US5124780A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Conductive contact plug and a method of forming a conductive contact plug in an integrated circuit using laser planarization
Assignee: Micron Technology Inc
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Filing: 1991-06-10
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Granted: 1992-06-23
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Expires: 2011-06-10
Abstract
Abstract The invention is a method of forming a conductive contact plug and an interconnect line independent of each other. The contact plug is formed using laser planarization and a blanket etch back. The invention is also the contact plug thus formed. The contact plug and interconnect line may be fabricated with conductive materials having substantially similar methods of deposition. The integrity of the contact plug is enhanced using laser planarization. The process begins with a wafer having a dielectric layer, the upper surface of which has been planarized. A masking step defines a contact hole. An etch creates the contact hole which passes through the dielectric layer to a conductive region where contact is to be made. A first layer of conductive material is then deposited overlying the dielectric layer. A layer of material having an anti-reflective coating (ARC) (or a layer of material having a higher boiling point than the first layer) is deposited overlying the first layer. The ARC enhances the fluidity of the first layer during a subsequent laser planarization. The first layer and ARC overlying the dielectric are then laser planarized. The laser planarization is followed by a blanket etch of the first layer and ARC. The etch forms a contact plug substantially coplanar with the surface of the dielectric layer. At this juncture a second layer of conductive material may be deposited and masked to form interconnect lines for joining contact plugs.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Chang Yu
- 👤 Trung T. Doan
- 👤 Mark E. Tuttle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:03
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10P; H10P95/00; H10P95/04; H10W20/01; H10W20/031; H10W20/056; H10W20/057; H10W20/062
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
54 words
A method for substantially filling a cavity comprising: a) depositing a material in at least the cavity; b) subsequent to said step of depositing said material in the cavity, subjecting said material to laser energy such that said material attains a liquid state; and c) discontinuing said subjection of said material to laser energy.
Claim 2
Independent Claim
54 words
A method for substantially filling a cavity comprising: a) depositing a material in at least the cavity; b) subsequent to said step of depositing said material in the cavity, subjecting said material to laser energy such that said material attains a liquid state; and c) discontinuing said subjection of said material to laser energy.
Claim 3
Dependent Claim
22 words
The method of claim 1, further comprising forming the cavity in a workpiece, the cavity capable of receiving and containing said material.
Claim 4
Dependent Claim
26 words
The method of claim 1, further comprising removing an excess of said material from said workpiece such that said material is substantially confined to the cavity.
Claim 5
Dependent Claim
13 words
The method of claim 3, wherein said removing is accomplished using mechanical energy.
Claim 6
Dependent Claim
13 words
The method of claim 3, wherein said removing is accomplished using chemical energy.
Claim 7
Dependent Claim
18 words
The method of claim 3, wherein said removing is accomplished using a combination of mechanical and chemical energy.
Claim 8
Dependent Claim
15 words
The method of claim 1, wherein said step of discontinuing results in said material solidifying.
Claim 9
Dependent Claim
22 words
The method of claim 1, further comprising using a protective barrier to prevent an interaction between said deposited material and said workpiece.
Claim 10
Independent Claim
72 words
A method for forming a contact plug comprising: a) depositing a material in a contact hole; b) subsequent to said step of depositing said material in said contact hole, subjecting said material to laser energy such that said material attains a liquid state; and c) discontinuing said subjection of said material to laser energy, said method forming said contact plug of said material in at least a portion of said contact hole.
Claim 11
Independent Claim
72 words
A method for forming a contact plug comprising: a) depositing a material in a contact hole; b) subsequent to said step of depositing said material in said contact hole, subjecting said material to laser energy such that said material attains a liquid state; and c) discontinuing said subjection of said material to laser energy, said method forming said contact plug of said material in at least a portion of said contact hole.
Claim 12
Dependent Claim
57 words
The method of claim 9, comprising forming a contact hole in a workpiece in order to expose a contact region, said contact hole having at least one sidewall contacting said contact region, said contact hole and said contact region capable of receiving and containing said material, said contact plug being in substantial contact with said contact region.
Claim 13
Dependent Claim
17 words
The method of claim 9, wherein said subjection of said material to laser energy liquifies said material.
Claim 14
Dependent Claim
20 words
The method of claim 9, wherein said discontinuation of said subjection of said material to laser energy solidifies said material.
Claim 15
Dependent Claim
27 words
The method of claim 9, further comprising removing an excess of said material from said workpiece such that said material is substantially confined to said contact hole.
Claim 16
Dependent Claim
15 words
The method of claim 13, wherein said removing is accomplished using a mechanical erosion technique.
Claim 17
Dependent Claim
15 words
The method of claim 13, wherein said removing is accomplished using a chemical erosion technique.
Claim 18
Dependent Claim
23 words
The method of claim 13, wherein said removing is accomplished using a combination of a mechanical erosion technique and a chemical erosion technique.
Claim 19
Dependent Claim
23 words
The method of claim 9, further comprising using a protective barrier layer to prevent an interaction between said deposited material and said workpiece.
Claim 20
Independent Claim
121 words
A method for forming a contact plug in a dielectric overlying a semiconductor conductive region, comprising: a) masking the dielectric layer; b) etching a contact hole in the dielectric layer in order to expose a portion of the conductive region, said contact hole having at least one sidewall, said sidewall contacting said conductive region, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining said material; c) depositing a conductive material in at least said contact hole; and d) subjecting said deposited conductive material to laser energy, said laser energy imparting thermal energy to said conductive material thereby causing said conductive region and said conductive material to come into substantial contact.
Claim 21
Independent Claim
121 words
A method for forming a contact plug in a dielectric overlying a semiconductor conductive region, comprising: a) masking the dielectric layer; b) etching a contact hole in the dielectric layer in order to expose a portion of the conductive region, said contact hole having at least one sidewall, said sidewall contacting said conductive region, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining said material; c) depositing a conductive material in at least said contact hole; and d) subjecting said deposited conductive material to laser energy, said laser energy imparting thermal energy to said conductive material thereby causing said conductive region and said conductive material to come into substantial contact.
Claim 22
Dependent Claim
29 words
The method of claim 18, further comprising discontinuing said subjecting of said deposited conductive material to laser energy, said discontinuing solidifying said conductive material to form the contact plug.
Claim 23
Dependent Claim
40 words
The method of claim 18, further comprising depositing a protective barrier layer on at least said sidewall prior to said depositing of said conductive material, said protective barrier layer preventing an interaction of said dielectric layer and said conductive material.
Claim 24
Dependent Claim
52 words
The method of claim 18, further comprising depositing an anti-reflective material capable of absorbing laser energy to overly said conductive material prior to said subjecting, said anti-reflective material and said conductive material forming a composite layer thermally induced by said subjecting, said composite layer being in substantial contact with said conductive region.
Claim 25
Dependent Claim
21 words
The method of claim 21, further comprising discontinuing said subjecting, said discontinuing solidifying said composite layer to form said contact plug.
Claim 26
Dependent Claim
53 words
The method of claim 22, further comprising blanket etching of said composite layer, said blanket etching further defining said contact plug, said contact plug having a bottom portion in substantial contact with said contact region and an upper portion substantially coplanar with a surface of said dielectric layer subsequent to said blanket etching.
Claim 27
Dependent Claim
18 words
The method of claim 18, further comprising forming a conductive interconnect line in contact with said contact plug.
Claim 28
Independent Claim
266 words
A method for forming a contact plug in a dielectric, said dielectric overlying a semiconductor conductive region, comprising: a) masking the dielectric layer; b) etching the dielectric layer to form a contact hole and to expose a portion of the conductive region, said contact hole having at least one sidewall, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining a material; c) depositing a protective barrier layer on at least said sidewall prior to said depositing of said conductive material, said protective barrier layer preventing an interaction of said dielectric layer and said conductive material; d) depositing a conductive material in at least said contact hole; e) depositing an anti-reflective material capable of absorbing laser energy to overly said conductive material; f) subjecting said deposited conductive material and said deposited anti-reflective material to laser energy, said laser energy imparting thermal energy to said conductive material and said anti-reflective material, said thermal energy liquefying said conductive material and said anti-reflective material and thermally inducing said conductive material and said anti-reflective material to flow together to form a composite layer comprising said anti-reflective material and said conductive material, said composite layer being in substantial contact with said conductive region; g) discontinuing said subjecting, said discontinuing solidifying said composite layer to form said contact plug; and h) blanket etching of said composite layer, said blanket etching further defining said contact plug, said contact plug having a bottom portion in substantial contact with said contact region and an upper portion substantially coplanar with a surface of said dielectric layer.
Claim 29
Independent Claim
266 words
A method for forming a contact plug in a dielectric, said dielectric overlying a semiconductor conductive region, comprising: a) masking the dielectric layer; b) etching the dielectric layer to form a contact hole and to expose a portion of the conductive region, said contact hole having at least one sidewall, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining a material; c) depositing a protective barrier layer on at least said sidewall prior to said depositing of said conductive material, said protective barrier layer preventing an interaction of said dielectric layer and said conductive material; d) depositing a conductive material in at least said contact hole; e) depositing an anti-reflective material capable of absorbing laser energy to overly said conductive material; f) subjecting said deposited conductive material and said deposited anti-reflective material to laser energy, said laser energy imparting thermal energy to said conductive material and said anti-reflective material, said thermal energy liquefying said conductive material and said anti-reflective material and thermally inducing said conductive material and said anti-reflective material to flow together to form a composite layer comprising said anti-reflective material and said conductive material, said composite layer being in substantial contact with said conductive region; g) discontinuing said subjecting, said discontinuing solidifying said composite layer to form said contact plug; and h) blanket etching of said composite layer, said blanket etching further defining said contact plug, said contact plug having a bottom portion in substantial contact with said contact region and an upper portion substantially coplanar with a surface of said dielectric layer.
Claim 30
Dependent Claim
18 words
The method of claim 25, further comprising forming a conductive interconnect line in contact with said contact plug.
Claim 31
Dependent Claim
23 words
The method of claim 26, further comprising removing a residue of said blanket etching prior to said formation of said conductive interconnect line.
Claim 32
Dependent Claim
32 words
The method of claim 25, wherein said depositing said conductive material, said depositing said anti-reflective material, and said depositing said protective barrier layer comprises a sputter deposit and a chemical vapor deposition.
Claim 33
Dependent Claim
16 words
The method of claim 25, wherein said protective barrier layer comprises titanium tungsten or titanium nitride.
Claim 34
Dependent Claim
16 words
The method of claim 25, wherein said conductive layer comprises aluminum, copper, gold, titanium, and molybdenum.
Claim 35
Dependent Claim
17 words
The method of claim 25, wherein said anti-reflective material comprises titanium, titanium nitride, tungsten, and tungsten nitride.
Claim 36
Dependent Claim
30 words
The method of claim 25, wherein said interconnect lines comprise alloys of aluminum, copper, gold, titanium, and molybdenum, said aluminum alloys comprising aluminum silicon copper, aluminum titanium, and aluminum copper.
Claim 37
Dependent Claim
20 words
The method of claim 25, wherein said blanket etching comprises a chemical etch, a mechanical etch, and a chemical-mechanical polishing.
Claim 38
Dependent Claim
17 words
The method of claim 33, wherein said chemical etch comprises a dry etch and a wet etch.
Claim 39
Dependent Claim
22 words
The method of claim 25, wherein said blanket etching is a combination of a chemical etch performed prior to a chemical-mechanical polishing.
Claim 40
Dependent Claim
269 words
A contact plug in a dielectric, said dielectric overlying a semiconductor conductive region, said contact plug formed by the process comprising: a) masking the dielectric layer; b) etching the dielectric layer to form a contact hole and to expose a portion of the conductive region, said contact hole having at least one sidewall, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining a material; c) depositing a protective barrier layer on at least said sidewall prior to said depositing of said conductive material, said protective barrier layer preventing an interaction of said dielectric layer and said conductive material; d) depositing a conductive material in at least said contact hole; e) depositing an anti-reflective material capable of absorbing laser energy to overly said conductive material; f) subjecting said deposited conductive material and said deposited anti-reflective material to laser energy, said laser energy imparting thermal energy to said conductive material and said anti-reflective material, said thermal energy liquefying said conductive material and said anti-reflective material and thermally inducing said conductive material and said anti-reflective material to flow together to form a composite layer comprising said anti-reflective material and said conductive material, said composite layer being in substantial contact with said conductive region; g) discontinuing said subjecting, said discontinuing solidifying said composite layer to form said contact plug; and h) blanket etching of said composite layer, said blanket etching further defining said contact plug, said contact plug having a bottom portion in substantial contact with said contact region and an upper portion substantially coplanar with a surface of said dielectric layer.
Claim 41
Dependent Claim
269 words
A contact plug in a dielectric, said dielectric overlying a semiconductor conductive region, said contact plug formed by the process comprising: a) masking the dielectric layer; b) etching the dielectric layer to form a contact hole and to expose a portion of the conductive region, said contact hole having at least one sidewall, said contact hole capable of receiving a material, said contact hole in conjunction with said conductive region capable of retaining a material; c) depositing a protective barrier layer on at least said sidewall prior to said depositing of said conductive material, said protective barrier layer preventing an interaction of said dielectric layer and said conductive material; d) depositing a conductive material in at least said contact hole; e) depositing an anti-reflective material capable of absorbing laser energy to overly said conductive material; f) subjecting said deposited conductive material and said deposited anti-reflective material to laser energy, said laser energy imparting thermal energy to said conductive material and said anti-reflective material, said thermal energy liquefying said conductive material and said anti-reflective material and thermally inducing said conductive material and said anti-reflective material to flow together to form a composite layer comprising said anti-reflective material and said conductive material, said composite layer being in substantial contact with said conductive region; g) discontinuing said subjecting, said discontinuing solidifying said composite layer to form said contact plug; and h) blanket etching of said composite layer, said blanket etching further defining said contact plug, said contact plug having a bottom portion in substantial contact with said contact region and an upper portion substantially coplanar with a surface of said dielectric layer.
Claim 42
Dependent Claim
19 words
The contact plug of claim 36, further comprising forming a conductive interconnect line in contact with said contact plug.
Claim 43
Dependent Claim
24 words
The contact plug of claim 37, further comprising removing a residue of said blanket etching prior to said formation of said conductive interconnect line.
Claim 44
Dependent Claim
33 words
The contact plug of claim 36, wherein said depositing said conductive material, said depositing said anti-reflective material, and said depositing said protective barrier layer comprises a sputter deposit and a chemical vapor deposition.
Claim 45
Dependent Claim
17 words
The contact plug of claim 36, wherein said protective barrier layer comprises titanium tungsten or titanium nitride.
Claim 46
Dependent Claim
17 words
The contact plug of claim 36, wherein said conductive layer comprises aluminum, copper, gold, titanium, and molybdenum.
Claim 47
Dependent Claim
18 words
The contact plug of claim 36, wherein said anti-reflective material comprises titanium, titanium nitride, tungsten, and tungsten nitride.
Claim 48
Dependent Claim
31 words
The contact plug of claim 36, wherein said interconnect lines comprise alloys of aluminum, copper, gold, titanium, and molybdenum, said aluminum alloys comprising aluminum silicon copper, aluminum titanium, and aluminum copper.
Claim 49
Dependent Claim
21 words
The contact plug of claim 36, wherein said blanket etching comprises a chemical etch, a mechanical etch, and a chemical-mechanical polishing.
Claim 50
Dependent Claim
18 words
The contact plug of claim 44, wherein said chemical etch comprises a dry etch and a wet etch.
Claim 51
Dependent Claim
23 words
The contact plug of claim 36, wherein said blanket etching is a combination of a chemical etch performed prior to a chemical-mechanical polishing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-23 | 1995-12-23 | 1996-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-23 | 1999-12-23 | 2000-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-23 | 2003-12-23 | 2004-06-23 | $7700.00 | Window Closed / Lapsed |