Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
204 words
An ion beam irradiation apparatus comprising: a particle accelerator for developing an ion beam; first deflection means disposed in the path of said ion beam, for deflecting said ion beam in a first direction perpendicular to the axis of the path of said ion beam; second deflection means disposed in the path of said ion beam, for deflecting said ion beam in a second direction perpendicular to the axis of the path of said ion beam and perpendicular to said first direction in which the path of said ion beam is deflected by said first deflection means; a first power supply for supplying a first exciting current having a first ac component and a first dc bias component to said first deflection means; a second power supply for supplying a second exciting current having a second ac component and a second dc bias component to said second deflection means; and control means for varying magnetic fields developed by said first and second deflection means in response to the amplitude and phase of said first and second ac components and the polarity and magnitude of said first and second dc bias components and thereby controlling the size and the direction scanned by said ion beam.
Claim 2
Dependent Claim
204 words
An ion beam irradiation apparatus comprising: a particle accelerator for developing an ion beam; first deflection means disposed in the path of said ion beam, for deflecting said ion beam in a first direction perpendicular to the axis of the path of said ion beam; second deflection means disposed in the path of said ion beam, for deflecting said ion beam in a second direction perpendicular to the axis of the path of said ion beam and perpendicular to said first direction in which the path of said ion beam is deflected by said first deflection means; a first power supply for supplying a first exciting current having a first ac component and a first dc bias component to said first deflection means; a second power supply for supplying a second exciting current having a second ac component and a second dc bias component to said second deflection means; and control means for varying magnetic fields developed by said first and second deflection means in response to the amplitude and phase of said first and second ac components and the polarity and magnitude of said first and second dc bias components and thereby controlling the size and the direction scanned by said ion beam.
Claim 3
Dependent Claim
17 words
The ion-beam irradiation apparatus of claim 1, whereby said first and second ac components comprise triangular waveforms.
Claim 4
Dependent Claim
48 words
The ion-beam irradiation apparatus of claim 2, wherein a dc bias having a first polarity is added to the ascending segments of said triangular waveforms, and a dc bias having a second polarity opposite to said first polarity is added to the descending segments of said triangular waveforms.
Claim 5
Dependent Claim
26 words
The ion-beam irradiation apparatus of claim 3, wherein the triangular waveforms supplied to said first deflection means and said second deflection means have opposite dc biases.
Claim 6
Dependent Claim
101 words
The ion-beam irradiation apparatus of claim 1, wherein each of said first and second power supplies respectively comprise: a voltage source; a plurality of inverter circuits connected in parallel to said voltage source for receiving current from said voltage source and generating different voltages, the polarity of which can be switched under the control of said control means; and a plurality of coupling transformers corresponding to said plurality of inverter circuits, the primary windings of said transformers receive the voltages generated by said inverter circuits corresponding thereto and the secondary windings of said transformers are connected in series with each other.
Claim 7
Dependent Claim
130 words
The ion-beam irradiation apparatus of claim 5, wherein each of said plurality inverter circuits comprises a first pair of transistors connected in series between the position and negative terminals of said voltage source and a second pair of transistors connected in series between the positive and negative terminals of said voltage source in parallel with said first pair, one end of the primary winding of said coupling transformer corresponding to said inverter circuit being connected to a point disposed between said pair of transistors, the other end of the primary winding of said coupling transformer corresponding to said inverter circuit being connected to a point disposed between said second pair of transistors, and the base electrodes of said first and second pairs of transistors being connected to said control means.
Claim 8
Dependent Claim
69 words
The ion-beam irradiation apparatus of claim 5, wherein a plurality of resistors connect each of said plurality of inverter circuits to the primary winding of each of said plurality of coupling transformers, said plurality of resistors being set so that the amplitude of the different voltages generated from said plurality of inverter circuits vary gradually from a low value to a high value and back to said low value.
Claim 9
Independent Claim
188 words
A method for irradiating an ion beam, comprising the steps of: (a) developing an ion beam; (b) developing a first exciting current having a first ac component and a first dc bias component; (c) deflecting the path of said ion beam in a first direction perpendicular to the axis of the path of said ion beam in response to said step (b); (d) developing a second exciting current having a second ac component and a second dc bias component; (e) deflecting the path of said ion beam in a second direction perpendicular to the axis of the path of said ion beam and perpendicular to said first direction in which the path of said ion beam is deflected at said step (c) in response to said step (d); and (f) varying magnetic fields developed at said steps (c) and (e) for deflecting the path of said ion beam in response to the amplitude and phase of said first and second ac components and the polarity and magnitude of said first and second dc bias components and thereby controlling the size and the direction scanned by said ion beam.
Claim 10
Independent Claim
188 words
A method for irradiating an ion beam, comprising the steps of: (a) developing an ion beam; (b) developing a first exciting current having a first ac component and a first dc bias component; (c) deflecting the path of said ion beam in a first direction perpendicular to the axis of the path of said ion beam in response to said step (b); (d) developing a second exciting current having a second ac component and a second dc bias component; (e) deflecting the path of said ion beam in a second direction perpendicular to the axis of the path of said ion beam and perpendicular to said first direction in which the path of said ion beam is deflected at said step (c) in response to said step (d); and (f) varying magnetic fields developed at said steps (c) and (e) for deflecting the path of said ion beam in response to the amplitude and phase of said first and second ac components and the polarity and magnitude of said first and second dc bias components and thereby controlling the size and the direction scanned by said ion beam.