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US4900628A Expired / Lapsed US ⏱️ 0.0 years remaining

Gaseous phase synthesized diamond and method for synthesizing same

Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1987-07-22
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Granted: 1990-02-13
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Expires: 2007-07-22
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Abstract

Abstract The present invention relates to gaseous phase synthesized diamond and a method of synthesizing the same. In order to obtain crystalline diamond having remarkably high completeness and hardly containing carbon having a construction other than that of diamond, raw material gases are thermally activated by a thermoelectron-radiating material heated at an extremely high temperature, the thermoelectron-radiating material being connected to a negative pole while a substrate to be coated is connected to a positive pole, by the use of a direct current power source, a plasma being formed between the thermoelectron-radiating material and the substrate by applying a direct current voltage, and a diamond film having an average particle size of 2 microns or less, compression residual stress and electric resistance of 10 8 ohm.cm or more being formed on the substrate by using the activation by the thermoelectron-radiating material together with the activation by the formation of DC plasma. In addition, homogeneous diamond particles uniform in shape can be obtained by using this method.

Inventors

  • 👤 Akihiko Ikegaya
  • 👤 Masaaki Tobioka

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:55
CPC Classifications
C; C03; C03B; C03B29/00; C03B29/04; C30; C30B; C30B25/00; C30B25/02; C03B25/00; C03B25/02; C30B29/00; C30B29/02; C30B29/04; Y; Y10; Y10T; Y10T428/00; Y10T428/30

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 55 words
A diamond film coated on a substrate, wherein an average particle size of the diamond is less than 2 microns, a half-width of a peak of 1344 cm -1 measured by the Raman spectrometric method is 50 cm -1 or less, and the coated diamond has an electric resistance of 10 8 ohm·cm or more.
Claim 2
Dependent Claim 55 words
A diamond film coated on a substrate, wherein an average particle size of the diamond is less than 2 microns, a half-width of a peak of 1344 cm -1 measured by the Raman spectrometric method is 50 cm -1 or less, and the coated diamond has an electric resistance of 10 8 ohm·cm or more.
Claim 3
Dependent Claim 23 words
A diamond film as set forth in claim 1, wherein the coated diamond has an average particle size of 1 micron or less.
Claim 4
Dependent Claim 20 words
A diamond film as set forth in claim 1, wherein a surface of the diamond film is mainly a (111)-plane.

References Cited (Backward Citations)

US4734339A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-02-12 1993-08-14 1994-02-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-02-12 1997-08-14 1998-02-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-02-12 2001-08-14 2002-02-13 $7700.00 Window Closed / Lapsed

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