US5128494A
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Hydridosiloxanes as precursors to ceramic products
Assignee: SRI International Inc
•
Filing: 1989-04-21
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Granted: 1992-07-07
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Expires: 2009-04-21
Abstract
Abstract A method is provided for preparing preceramic polymers and silicious ceramic materials which derive therefrom. The preceramic polymers are polysiloxanes which are synthesized by catalytically activating Si-H bonds in a hydridosiloxane starting material and replacing the activated hydrogen atoms with non-hydrogen substituents. These preceramic polysiloxanes are pyrolyzed in a selected atmosphere to give the desired ceramic product. Ceramic products which may be prepared by this technique include silica, silicon oxynitride, silicon carbide, and metal silicates.
Inventors
- 👤 Yigal Blum
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:59
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B35/00; C04B35/01; C04B35/16; C04B35/18; C04B35/185; C04B35/515; C04B35/56; C04B35/565; C04B35/571; C04B35/58; C04B35/584; C04B35/589; C04B35/597; C04B35/622; C04B35/62227; C04B35/626; C04B35/63; C04B35/6303; C04B35/6316; C04B41/45; C04B41/4505; C04B41/455; C04B41/4554; C04B41/80; C04B41/81; C07; C07F; C07F7/00; C07F7/02; C07F7/08; C07F7/10; C07F7/21; C08; C08G; C08G77/00; C08G77/04; C08G77/38; C08G77/382; C08G77/398; C08G77/48; C08G77/54; C08G77/60; C08G77/62; C08G79/00
Claims Analysis
Total Claims: 64
Claim 1
Independent Claim
101 words
A method of preparing a ceramic precursor which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a hydroxyl-containing compound of the formula R'--OH, wherein R' is hydrogen, C 1 -C 10 alkyl, or aryl of 1-2 rings, and may be substituted with hydroxyl, lower alkyl, lower alkoxy, halogen, silyl, amino groups, or combinations thereof, in an inert atmosphere in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by OR' moieties.
Claim 2
Independent Claim
101 words
A method of preparing a ceramic precursor which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a hydroxyl-containing compound of the formula R'--OH, wherein R' is hydrogen, C 1 -C 10 alkyl, or aryl of 1-2 rings, and may be substituted with hydroxyl, lower alkyl, lower alkoxy, halogen, silyl, amino groups, or combinations thereof, in an inert atmosphere in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by OR' moieties.
Claim 3
Dependent Claim
9 words
The method of claim 1, wherein R' is hydrogen.
Claim 4
Dependent Claim
13 words
The method of claim 1, wherein R' is C 1 -C 10 alkyl.
Claim 5
Dependent Claim
12 words
The method of claim 1, wherein R' is aryl of 1-2 rings
Claim 6
Dependent Claim
160 words
The method of claim 1, wherein said hydridosiloxane polymer contains recurring mer units having the formula ##STR23## wherein x is 1 or 2, and R is selected from the group consisting of (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium, potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC.tbd.Cα, where α is lower alkyl or phenyl.
Claim 7
Dependent Claim
13 words
The method of claim 1, wherein R is C 1 -C 10 alkyl.
Claim 8
Dependent Claim
13 words
The method of claim 1, wherein R is C 1 -C 10 alkoxy.
Claim 9
Dependent Claim
12 words
The method of claim 1, wherein R is aryl of 1-2 rings.
Claim 10
Dependent Claim
23 words
The method of claim 1, wherein said hydridosiloxane polymer is prepared by polymerization of a monomeric halogenated silane in the presence of water.
Claim 11
Dependent Claim
15 words
The method of claim 1, wherein said hydridosiloxane polymer is treated with a crosslinking agent.
Claim 12
Independent Claim
123 words
A method of preparing a silicious ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a hydroxyl-containing compound of the formula R'--OH, wherein R' is hydrogen, C 1 -C 10 alkyl, or aryl of 1-2 rings, and may be substituted with hydroxyl, lower alkyl, lower alkoxy, halogen, silyl, or amino groups, or combinations thereof, in an inert atmosphere in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by OR' moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 13
Independent Claim
123 words
A method of preparing a silicious ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a hydroxyl-containing compound of the formula R'--OH, wherein R' is hydrogen, C 1 -C 10 alkyl, or aryl of 1-2 rings, and may be substituted with hydroxyl, lower alkyl, lower alkoxy, halogen, silyl, or amino groups, or combinations thereof, in an inert atmosphere in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by OR' moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 14
Dependent Claim
14 words
The method of claim 11, wherein said pyrolyzing is conducted in an inert atmosphere.
Claim 15
Dependent Claim
12 words
The method of claim 11, wherein said pyrolyzing is conducted in oxygen.
Claim 16
Dependent Claim
15 words
The method of claim 11, wherein said pyrolyzing is conducted in a reactive amine atmosphere.
Claim 17
Dependent Claim
24 words
The method of claim 11, wherein said pyrolyzing is conducted at a temperature in the range of about 500° C. to about 900° C.
Claim 18
Dependent Claim
18 words
The method of claim 11, further comprising, after step (b), treating said hydridosiloxane polymer with a crosslinking agent.
Claim 19
Dependent Claim
26 words
The method of claim 11, further comprising, after step (b), treating said hydridosiloxane polymer with water in the presence of a Lewis acid or base catalyst.
Claim 20
Independent Claim
91 words
A method of preparing a silicious ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si--H bonds per mer unit; (b) introducing carbon-containing moieties into said polymer by reaction with a compound containing an unsaturated carbon-carbon bond, in the presence of a catalyst effective to activate Si--H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by carbon-containing moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 21
Independent Claim
91 words
A method of preparing a silicious ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si--H bonds per mer unit; (b) introducing carbon-containing moieties into said polymer by reaction with a compound containing an unsaturated carbon-carbon bond, in the presence of a catalyst effective to activate Si--H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced by carbon-containing moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 22
Dependent Claim
112 words
The method of claim 18, wherein said compound containing an unsaturated carbon-carbon bond is CH2=CH-R, in which R is selected from the group consisting of: (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR" 2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1∝2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom and L is a ligand associated therewith.
Claim 23
Dependent Claim
13 words
The method of claim 19, wherein R is C 1- C 10 alkyl.
Claim 24
Dependent Claim
13 words
The method of claim 19, wherein R is C 1 -C 10 alkoxy.
Claim 25
Dependent Claim
12 words
The method of claim 19, wherein R is aryl of 1-2 rings
Claim 26
Dependent Claim
14 words
The method of claim 18, wherein said pyrolyzing is conducted in an inert atmosphere.
Claim 27
Dependent Claim
12 words
The method of claim 18, wherein said pyrolyzing is conducted in oxygen.
Claim 28
Dependent Claim
15 words
The method of claim 18, wherein said pyrolyzing is conducted in a reactive amine atmosphere.
Claim 29
Dependent Claim
15 words
The method of claim 18, further comprising treating said hydridosiloxane polymer with a crosslinking agent.
Claim 30
Dependent Claim
23 words
The method of claim 18, further comprising treating said hydridosiloxane polymer with water in the presence of a Lewis acid or base catalyst.
Claim 31
Dependent Claim
24 words
The method of claim 18, wherein said pyrolyzing is conducted at a temperature in the range of about 500° C. to about 900° C.
Claim 32
Independent Claim
104 words
A method of preparing a silicious, nitrogen-containing ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) introducing nitrogen-containing moieties into said polymer by reaction with a compound HNR"2 wherein the R" are independently selected from hydrogen, lower alkyl, silyl, and aryl of 1-2 rings, in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced with nitrogen-containing moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 33
Independent Claim
104 words
A method of preparing a silicious, nitrogen-containing ceramic material, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) introducing nitrogen-containing moieties into said polymer by reaction with a compound HNR"2 wherein the R" are independently selected from hydrogen, lower alkyl, silyl, and aryl of 1-2 rings, in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which hydrogen atoms in the hydridosiloxane polymer have been replaced with nitrogen-containing moieties; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 34
Dependent Claim
10 words
The method of claim 29, wherein all R" are hydrogen.
Claim 35
Dependent Claim
15 words
The method of claim 29, wherein one or two of the R" are lower alkyl.
Claim 36
Dependent Claim
14 words
The method of claim 29, wherein said pyrolyzing is conducted in an inert atmosphere.
Claim 37
Dependent Claim
12 words
The method of claim 29, wherein said pyrolyzing is conducted in oxygen.
Claim 38
Dependent Claim
15 words
The method of claim 29, wherein said pyrolyzing is conducted in a reactive amine atmosphere.
Claim 39
Dependent Claim
15 words
The method of claim 29, further comprising treating said hydridosiloxane polymer with a crosslinking agent.
Claim 40
Dependent Claim
24 words
The method of claim 29, further comprising treating said hydridosiloxane polymer with water in the presence of a catalyst effective to activate Si--H bonds.
Claim 41
Dependent Claim
24 words
The method of claim 29, wherein said pyrolyzing is conducted at a temperature in the range of about 500° C. to about 900° C.
Claim 42
Independent Claim
117 words
A method of making a silicious ceramic material containing the metal M, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a compound selected from the group consisting of ML a and M-OH, wherein M is a metal atom, L is an organic ligand associated therewith, and a represents the molar ratio L/M in said complex, in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which said activated Si-H bonds have been replaced by Si-M bonds; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 43
Independent Claim
117 words
A method of making a silicious ceramic material containing the metal M, which comprises: (a) providing a hydridosiloxane polymer containing one or more Si-H bonds per mer unit; (b) reacting said hydridosiloxane polymer with a compound selected from the group consisting of ML a and M-OH, wherein M is a metal atom, L is an organic ligand associated therewith, and a represents the molar ratio L/M in said complex, in the presence of a catalyst effective to activate Si-H bonds, to give a ceramic precursor in which said activated Si-H bonds have been replaced by Si-M bonds; and (c) pyrolyzing said ceramic precursor at a temperature of at least about 500° C. to give said ceramic material.
Claim 44
Dependent Claim
14 words
The method of claim 38, wherein said pyrolyzing is conducted in an inert atmosphere.
Claim 45
Dependent Claim
12 words
The method of claim 38, wherein said pyrolyzing is conducted in oxygen.
Claim 46
Dependent Claim
15 words
The method of claim 38, wherein said pyrolyzing is conducted in a reactive amine atmosphere.
Claim 47
Dependent Claim
15 words
The method of claim 38, further comprising treating said hydridosiloxane polymer with a crosslinking agent.
Claim 48
Dependent Claim
23 words
The method of claim 38, further comprising treating said hydridosiloxane polymer with water in the presence of a Lewis acid or base catalyst.
Claim 49
Dependent Claim
25 words
The method of claim 38, wherein said pyrolyzing is carried out at a temperature in the range of about 500° C. to about 900° C.
Claim 50
Dependent Claim
25 words
The method of claim 11, additionally comprising, after step (c): (d) further pyrolyzing said ceramic material at a temperature of at least about 1200° C.
Claim 51
Dependent Claim
25 words
The method of claim 18, additionally comprising, after step (c): (d) further pyrolyzing said ceramic material at a temperature of at least about 1200° C.
Claim 52
Dependent Claim
25 words
The method of claim 29, additionally comprising, after step (c): (d) further pyrolyzing said ceramic material at a temperature of at least about 1200° C.
Claim 53
Independent Claim
215 words
A method of preparing a ceramic precursor which comprises: (a) reacting, in the presence of a catalyst effective to activate Si--H bonds, a hydridosiloxane monomer H m Si(OR 1 )4-m with an alcohol R 2 OH, wherein R 1 and R 2 are selected from the group consisting of: (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium, potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC|Cα, where α is lower alkyl or phenyl, to give the substituted siloxane monomer Si(OR 1 ) 4-m (OR 2 ) m ; and (b) hydrolyzing the substituted siloxane monomer in the presence of a Lewis acid or base catalyst, to give a polysiloxane ceramic precursor.
Claim 54
Independent Claim
215 words
A method of preparing a ceramic precursor which comprises: (a) reacting, in the presence of a catalyst effective to activate Si--H bonds, a hydridosiloxane monomer H m Si(OR 1 )4-m with an alcohol R 2 OH, wherein R 1 and R 2 are selected from the group consisting of: (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium, potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC|Cα, where α is lower alkyl or phenyl, to give the substituted siloxane monomer Si(OR 1 ) 4-m (OR 2 ) m ; and (b) hydrolyzing the substituted siloxane monomer in the presence of a Lewis acid or base catalyst, to give a polysiloxane ceramic precursor.
Claim 55
Independent Claim
216 words
A method of preparing a ceramic precursor which comprises: (a) reacting, in the presence of a catalyst effective to activate Si-H bonds, a hydridosiloxane monomer H m Si(OR 1 ) 4-m with an alcohol R 2 OH, wherein R 1 and R 2 are selected from the group consisting of: (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium, potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC|Cα, where α is lower alkyl or phenyl, to give the substituted siloxane monomer Si(OR 1 ) 4-m (OR 2 ) m ; and (b) hydrolyzing the substituted siloxane monomer in the presence of a Lewis acid or base catalyst, to give a polysiloxane ceramic precursor.
Claim 56
Independent Claim
216 words
A method of preparing a ceramic precursor which comprises: (a) reacting, in the presence of a catalyst effective to activate Si-H bonds, a hydridosiloxane monomer H m Si(OR 1 ) 4-m with an alcohol R 2 OH, wherein R 1 and R 2 are selected from the group consisting of: (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium, potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC|Cα, where α is lower alkyl or phenyl, to give the substituted siloxane monomer Si(OR 1 ) 4-m (OR 2 ) m ; and (b) hydrolyzing the substituted siloxane monomer in the presence of a Lewis acid or base catalyst, to give a polysiloxane ceramic precursor.
Claim 57
Independent Claim
59 words
A method of preparing a ceramic precursor which comprises: (a) providing a hydridosiloxane starting material containing one or more Si-H bonds; and (b) reacting said hydridosiloxane starting material with a coupling agent H--Z--H, wherein Z contains one or more elements selected from the group consisting of oxygen, nitrogen, sulfur and phosphorus, to give a ceramic precursor containing --Z-- bridges.
Claim 58
Independent Claim
59 words
A method of preparing a ceramic precursor which comprises: (a) providing a hydridosiloxane starting material containing one or more Si-H bonds; and (b) reacting said hydridosiloxane starting material with a coupling agent H--Z--H, wherein Z contains one or more elements selected from the group consisting of oxygen, nitrogen, sulfur and phosphorus, to give a ceramic precursor containing --Z-- bridges.
Claim 59
Dependent Claim
12 words
The method of claim 50, wherein the hydridosiloxane starting material is monomeric.
Claim 60
Dependent Claim
16 words
The method of claim 50, wherein the hydridosiloxane starting material is a linear oligomer of polymer.
Claim 61
Dependent Claim
13 words
The method of claim 50, wherein the hydridosiloxane starting material is a cyclomer.
Claim 62
Dependent Claim
187 words
The method of claim 53, wherein the cyclomer has the formula ##STR24## wherein R is selected from the group consisting of (i) hydrogen; (ii) hydroxyl; (iii) C 1 -C 10 alkyl, which is either unsubstituted or substituted with hydroxyl, lower alkyl, lower alkoxy, halogens, silyl or NR"2 groups, wherein R" is hydrogen or lower alkyl; (iv) C 1 -C 10 alkoxy, optionally substituted as in (iii); (v) aryl of 1-2 rings, optionally substituted as in (iii); (vi) NR" 2 ; (vii) silyl; and (viii) ML a , OML a , and NR"ML a , wherein M is a metal atom selected from the group consisting of lithium, sodium potassium, magnesium, calcium, boron, aluminum, phosphorus, transition metals, lanthanides and actinides, and L is a ligand associated therewith which is selected from the group consisting of carbonyl, cyano, cyclopentadienyl, phenyl, halide, alkoxy and αC.tbd.Cα, where α is lower alkyl or phenyl, to give the substituted siloxane monomer Si(OR 1 ) 4-m (OR 2 ) m ; and (b) hydrolyzing the substituted siloxane monomer in the presence of a Lewis acid or base catalyst, to give a polysiloxane ceramic precursor.
Claim 63
Dependent Claim
11 words
The method of claim 50, wherein the coupling agent is water.
Claim 64
Dependent Claim
11 words
The method of claim 54, wherein the coupling agent is water.
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