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US5047648A
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Method and apparatus for detecting particles in ion implantation machines
Assignee: Applied Materials Inc
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Filing: 1990-11-26
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Granted: 1991-09-10
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Expires: 2010-11-26
Abstract
Abstract A method for detecting particles in an ion implantation characterized by the steps of placing a particle sensor within the vacuum chamber of the ion implantation machine, exposing the substrate to an ion beam, thereby dislodging a stream of free particles, and detecting a portion of the free particle sensor. The particle sensor is preferably shielded from radiation to prevent false readings, and is positioned substantially along the plane of rotation of a substrate support wheel. By positioning the particle counter both along the plane of rotation and tangential to the rotation of the wheel at the point of ion impact, the particle counter intercepts the particle stream at the point of maximum particle flux. The apparatus includes a laser beam, a photodetector responsive to a portion of the laser beam scattered off of particles in the particle stream and a lead shield to shield the photodetector from x-rays generated within the vacuum chamber of the ion implantation machine.
Inventors
- 👤 Boris Fishkin
- 👤 Michael Current
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:29
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J2237/00; H01J2237/02; H01J2237/022; H01J2237/0225; H01J2237/30; H01J2237/317; H01J2237/31701
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
76 words
A method for detecting particles in an ion implantation machine comprising the steps of: exposing a substrate positioned within a vacuum chamber to an ion beam by rotating said substrate within a plane of rotation past an ion beam aperture, where the impingement of said ion beam on said substrate dislodges free particles; and disposing particle sensing means within said vacuum chamber substantially within said plane of rotation to detect a portion of said free particles.
Claim 2
Independent Claim
76 words
A method for detecting particles in an ion implantation machine comprising the steps of: exposing a substrate positioned within a vacuum chamber to an ion beam by rotating said substrate within a plane of rotation past an ion beam aperture, where the impingement of said ion beam on said substrate dislodges free particles; and disposing particle sensing means within said vacuum chamber substantially within said plane of rotation to detect a portion of said free particles.
Claim 3
Dependent Claim
27 words
A method for detecting particles in an ion implantation machine as recited in claim 1 further comprising the step of: shielding said particle sensing means from radiation.
Claim 4
Dependent Claim
52 words
A method for detecting particles in an ion implantation machine as recited in claim 1 wherein said particle sensing means is disposed along a line which includes a point of ion impingement on said substrate and which is substantially tangential to a rotary path of said substrate within said plane of rotation.
Claim 5
Dependent Claim
27 words
A method for detecting particles in an ion implantation machine as recited in claim 3 further comprising the steps of: shielding said particle sensing means from radiation.
Claim 6
Dependent Claim
98 words
An ion implantation machine and particle detection apparatus comprising: a vacuum chamber; rotatable support means disposed within said vacuum chamber, said rotatable support means having a plane of rotation; ion beam generating means having an ion beam aperture; means for supporting at least one substrate on said rotatable support means such that said substrate may be caused to move past said ion beam aperture, thereby dislodging free particles when an ion beam impinges upon said substrate; and particle sensing means disposed within said vacuum chamber substantially within said plane of rotation for detecting some of said free particles.
Claim 7
Dependent Claim
98 words
An ion implantation machine and particle detection apparatus comprising: a vacuum chamber; rotatable support means disposed within said vacuum chamber, said rotatable support means having a plane of rotation; ion beam generating means having an ion beam aperture; means for supporting at least one substrate on said rotatable support means such that said substrate may be caused to move past said ion beam aperture, thereby dislodging free particles when an ion beam impinges upon said substrate; and particle sensing means disposed within said vacuum chamber substantially within said plane of rotation for detecting some of said free particles.
Claim 8
Dependent Claim
22 words
An ion implantation machine and particle detection apparatus as recited in claim 5 wherein said particle sensing means is shielded from radiation.
Claim 9
Dependent Claim
26 words
An ion implantation machine and particle detection apparatus as recited in claim 5 wherein said particle sensing means is substantially aligned with said ion beam aperture.
Claim 10
Dependent Claim
50 words
An ion implantation machine and particle detection apparatus as recited in claim 5 wherein said particle sensing means is disposed along a line which includes a point of ion impingement on said substrate and which is substantially tangential to a rotary path of said substrate within said plane of rotation.
Claim 11
Dependent Claim
22 words
An ion implantation machine and particle detection apparatus as recited in claim 5 wherein said particle sensing means is shielded from radiation.
Claim 12
Independent Claim
61 words
An apparatus for detecting particles within an ion implantation machine vacuum chamber comprising: particle sensing means including a sensing aperture which is substantially aligned with a particle stream comprising dislodged free particles generated by the impingement of an ion beam with a substrate; and shielding means substantially enclosing said particle sensing means to shield said particle sensing means from high-energy radiation.
Claim 13
Independent Claim
61 words
An apparatus for detecting particles within an ion implantation machine vacuum chamber comprising: particle sensing means including a sensing aperture which is substantially aligned with a particle stream comprising dislodged free particles generated by the impingement of an ion beam with a substrate; and shielding means substantially enclosing said particle sensing means to shield said particle sensing means from high-energy radiation.
Claim 14
Dependent Claim
59 words
An apparatus for detecting particles within an ion implantation machine vacuum chamber as recited in claim 10 wherein said particle sensing means includes laser means producing a laser beam aligned with said aperture and photodetector means shielded by said shielding means and responsive to a portion of said laser beam which has been scattered by particles through said aperture.
Claim 15
Dependent Claim
38 words
An apparatus for detecting particles within an ion implantation machine vacuum chamber as recited in claim 11 wherein said particle sensing means further comprising detection circuitry means coupled to said photodetector means to produce a particle output signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-09 | 1995-03-11 | 1995-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-09 | 1999-03-11 | 1999-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-09 | 2003-03-11 | 2003-09-10 | $7700.00 | Window Closed / Lapsed |