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US5032203A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for polishing

Assignee: Tosoh Silica Corp
•
Filing: 1989-01-04
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Granted: 1991-07-16
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Expires: 2009-01-04
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Abstract

Abstract Polishing agent including as a main constituent an aqueous solution containing sodium bromite. The aqueous solution may further contain particles which are not dissolved in the solution or an alkali agent to adjust the pH to 8 to 14. Also the apparatus and method for polishing articles using the polishing agent are disclosed.

Inventors

  • 👤 Toshiroh K. Doy
  • 👤 Hiroshi Nakada
  • 👤 Yoshihiko Kunimitsu

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:05
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/12; H10P90/129; B; B24; B24B; B24B37/00; B24B37/04; B24B57/00; B24B57/02; C; C09; C09K; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 105 words
A polishing apparatus for polishing hard and fragile materials, comprising: a polisher having a polishing surface on which the material to be polished is placed, a conditioning rotatable ring slidably supported on the polishing surface and arranged to loosely hold the material to be polished, a metal piece disposed on said conditioning ring so as to contact a polishing surface, a vessel containing a polishing agent comprising an aqueous solution of sodium bromite, said vessel being arranged to drop the polishing agent onto the polishing surface and bring it into contact with the metal piece so as to decompose the sodium bromite and generate bromine.
Claim 2
Dependent Claim 105 words
A polishing apparatus for polishing hard and fragile materials, comprising: a polisher having a polishing surface on which the material to be polished is placed, a conditioning rotatable ring slidably supported on the polishing surface and arranged to loosely hold the material to be polished, a metal piece disposed on said conditioning ring so as to contact a polishing surface, a vessel containing a polishing agent comprising an aqueous solution of sodium bromite, said vessel being arranged to drop the polishing agent onto the polishing surface and bring it into contact with the metal piece so as to decompose the sodium bromite and generate bromine.

References Cited (Backward Citations)

US3406116A Cited
US3436286A Cited
US3979239A Cited
US4057939A Cited
US4435247A Cited
JPS6384872A Cited
US4792416A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-15 1995-01-14 1995-07-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-15 1999-01-14 1999-07-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-15 2003-01-14 2003-07-16 $7700.00 Window Closed / Lapsed

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