US5196353A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for controlling a semiconductor (CMP) process by measuring a surface temperature and developing a thermal image of the wafer
Assignee: Micron Technology Inc
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Filing: 1992-01-03
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Granted: 1993-03-23
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Expires: 2012-01-03
Abstract
Abstract A method and apparatus for controlling a chemical mechanical planarization (CMP) process in semiconductor manufacture includes an infrared camera for detecting and mapping a temperature of the wafer for developing a thermal image of the wafer. The thermal image can then be analyzed and used to control the operational parameters of the (CMP) process such as time, temperature, and downward pressure, in order to enhance the uniformity of polishing across the wafer. In addition, it can be used to end-point the (CMP) process by detecting sudden changes in the wafer surface temperature as one layer is completely polished away exposing an underlying layer of a different material.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Trung T. Doan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:17
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; H10P72/06; H10P72/0602; H10P74/00; H10P74/23; H10P74/238; H10P95/00; H10P95/06; H10P95/062
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
51 words
A method for controlling a chemical mechanical planarization (CMP) process for a semiconductor wafer comprising: detecting and mapping temperatures of the wafer during the (CMP) process to develop an infrared image of the wafer in real time; controlling process parameters of the (CMP) process using the infrared image of the wafer.
Claim 2
Independent Claim
51 words
A method for controlling a chemical mechanical planarization (CMP) process for a semiconductor wafer comprising: detecting and mapping temperatures of the wafer during the (CMP) process to develop an infrared image of the wafer in real time; controlling process parameters of the (CMP) process using the infrared image of the wafer.
Claim 3
Dependent Claim
20 words
The method as recited in claim 1 and wherein: the temperature of the wafer is detected with an infrared camera.
Claim 4
Dependent Claim
35 words
The method as claimed in claim 2 and wherein: endpoints are detected when a temperature rise of the wafer occurs and a first material on the wafer is removed and a different material is contacted.
Claim 5
Independent Claim
99 words
A method of controlling operational parameters of a chemical mechanical planarization (CMP) process for a semiconductor wafer and for detecting endpoints of different layers on the wafer in order to control a uniformity of the (CMP) process, comprising: rotating the wafer against a polishing platen; detecting a temperature of the wafer during the (CMP) process using an infrared camera and developing an infrared image of the wafer in real time such that an endpoint of materials on the wafer is determined by a temperature rise; and controlling the operational parameters of the (CMP) process by analyzing the infrared image.
Claim 6
Independent Claim
99 words
A method of controlling operational parameters of a chemical mechanical planarization (CMP) process for a semiconductor wafer and for detecting endpoints of different layers on the wafer in order to control a uniformity of the (CMP) process, comprising: rotating the wafer against a polishing platen; detecting a temperature of the wafer during the (CMP) process using an infrared camera and developing an infrared image of the wafer in real time such that an endpoint of materials on the wafer is determined by a temperature rise; and controlling the operational parameters of the (CMP) process by analyzing the infrared image.
Claim 7
Dependent Claim
26 words
The method as recited in claim 4 and wherein: the infrared camera is mounted to the polishing platen to scan a front side of the wafer.
Claim 8
Dependent Claim
37 words
The method as recited in claim 5 and wherein: the infrared camera is mounted from a center of the polishing platen to an outer periphery thereof to continuously scan the wafer during rotation of the polishing platen.
Claim 9
Dependent Claim
23 words
The method as recited in claim 5 and wherein: the infrared camera is mounted to the polishing platen to periodically scan the wafer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-03-22 | 1996-09-21 | 1997-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-03-22 | 2000-09-21 | 2001-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-03-22 | 2004-09-21 | 2005-03-23 | $7700.00 | Window Closed / Lapsed |