US5019752A
Expired / Lapsed
US
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Plasma switch with chrome, perturbated cold cathode
Assignee: The AT&T MVPD Group LLC
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Filing: 1988-06-16
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Granted: 1991-05-28
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Expires: 2008-06-16
Abstract
Abstract A plasma switch employs a cold cathode which yields secondary electrons to sustain a plasma within the switch. The cathode is provided with a series of perturbations which increase the effective cathode surface area exposed to the plasma and increase the average effective path lengths of secondary electrons emitted from the cathode and the probability of such electrons having ionizing collisions with gas molecules within the switch. The interior cathode surface is provided with a coating formed from chromium or a chromium mixture. Chromium combines a high rate of secondary electron emission with low sputtering and other advantageous properties for plasma switch operation. Various types of chromium-plated perturbations are described.
Inventors
- 👤 Robert W. Schumacher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:46
CPC Classifications
H; H01; H01J; H01J17/00; H01J17/02; H01J17/04; H01J17/06; H01J17/066; H01J17/38; H01J17/40; H01J17/44
Claims Analysis
Total Claims: 42
Claim 1
Independent Claim
205 words
A plasma switch comprising: a vacuum housing a cold cathode within the housing which provides a source of secondary electrons, an anode spaced from the cathode, a source grid disposed between the anode and cathode within the housing, means for introducing an ionizable gas into the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode, said cathode having a series of perturbations which increase the effective cathode surface exposed to the plasma compared to a smooth-walled cathode, said perturbations being shaped to confine secondary electrons emitted from the cathode to increase the average effective path length of said second electrons through the plasma, said perturbations each having a depth suitable for reducing the forward voltage drop of the switch while allowing the plasma to penetrate into the perturbation.
Claim 2
Dependent Claim
205 words
A plasma switch comprising: a vacuum housing a cold cathode within the housing which provides a source of secondary electrons, an anode spaced from the cathode, a source grid disposed between the anode and cathode within the housing, means for introducing an ionizable gas into the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode, said cathode having a series of perturbations which increase the effective cathode surface exposed to the plasma compared to a smooth-walled cathode, said perturbations being shaped to confine secondary electrons emitted from the cathode to increase the average effective path length of said second electrons through the plasma, said perturbations each having a depth suitable for reducing the forward voltage drop of the switch while allowing the plasma to penetrate into the perturbation.
Claim 3
Dependent Claim
18 words
The plasma switch of claim 1, said perturbations comprising a series of grooves having substantially parallel side walls.
Claim 4
Dependent Claim
41 words
The plasma switch of claim 2, said plasma being characterized by a voltage differential between the cathode and plasma over a cathode sheath region of the plasma, wherein said grooves are substantially wider than twice the width of said cathode sheath.
Claim 5
Dependent Claim
28 words
The plasma switch of claim 1, said perturbations comprising cavities in the cathode having openings to the plasma which are substantially smaller than the interiors of said cavities.
Claim 6
Dependent Claim
33 words
The plasma switch of claim 4, said cavities comprising a series of grooves in the cathode with a series of cross bars overlapping the cathode surface between grooves and partially closing said grooves.
Claim 7
Dependent Claim
147 words
A plasma switch, comprising: a vacuum housing, a cold cathode within the housing having a surface layer which provides a source of secondary electrons, said cathode surface layer being at least partially formed from chromium, an anode spaced from the cathode within the housing, a source grid disposed between the anode and cathode, means for introducing an ionizable gas into the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode.
Claim 8
Dependent Claim
147 words
A plasma switch, comprising: a vacuum housing, a cold cathode within the housing having a surface layer which provides a source of secondary electrons, said cathode surface layer being at least partially formed from chromium, an anode spaced from the cathode within the housing, a source grid disposed between the anode and cathode, means for introducing an ionizable gas into the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode.
Claim 9
Dependent Claim
17 words
The plasma switch of claim 6, said cathode surface layer being formed at least 99% from chromium.
Claim 10
Dependent Claim
20 words
The plasma switch of claim 6, said cathode surface layer being formed from a mixture of chromium and chromium oxide.
Claim 11
Dependent Claim
30 words
The plasma switch of claim 6, said cathode surface layer being formed from a mixture of chromium and a material selected from the group consisting of tungsten, molybdenum and thorium.
Claim 12
Dependent Claim
26 words
The plasma switch of claim 6, said cathode comprising a base formed from a material other than chromium, with said surface layer plated on said base.
Claim 13
Dependent Claim
196 words
A plasma switch, comprising: a vacuum housing, a cold cathode within the housing having a surface layer which provides a source of secondary electrons, said cathode surface layer being at least partially formed from chromium, an anode spaced from the cathode within the housing, a source grid disposed between the anode and cathode, means for introducing an ionizable gas to the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode, said cathode surface layer having a series of perturbations which increase the effective surface layer area compared to a smooth-walled surface layer, said perturbations being shaped to confine secondary electrons emitted from the surface layer to increase the average effective path length of said secondary electrons through the plasma.
Claim 14
Dependent Claim
196 words
A plasma switch, comprising: a vacuum housing, a cold cathode within the housing having a surface layer which provides a source of secondary electrons, said cathode surface layer being at least partially formed from chromium, an anode spaced from the cathode within the housing, a source grid disposed between the anode and cathode, means for introducing an ionizable gas to the space between the cathode and source grid, said cathode and source grid maintaining a plasma therebetween in response to a predetermined voltage differential between the cathode and source grid, a control grid disposed between said source grid and anode for selectively enabling and terminating a plasma path between the cathode and anode, and thereby closing and opening the switch, in response to control voltage signals applied to the control grid, and a magnet means confining the plasma to a predetermined area between the cathode and anode, said cathode surface layer having a series of perturbations which increase the effective surface layer area compared to a smooth-walled surface layer, said perturbations being shaped to confine secondary electrons emitted from the surface layer to increase the average effective path length of said secondary electrons through the plasma.
Claim 15
Dependent Claim
18 words
The plasma switch of claim 11, said perturbations comprising a series of grooves having substantially parallel side walls.
Claim 16
Dependent Claim
41 words
The plasma switch of claim 12, said plasma being characterized by a voltage differential between the cathode and plasma over a cathode sheath region of the plasma, wherein said grooves are substantially wider than twice the width of said cathode sheath.
Claim 17
Dependent Claim
28 words
The plasma switch of claim 11, said perturbations comprising cavities in the cathode having openings to the plasma which are substantially smaller than the interiors of said cavities.
Claim 18
Dependent Claim
32 words
The plasma switch of claim 14, said cavities comprising a series of grooves in the cathode with a series of crossbars overlapping the cathode surface between grooves and partially closing said grooves.
Claim 19
Dependent Claim
17 words
The plasma switch of claim 11, said cathode surface layer being formed at least 99% from chromium.
Claim 20
Dependent Claim
20 words
The plasma switch of claim 11, said cathode surface layer being formed from a mixture of chromium and chromium oxide.
Claim 21
Dependent Claim
30 words
The plasma switch of claim 11, said cathode surface layer being formed from a mixture of chromium and a material selected from the group consisting of tungsten, molybdenum and thorium.
Claim 22
Dependent Claim
26 words
The plasma switch of claim 11, said cathode comprising a base formed from a material other than chromium, with said surface layer plated on said base.
Claim 23
Dependent Claim
76 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cathode surface layer being at least partially formed from chromium and a series of perturbations in said cathode which increase the effective cathode surface area exposed to the plasma compared to a smooth-walled surface, said perturbations being shaped to confine secondary electrons emitted from said cathode to increase the effective average path length of said secondary electrons through an adjacent plasma.
Claim 24
Dependent Claim
76 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cathode surface layer being at least partially formed from chromium and a series of perturbations in said cathode which increase the effective cathode surface area exposed to the plasma compared to a smooth-walled surface, said perturbations being shaped to confine secondary electrons emitted from said cathode to increase the effective average path length of said secondary electrons through an adjacent plasma.
Claim 25
Dependent Claim
18 words
The cold cathode of claim 20, said perturbations comprising a series of grooves having substantially parallel side walls.
Claim 26
Dependent Claim
28 words
The cold cathode of claim 20, said perturbations comprising cavities in the cathode having openings to the plasma which are substantially smaller than the interiors of said cavities.
Claim 27
Dependent Claim
33 words
The cold cathode of claim 20, said cavities comprising a series of grooves in the cathode with a series of cross bars overlapping the cathode surface between grooves and partially closing said grooves.
Claim 28
Dependent Claim
45 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cold cathode base member, and a surface layer on said cold cathode base member to be exposed to a plasma, said surface layer being at least partially formed from chromium.
Claim 29
Dependent Claim
45 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cold cathode base member, and a surface layer on said cold cathode base member to be exposed to a plasma, said surface layer being at least partially formed from chromium.
Claim 30
Dependent Claim
17 words
The cold cathode of claim 24, said cathode surface layer being formed at least 99% from chromium.
Claim 31
Dependent Claim
20 words
The cold cathode of claim 24, said cathode surface layer being formed from a mixture of chromium and chromium oxide.
Claim 32
Dependent Claim
30 words
The cold cathode of claim 24, said cathode surface layer being formed from a mixture of chromium and a material selected from the group consisting of tungsten, molybdenum and thorium.
Claim 33
Dependent Claim
26 words
The cold cathode of claim 24, said cathode comprising a base formed from a material other than chromium, with said surface layer plated on said base.
Claim 34
Dependent Claim
92 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cold cathode member having a surface layer to be exposed to a plasma, a series of perturbations in said surface layer which increase the effective cathode surface area exposed to the plasma compared to a smooth-walled surface, said perturbations being shaped to confine secondary electrons emitted from said cathode surface layer to increase the average effective path length of said secondary electrons through an adjacent plasma, and said surface layer being at least partially formed from chromium.
Claim 35
Dependent Claim
92 words
A cold cathode for providing a secondary electron emission to an adjacent plasma, comprising: a cold cathode member having a surface layer to be exposed to a plasma, a series of perturbations in said surface layer which increase the effective cathode surface area exposed to the plasma compared to a smooth-walled surface, said perturbations being shaped to confine secondary electrons emitted from said cathode surface layer to increase the average effective path length of said secondary electrons through an adjacent plasma, and said surface layer being at least partially formed from chromium.
Claim 36
Dependent Claim
18 words
The cold cathode of claim 29, said perturbations comprising a series of grooves having substantially parallel side walls.
Claim 37
Dependent Claim
28 words
The cold cathode of claim 29, said perturbations comprising cavities in the cathode having openings to the plasma which are substantially smaller than the interiors of said cavities.
Claim 38
Dependent Claim
33 words
The cold cathode of claim 29, said cavities comprising a series of grooves in the cathode with a series of cross bars overlapping the cathode surface between grooves and partially closing said grooves.
Claim 39
Dependent Claim
17 words
The cold cathode of claim 29, said cathode surface layer being formed at least 99% from chromium.
Claim 40
Dependent Claim
20 words
The cold cathode of claim 29, said cathode surface layer being formed from a mixture of chromium and chromium oxide.
Claim 41
Dependent Claim
30 words
The cold cathode of claim 29, said cathode surface layer being formed from a mixture of chromium and a material selected from the group consisting of tungsten, molybdenum and thorium.
Claim 42
Dependent Claim
26 words
The cold cathode of claim 29, said cathode comprising a base formed from a material other than chromium, with said surface layer plated on said base.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-27 | 1994-11-26 | 1995-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-27 | 1998-11-26 | 1999-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-27 | 2002-11-26 | 2003-05-28 | $7700.00 | Window Closed / Lapsed |