Optical mask filter capable of reducing the semiperiodic component of temporal variation in endpoint detection

Claim 2

A mask capable of reducing a semiperiodic component of temporal variation of a detector signal in a detector system in which a flux F(θ) of radiation is incident over a range of directions θ from a radiation source onto an input of a detector and in which said flux exhibits a semiperiodic temporal component of variation, said mask comprising: a radiation transmission filter that transmits a fraction T(θ) of light incident at an angle θ relative to a reference direction; and aligning fixture means for accurately aligning the transmission filter between the radiation source and the input of said detector.

Claim 3

A mask as in claim 1 wherein said radiation transmission filter comprises: a radiation intercepting section that is to be positioned within a conical region of vertex angle Δ/2 outside of which the detector is not responsive to incident radiation, said radiation intercepting section having a spatial distribution of transmittance selected to minimize, in an output signal from said detector, the fraction of the output signal that is semiperiodic.

Claim 4

A mask as in claim 2 wherein said aligning means comprises: a frame connected to the light intercepting portion for mounting and aligning the mask in front of the input to the detector; and a clamp into which said frame fits with close tolerance to accurately align said frame in said clamp.

Claim 5

A mask as in claim 2 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section is opaque within a rectangular profile.

Claim 6

A mask as in claim 4 wherein this rectangular opaque area has a width T selected to substantially minimize the fraction of the detector output signal that is semiperiodic.

Claim 7

A mask as in claim 2 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section is opaque within a profile that is rectangular in a central region and flares outward from a top end and a bottom end of this rectangular central region.

Claim 8

A mask as in claim 6 wherein the rectangular central region has a width T and a length L that are selected to minimize, in the output signal, the fraction of the output signal that is semiperiodic.

Claim 9

A mask as in claim 2 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section has a profile that is defined by a curve selected to minimize, in the output signal, the fraction of the output signal that is semiperiodic.

Claim 10

A mask as in claim 2 wherein the transmittance of said radiation intercepting section has a transmittance that varies continuously within the two dimensional region that intersects said conical region and said continuous variation substantially minimizes, in an output signal from said detector, the fraction of the output signal that is semiperiodic.

Claim 11

A mask as in claim 1 wherein said radiation transmission filter comprises: a plurality of fiber optic cables each having an associated acceptance angle and each being aligned in a preselected direction to produce said transmittance T(θ).

Claim 12

A radiation detection system having a mask capable of reducing a semiperiodic component of temporal variation of a detector signal in a detector system in which a flux F(θ) of radiation is incident over a range of directions θ from a radiation source onto an input of a detector and in which said flux exhibits a semiperiodic temporal component of variation comprising: a detector having an input on which a flux of radiation can be incident over said range of directions, and wherein said mask is disposed between said radiation flux source and said detector, said mask comprising: a radiation transmission filter that transmits a fraction T(θ) of light incident at an angle θ relative to a reference direction; and aligning fixture means for accurately maintaining the alignment of the transmission filter between the radiation source and the input of said detector.

Claim 13

A radiation detection system having a mask capable of reducing a semiperiodic component of temporal variation of a detector signal in a detector system in which a flux F(θ) of radiation is incident over a range of directions θ from a radiation source onto an input of a detector and in which said flux exhibits a semiperiodic temporal component of variation comprising: a detector having an input on which a flux of radiation can be incident over said range of directions, and wherein said mask is disposed between said radiation flux source and said detector, said mask comprising: a radiation transmission filter that transmits a fraction T(θ) of light incident at an angle θ relative to a reference direction; and aligning fixture means for accurately maintaining the alignment of the transmission filter between the radiation source and the input of said detector.

Claim 14

A radiation detection system as in claim 10 wherein said radiation transmission filter comprises: a radiation intercepting section that is to be positioned within a conical region of vertex angle Δ/2 outside of which the detector is not responsive to incident radiation, said radiation intercepting section having a spatial distribution of transmittance selected to minimize, in an output signal from said detector, the fraction of the output signal that is semiperiodic; and means for accurately aligning the radiation intercepting section in front of the input of said detector.

Claim 15

A radiation detection system as in claim 11 wherein said aligning means comprises: a frame connected to the light intercepting portion for mounting and aligning the radiation intercepting section in front of the input to the detector; and a clamp into which said frame fits with close tolerance to accurately align said frame in said clamp.

Claim 16

A radiation detection system as in claim 11 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section is opaque within a rectangular profile.

Claim 17

A radiation detection system as in claim 13 wherein this rectangular opaque area has a width T selected to substantially minimize the fraction of the detector output signal that is semiperiodic.

Claim 18

A radiation detection system as in claim 11 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section is opaque within a profile that is rectangular in a central region and flares outward from a top end and a bottom end of this rectangular central region.

Claim 19

A radiation detection system as in claim 15 wherein the rectangular central region has a width T and a length L that are selected to minimize, in the output signal, the fraction of the output signal that is semiperiodic.

Claim 20

A radiation detection system as in claim 11 wherein, within the region in which the radiation intercepting section intersects said conical region, said radiation intercepting section has a profile that is defined by a curve selected to minimize, in the output signal, the fraction of the output signal that is semiperiodic.

Claim 21

A radiation detection system as in claim 11 wherein the transmittance of said radiation intercepting section has a transmittance that varies continuously within the two dimensional region that intersects said conical region and said continuous variation substantially minimizes, in an output signal from said detector, the fraction of the output signal that is semiperiodic.

Claim 22

A radiation detection system as in claim 11 wherein said radiation transmission filter comprises: a plurality of fiber optic cables each having an associated acceptance angle and each being aligned in a preselected direction to produce said transmittance T(θ).