US5067805A
Expired / Lapsed
US
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Confocal scanning optical microscope
Assignee: Tencor Instruments Inc
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Filing: 1990-02-27
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Granted: 1991-11-26
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Expires: 2010-02-27
Abstract
Abstract An improved real-time confocal scanning microscope, and an improved perforated disk for use in such microscope. A preferred embodiment of the inventive microscope includes a polarizing beamsplitting cube and a rotatable Nipkow disk perforted with a hexagonal hole pattern. The disk is preferably mounted so that the scan lines produced as the disk rotates will cross both the sample feature to be imaged and the sensor array in the system's video camera at an angle substantially equal to 45 degrees. This disk orientation ensures that brightness variations caused by a non-uniform scan will not affect the measurements. Rotation of the disk is preferably synchronized with the camera frame rate to prevent any scan errors from causing random (frame to frame) variations in the camera output. The polarizing beamsplitting cube consists of two triangular prisms connected (i.e., cemented) together by a dielectric film. Undesirable light reflections from the cube's faces are eliminated by orienting the cube about the dielectric film's normal axis so that light is incident at the cube at acute angles with respect to the cube's faces. An absorbing filter (such as a piece of black glass) is preferably optically cemented (or painted or otherwise coated) on the back face of the cube to absorb stray light.
Inventors
- 👤 Timothy R. Corle
- 👤 Chester L. Mallory
- 👤 Philip D. Wasserman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:16
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/0018; G02B21/00; G02B21/0004; G02B21/002; G02B21/0024; G02B21/0036; G02B21/0044; G02B21/0052; G02B21/0068; G02B21/008; G02B21/0084
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
178 words
A microscope for imaging a sample, including: a polarization rotating element positioned adjacent the sample; a rotatably mounted disk, perforated with an array of holes; a polarizing beamsplitting cube including a partially reflective film having a normal axis, wherein the cube is positioned to receive a beam of light from a source and divert a first portion of the beam having a first polarization through the disk to the polarization rotating element; and an image receiving means positioned to receive a second portion of the first portion of the beam, wherein said second portion has propagated through the polarization rotating element and reflected from the sample to the image receiving means back through the polarization rotating element, the disk, and the cube, wherein the cube is mounted within the microscope in such an orientation about the normal axis that the beam is incident at the cube at a nonzero incidence angle, and wherein the nonzero incidence angle is sufficiently large that reflections of the beam from outer surfaces of the cube will not interfere with the second portion.
Claim 2
Dependent Claim
178 words
A microscope for imaging a sample, including: a polarization rotating element positioned adjacent the sample; a rotatably mounted disk, perforated with an array of holes; a polarizing beamsplitting cube including a partially reflective film having a normal axis, wherein the cube is positioned to receive a beam of light from a source and divert a first portion of the beam having a first polarization through the disk to the polarization rotating element; and an image receiving means positioned to receive a second portion of the first portion of the beam, wherein said second portion has propagated through the polarization rotating element and reflected from the sample to the image receiving means back through the polarization rotating element, the disk, and the cube, wherein the cube is mounted within the microscope in such an orientation about the normal axis that the beam is incident at the cube at a nonzero incidence angle, and wherein the nonzero incidence angle is sufficiently large that reflections of the beam from outer surfaces of the cube will not interfere with the second portion.
Claim 3
Dependent Claim
48 words
The microscope of claim 1, wherein the image receiving means is a video camera, wherein the video camera has a sensor array and a means for reading out the sensor array at a frame rate, also including: means for synchronizing rotation of the disk with the frame rate.
Claim 4
Dependent Claim
38 words
The microscope of claim 1, wherein the cube has a front face which faces the source and a back face, and also including: an absorbing filter coated on the back face of the cube to absorb stray light.
Claim 5
Dependent Claim
18 words
The microscope of claim 3, wherein the absorbing filter is black glass optically cemented on the back face.
Claim 6
Dependent Claim
32 words
The microscope of claim 1, also including: a secondary tube lens positioned between the image receiving means and the cube; and a secondary objective lens positioned between the cube and the disk.
Claim 7
Dependent Claim
16 words
The microscope of claim 1, wherein the array of holes is substantially hexagonal array of holes.
Claim 8
Dependent Claim
64 words
The microscope of claim 1, wherein the disk defines a first array of holes and a second array of holes, wherein the holes in the first array have a first size, the holes in the second array have a second size, and the holes in the first array and the holes in the second array are located in distinct annular portions of the disk.
Claim 9
Dependent Claim
25 words
The microscope of claim 7, wherein the holes in the first array have different average center-to-center spacing than do the holes in the second array.
Claim 10
Dependent Claim
29 words
The microscope of claim 1, wherein the partially reflective film is a dielectric film, and wherein the cube includes two triangular prisms connected together by the partially reflective film.
Claim 11
Dependent Claim
220 words
A microscope, including: a sample having major linear features; a polarization rotating element positioned adjacent the sample; a rotatably mounted disk, perforated with a substantially hexagonal array of holes; a polarizing beamsplitting cube, wherein the cube is positioned to receive a beam of light from a light source and divert a first portion of the beam having a first polarization through a region of the disk to the polarization rotating element; and an image receiving means positioned to receive a second portion of the first portion, wherein said second portion has propagated through the polarization rotating element and reflected from the sample to the image receiving means back through the polarization rotating element, the region of the disk, and the cube, wherein a first hole of the array of holes perforates the region of the disk, and wherein the disk is mounted in such a position, in relation to the sample, that a projection on the sample of a disk radius through the first hole intersects the major linear features at an angle substantially equal to 45 degrees, so that a projection of the first portion of the beam on the sample through the first hole as the disk rotates defines scan line on the sample which intersects the major linear features at an angle substantially equal to 45 degrees.
Claim 12
Dependent Claim
220 words
A microscope, including: a sample having major linear features; a polarization rotating element positioned adjacent the sample; a rotatably mounted disk, perforated with a substantially hexagonal array of holes; a polarizing beamsplitting cube, wherein the cube is positioned to receive a beam of light from a light source and divert a first portion of the beam having a first polarization through a region of the disk to the polarization rotating element; and an image receiving means positioned to receive a second portion of the first portion, wherein said second portion has propagated through the polarization rotating element and reflected from the sample to the image receiving means back through the polarization rotating element, the region of the disk, and the cube, wherein a first hole of the array of holes perforates the region of the disk, and wherein the disk is mounted in such a position, in relation to the sample, that a projection on the sample of a disk radius through the first hole intersects the major linear features at an angle substantially equal to 45 degrees, so that a projection of the first portion of the beam on the sample through the first hole as the disk rotates defines scan line on the sample which intersects the major linear features at an angle substantially equal to 45 degrees.
Claim 13
Dependent Claim
48 words
The microscope of claim 10, wherein the image receiving means is a video camera, wherein the video camera has a sensor array and a means for reading out the sensor array at a frame rate, also including: means for synchronizing rotation of the disk with the frame rate.
Claim 14
Dependent Claim
38 words
The microscope of claim 10, wherein the cube has a front face which faces the source and a back face, and also including: an absorbing filter coated on the back face of the cube to absorb stray light.
Claim 15
Dependent Claim
18 words
The microscope of claim 12, wherein the absorbing filter is black glass optically cemented on the back face.
Claim 16
Dependent Claim
32 words
The microscope of claim 10, also including: a secondary tube lens positioned between the image receiving means and the cube; and a secondary objective lens positioned between the cube and the disk.
Claim 17
Dependent Claim
63 words
The microscope of claim 10, wherein the image receiving means includes a sensor array defining a rectangular grid, wherein the disk is mounted in such a position that reflections of the scan line are projected on the sensor array as the disk rotates, and wherein the reflections of the scan line intersect the rectangular grid at an angle substantially equal to 45 degrees.
Claim 18
Dependent Claim
65 words
The microscope of claim 10, wherein the disk defines a first array of holes and a second array of holes, wherein the holes in the first array have a first center-to-center spacing, the holes in the second array have a second center-to-center spacing, and the holes in the first array and the holes in the second array are located indistinct annular portions of the disk.
Claim 19
Dependent Claim
86 words
The microscope of claim 10, wherein the cube includes two triangular prisms having outer surfaces and a partially reflective film between the prisms, wherein the partially reflective film has a normal axis, wherein the cube is mounted within the microscope in such an orientation about the normal axis that the beam is incident at the cube at a nonzero incidence angle, and wherein the nonzero incidence angle is sufficiently large that reflections of the beam from the outer surfaces will not interfere with the second portion.
Claim 20
Dependent Claim
90 words
A disk for use in a confocal scanning microscope, wherein the disk is perforated with a first array of holes and a second array of holes, wherein the holes in the first array and the holes in the second array are located in distinct annular portions of the disk, wherein the holes in the first array have a first center-to-center spacing and the holes in the second array have a second center-to-center spacing, and wherein the holes define a spiral pattern suitable for scanning a sample as the disk rotates.
Claim 21
Dependent Claim
90 words
A disk for use in a confocal scanning microscope, wherein the disk is perforated with a first array of holes and a second array of holes, wherein the holes in the first array and the holes in the second array are located in distinct annular portions of the disk, wherein the holes in the first array have a first center-to-center spacing and the holes in the second array have a second center-to-center spacing, and wherein the holes define a spiral pattern suitable for scanning a sample as the disk rotates.
Claim 22
Dependent Claim
16 words
The disk of claim 18, wherein the holes are arranged in a substantially hexagonal array pattern.
Claim 23
Dependent Claim
23 words
The disk of claim 18, wherein the holes in the first array have different size than do the holes in the second array.
Claim 24
Dependent Claim
49 words
The disk of claim 18, wherein the disk includes: a transparent substrate; an opaque layer on a first portion of the substrate, wherein the first portion excludes regions which define the first array of holes and the second array of holes; and an anti-reflection coating on the opaque layer.
Claim 25
Dependent Claim
127 words
A disk for use in a confocal scanning microscope, including; a transparent substrate; and an opaque layer on the substrate, wherein the layer transmits less than 0.01 percent of optical radiation incident thereon, and wherein portions of the layer have been removed to define an array of holes arranged in a spiral pattern suitable for scanning a sample as the disk rotates, wherein the holes are arranged into a first array of holes and a second array of holes, wherein the holes in the first array and the holes in the second array are located in distinct annular portions of the disk, and wherein the holes in the first array have a first center-to-center spacing and the holes in the second array have a second center-to-center spacing.
Claim 26
Dependent Claim
127 words
A disk for use in a confocal scanning microscope, including; a transparent substrate; and an opaque layer on the substrate, wherein the layer transmits less than 0.01 percent of optical radiation incident thereon, and wherein portions of the layer have been removed to define an array of holes arranged in a spiral pattern suitable for scanning a sample as the disk rotates, wherein the holes are arranged into a first array of holes and a second array of holes, wherein the holes in the first array and the holes in the second array are located in distinct annular portions of the disk, and wherein the holes in the first array have a first center-to-center spacing and the holes in the second array have a second center-to-center spacing.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-25 | 1995-05-27 | 1995-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-25 | 1999-05-27 | 1999-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-25 | 2003-05-27 | 2003-11-26 | $7700.00 | Window Closed / Lapsed |