US4932358A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Perimeter wafer seal
Assignee: Aixtron Inc
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Filing: 1989-05-18
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Granted: 1990-06-12
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Expires: 2009-05-18
Abstract
Abstract A seal ring presses against a wafer on a CVD chuck continuously around the outer periphery of the wafer, and with sufficient force to hold the backside of the wafer against the chuck, so no CVD material may deposit on the backside of the wafer. The seal ring has one surface for contacting the frontside of the wafer and a second surface that extends close to the CVD chuck, so the edge of the wafer is also excluded from CVD coating. With use of the wafer seal ring apparatus and method, CVD coating is confined to the frontside of a wafer. In a preferred embodiment, an apparatus with a slide operated by a cam lever and a tension spring for moving the seal ring and pressing it against a wafer on a CVD chuck is used with each of multiple chucks attached to a rotatable turret within a CVD chamber.
Inventors
- 👤 David K. Studley
- 👤 Ernest Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4587; C23C16/4588
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
122 words
An apparatus for preventing edge and backside coating on a wafer on a CVD chuck during a CVD process comprising: a wafer seal ring for holding said wafer against said CVD chuck; and carrier means attached to said wafer seal ring for supporting and moving said wafer seal ring; said wafer seal ring contacting said wafer continuously around the periphery of said wafer on the side of said wafer away from said CVD chuck, and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 2
Independent Claim
122 words
An apparatus for preventing edge and backside coating on a wafer on a CVD chuck during a CVD process comprising: a wafer seal ring for holding said wafer against said CVD chuck; and carrier means attached to said wafer seal ring for supporting and moving said wafer seal ring; said wafer seal ring contacting said wafer continuously around the periphery of said wafer on the side of said wafer away from said CVD chuck, and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 3
Dependent Claim
84 words
An apparatus as in claim 1 comprising; guide means attached to said carrier means for guiding said carrier means toward and away from said CVD chuck to guide said wafer seal ring toward and away from said wafer on said CVD chuck; actuator means for advancing said carrier means toward said CVD chuck and for retracting said carrier means from said CVD chuck; and pressure means associated with said carrier means for pressing said wafer seal ring against said wafer on said CVD chuck.
Claim 4
Dependent Claim
66 words
An apparatus as in claim 1 wherein said perimeter proximity seal comprises a first surface on said seal ring and a second surface on said CVD chuck, said first surface substantially conforming in shape to said second surface and separated from said second surface by a dimension X over a length Y such that the ratio of Y:X is everywhere equal to or greater than 35:1.
Claim 5
Dependent Claim
18 words
An apparatus as in claim 3 wherein said first surface and said second surface are both flat surfaces.
Claim 6
Dependent Claim
17 words
An apparatus as in claim 2 wherein said guide means comprises a linear slide in journal bearings.
Claim 7
Dependent Claim
24 words
An apparatus as in claim 2 wherein said pressure means comprises a tension spring attached to said carrier means and to said guide means.
Claim 8
Dependent Claim
93 words
A wafer seal ring for holding a wafer against a CVD chuck during CVD processing comprising: a first surface orthogonal to the axis of said ring for contacting the front side of said wafer and urging said wafer against said CVD chuck; and a second surface extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 9
Dependent Claim
93 words
A wafer seal ring for holding a wafer against a CVD chuck during CVD processing comprising: a first surface orthogonal to the axis of said ring for contacting the front side of said wafer and urging said wafer against said CVD chuck; and a second surface extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 10
Dependent Claim
22 words
A wafer seal ring as in claim 7 wherein said second surface is a flat surface and parallel to said first surface.
Claim 11
Independent Claim
115 words
A method of preventing CVD deposition on the edge and backside of a wafer on a CVD chuck during CVD processing comprising the steps of: placing a seal ring over said wafer; and urging said seal ring against said wafer to press the backside of said wafer against said CVD chuck; said seal ring contacting the frontside of said wafer continuously around the periphery of said wafer and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 12
Independent Claim
115 words
A method of preventing CVD deposition on the edge and backside of a wafer on a CVD chuck during CVD processing comprising the steps of: placing a seal ring over said wafer; and urging said seal ring against said wafer to press the backside of said wafer against said CVD chuck; said seal ring contacting the frontside of said wafer continuously around the periphery of said wafer and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 13
Independent Claim
147 words
A system for performing a CVD process on a wafer comprising: a CVD chamber; a rotatable hub within said CVD chamber; a CVD chuck attached to said rotatable hub; and a perimeter wafer seal apparatus attached to said hub; said perimeter wafer seal apparatus comprising: a wafer seal ring for holding said wafer against said CVD chuck; and carrier means attached to said wafer seal ring for supporting and moving said wafer seal ring; said wafer seal ring contacting said wafer continuously around the periphery of said wafer on the side of said wafer away from said CVD chuck, and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 14
Independent Claim
147 words
A system for performing a CVD process on a wafer comprising: a CVD chamber; a rotatable hub within said CVD chamber; a CVD chuck attached to said rotatable hub; and a perimeter wafer seal apparatus attached to said hub; said perimeter wafer seal apparatus comprising: a wafer seal ring for holding said wafer against said CVD chuck; and carrier means attached to said wafer seal ring for supporting and moving said wafer seal ring; said wafer seal ring contacting said wafer continuously around the periphery of said wafer on the side of said wafer away from said CVD chuck, and extending beyond the periphery of said wafer and close to a surface of said CVD chuck, thereby forming a perimeter proximity seal with said surface of said CVD chuck outside the periphery of said wafer, for substantially excluding coating on the edge and backside of said wafer.
Claim 15
Dependent Claim
84 words
A system as in claim 10 comprising: guide means attached to said carrier means for guiding said carrier means toward and away from said CVD chuck to guide said wafer seal ring toward and away from said wafer on said CVD chuck; actuator means for advancing said carrier means toward said CVD chuck and for retracting said carrier means from said CVD chuck; and pressure means associated with said carrier means for pressing said wafer seal ring against said wafer on said CVD chuck.
Claim 16
Dependent Claim
46 words
A system as in claim 11 comprising a cam follower attached to said carrier means wherein said actuator means comprises a cam lever such that rotation of said rotatable hub actuates said perimeter wafer seal apparatus through contact of said cam follower with said cam lever.
Claim 17
Dependent Claim
64 words
A system as in claim 12 wherein said cam lever is a pivoted cam lever such that rotation of said hub in one direction actuates said perimeter wafer seal apparatus, but rotation of said hub in the other direction does not actuate said perimeter wafer seal apparatus, said pivoted cam lever being pivoted such that said cam follower does not follow said cam lever.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-06-11 | 1993-12-11 | 1994-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-06-11 | 1997-12-11 | 1998-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-06-11 | 2001-12-11 | 2002-06-12 | $7700.00 | Window Closed / Lapsed |