient atmosphere, removing said sacrificial masking structure from said surface, and removing said sacrificial polymer to expose said superconductive layer.
Claim 2
Independent Claim
171 words
A method of forming an in-situ superconductive film on a surface comprising, forming a sacrificial masking structure on said surface to include a lower portion adjacent to said surface and an upper portion spaced apart from said surface by said lower portion, said forming including removing masking material from said lower portion to provide a first gap in said lower portion and including removing masking material from said upper portion to provide a second gap in said upper portion such that the area of said first gap as measured parallel to said surface is greater than the area of said second gap, depositing high T c superconductive material through said second gap such that a superconductive layer within said first gap has an area less than the area of said first gap, covering said superconductive layer within said first gap with a sacrificial polymer to seal said superconductive material from the ambient atmosphere, removing said sacrificial masking structure from said surface, and removing said sacrificial polymer to expose said superconductive layer.
Claim 3
Dependent Claim
64 words
The method of claim 1 wherein said step of forming said sacrificial masking layer includes depositing a first metallic layer on said surface and depositing a second metallic layer on said first layer, said step further including removing material from said first and second layers to form said first and second gaps, with a greater amount of material being removed from said first layer.
Claim 4
Dependent Claim
45 words
The method of claim 2 wherein said removing of material from said first and second layers includes etching through said second layer to create a via includes etching into said first layer to create a cantilevered area of said second layer adjacent to said via.
Claim 5
Dependent Claim
48 words
The method of claim 1 wherein said step of depositing high T c superconductive material is a step of directing said superconductive material through said second gap perpendicular to said surface, thereby forming a superconductive layer having an area substantially equal to the area of said second gap.
Claim 6
Dependent Claim
28 words
The method of claim 1 wherein said step of depositing high T c superconductive material is a step of utilizing an evaporation process in a high vacuum environment.
Claim 7
Independent Claim
148 words
A method of forming patterned in-situ superconductive film on a substrate comprising, geometrically shaping a sacrificial masking structure on a substrate surface to include lower and upper sacrificial layers, including forming said lower sacrificial layer such that first internal walls define a first gap and including forming said upper sacrificial layer such that second internal walls define a second gap and such that said first internal walls are spaced apart by a horizontal distance greater than said second internal walls, directing high T c superconductive material through said second gap at an angle generally perpendicular to said substrate surface so that a superconductive layer is formed within said first gap in a pattern dictated by dimensions of said second gap, depositing sacrificial polymeric material on said superconductive layer in said first gap to enclose said superconductive layer, removing said sacrificial masking structure, and removing said sacrificial polymeric material.
Claim 8
Independent Claim
148 words
A method of forming patterned in-situ superconductive film on a substrate comprising, geometrically shaping a sacrificial masking structure on a substrate surface to include lower and upper sacrificial layers, including forming said lower sacrificial layer such that first internal walls define a first gap and including forming said upper sacrificial layer such that second internal walls define a second gap and such that said first internal walls are spaced apart by a horizontal distance greater than said second internal walls, directing high T c superconductive material through said second gap at an angle generally perpendicular to said substrate surface so that a superconductive layer is formed within said first gap in a pattern dictated by dimensions of said second gap, depositing sacrificial polymeric material on said superconductive layer in said first gap to enclose said superconductive layer, removing said sacrificial masking structure, and removing said sacrificial polymeric material.
Claim 9
Dependent Claim
30 words
The method of claim 6 wherein said step of geometrically shaping said sacrificial masking structure includes forming cantilevered sections of said upper sacrificial layer adjacent to said first internal walls.
Claim 10
Dependent Claim
28 words
The method of claim 6 wherein said forming a lower sacrificial layer includes choosing a material from the group consisting of Nb, Ta, W, Mo, Ag and Si.
Claim 11
Dependent Claim
26 words
The method of claim 8 wherein said forming an upper sacrificial layer includes choosing a material from the group consisting of silver, gold, copper and nickel.
Claim 12
Dependent Claim
20 words
The method of claim 8 wherein said step of directing high T c superconductive material is a directing of YBaCuO.
Claim 13
Dependent Claim
24 words
The method of claim 8 wherein said step of geometrically shaping said sacrificial masking structure includes an isotropical etching of said lower sacrificial layer.
Claim 14
Independent Claim
167 words
A method of forming a patterned superconductive film on a substrate comprising, depositing a first sacrificial metallic layer of material on said substrate, depositing a second sacrificial metallic layer of material on said first layer, depositing a photoresist layer on said second layer, using said photoresist layer to form an opening in said second sacrificial metallic layer having an opening geometry substantially similar to a desired pattern of superconductive material to be formed on said substrate, removing a portion of said material from said first sacrificial metallic layer to form cantilevered regions of said second sacrificial metallic layer adjacent to said opening, depositing a high T c superconductive material on said substrate by directing said superconductive material through said opening at an angle generally perpendicular to said substrate, coating said superconductive material on said substrate with a sacrificial polymer, removing said first sacrificial metallic layer and all material deposited thereon to leave said sacrificial polymer and said superconductive material on said substrate, and removing said sacrificial polymer.
Claim 15
Independent Claim
167 words
A method of forming a patterned superconductive film on a substrate comprising, depositing a first sacrificial metallic layer of material on said substrate, depositing a second sacrificial metallic layer of material on said first layer, depositing a photoresist layer on said second layer, using said photoresist layer to form an opening in said second sacrificial metallic layer having an opening geometry substantially similar to a desired pattern of superconductive material to be formed on said substrate, removing a portion of said material from said first sacrificial metallic layer to form cantilevered regions of said second sacrificial metallic layer adjacent to said opening, depositing a high T c superconductive material on said substrate by directing said superconductive material through said opening at an angle generally perpendicular to said substrate, coating said superconductive material on said substrate with a sacrificial polymer, removing said first sacrificial metallic layer and all material deposited thereon to leave said sacrificial polymer and said superconductive material on said substrate, and removing said sacrificial polymer.
Claim 16
Dependent Claim
26 words
The method of claim 12 wherein said step of removing a portion of said material from said first sacrificial metallic layer is an isotropic etching step.
Claim 17
Dependent Claim
24 words
The method of claim 12 wherein said step of depositing said high T c superconductive material is a step of utilizing an evaporation process.
Claim 18
Dependent Claim
35 words
The method of claim 12 further comprising etching said sacrificial polymer to a level below an upper extent of said first sacrificial metallic layer prior to said step of removing said first sacrificial metallic layer.
Claim 19
Dependent Claim
22 words
The method of claim 12 wherein said steps of depositing said first and second sacrificial metallic layers are steps of depositing metal.
References Cited (Backward Citations)
US3975252A
Cited
US4650543A
Cited
US4742026A
Cited
US4764245A
Cited
US4937225A
Cited
US4942142A
Cited
US4952557A
Cited
US4952556A
Cited
US4933318A
Cited
US4882312A
Cited
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