US4895735A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Radiation induced pattern deposition
Assignee: Texas Instruments Inc
•
Filing: 1988-03-01
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Granted: 1990-01-23
•
Expires: 2008-03-01
Abstract
Abstract A system and method for forming a pattern, such as a layer of metallization, on a surface. A layer comprising patterning material is positioned next to a deposition surface and a portion of the layer is heated to deposit some of the patterning material on the surface. The invention provides a means for transferring a pattern under atmospheric temperature and pressure conditions.
Inventors
- 👤 Eliot V. Cook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:20
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; G; G03; G03F; G03F7/00; G03F7/20; G03F7/2041; G03F7/2043; H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; H10P95/00; H10P95/90; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/067; H10W20/068
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
95 words
A method for forming a pattern of material on a deposition surface comprising the steps of: placing a layer, comprising a substrate having first and second sides and a sublayer of patterning material, next to the surface with the sublayer of patterning material positioned between the second side of the substrate and the deposition surface; introducing radiant or thermal energy to the layer from the first side of the substrate; and vaporizing a portion of the sublayer to deposit patterning material on the surface, said vaporization effected by thermally conducting said energy through the substrate.
Claim 2
Independent Claim
95 words
A method for forming a pattern of material on a deposition surface comprising the steps of: placing a layer, comprising a substrate having first and second sides and a sublayer of patterning material, next to the surface with the sublayer of patterning material positioned between the second side of the substrate and the deposition surface; introducing radiant or thermal energy to the layer from the first side of the substrate; and vaporizing a portion of the sublayer to deposit patterning material on the surface, said vaporization effected by thermally conducting said energy through the substrate.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein the step of heating the layer is performed by transferring energy from a radiation source to the layer.
Claim 4
Dependent Claim
25 words
The method of claim 2 wherein the step of heating the layer is performed by directing a particle beam on a portion of the layer.
Claim 5
Dependent Claim
11 words
The method of claim 3 wherein the particle beam comprises electrons.
Claim 6
Dependent Claim
24 words
The method of claim 2 wherein the step of heating the layer is performed by directing coherent radiation on a portion of the layer.
Claim 7
Dependent Claim
11 words
The method of claim 5 wherein the coherent radiation is focused.
Claim 8
Dependent Claim
24 words
The method of claim 1 wherein the patterning material has a relatively low vaporization temperature and the substrate has a relatively high vaporization temperature.
Claim 9
Dependent Claim
13 words
The method of claim 2 wherein the radiation is provided by a laser.
Claim 10
Dependent Claim
22 words
The method of claim 7 wherein the vaporization temperature of the patterning material is lower than the melting temperature of the substrate.
Claim 11
Dependent Claim
19 words
The method of claim 1 wherein the substrate provides structural integrity to the layer after patterning material is deposited.
Claim 12
Dependent Claim
21 words
The method of claim 1 wherein the substrate mitigates transmission of direct radiation through the layer as patterning material is deposited.
Claim 13
Dependent Claim
17 words
The method of claim 1 wherein deposition is accomplished by condensing patterning material upon the deposition surface.
Claim 14
Dependent Claim
11 words
The method of claim 1 wherein the patterning material is conductive.
Claim 15
Dependent Claim
28 words
The method of claim 1 wherein the step of placing the layer next to the deposition surface results in physical contact between the layer and the deposition surface.
Claim 16
Dependent Claim
32 words
The method of claim 1 wherein the deposition surface includes a surface defining a hole formed in a circuit structure and the patterning material is deposited along the surface defining the hole.
Claim 17
Dependent Claim
31 words
The method of claim 1 wherein the deposition surface is formed along a multilayered structure and patterning material is deposited to form an ohmic connection between different layers of said structure.
Claim 18
Dependent Claim
35 words
The method of claim 16 wherein the ohmic connection is made by: forming a hole through at least one layer of said structure; and depositing patterning material in the hole and between said different layers.
Claim 19
Dependent Claim
10 words
The method of claim 1 wherein the surface is nonplanar.
Claim 20
Dependent Claim
10 words
The method of claim 1 wherein the surface is curved.
Claim 21
Dependent Claim
11 words
The method of claim 18 wherein the surface comprises granular silicon.
Claim 22
Dependent Claim
16 words
The method of claim 18 wherein the surface comprises particles having diameters greater than 0.005 centimeters.
Claim 23
Dependent Claim
16 words
The method of claim 18 wherein the surface comprises particles having diameters greater than 0.01 centimeters.
Claim 24
Independent Claim
126 words
A method for forming a pattern of material on a deposition surface comprising the steps of: placing a foil comprising patterning material and a matrix material next to the surface wherein the patterning material has a relatively low temperature of vaporization and the matrix material has a relatively high temperature of vaporization, said foil having a first side facing the deposition surface and a second side facing away from the deposition surface; introducing radiant or thermal energy from an external source to the second side of the foil; thermally conducting said energy from the second side of the foil to the first side of the foil; vaporizing the patterning material with said thermally conducted energy; and depositing a portion of the patterning material on the surface.
Claim 25
Independent Claim
126 words
A method for forming a pattern of material on a deposition surface comprising the steps of: placing a foil comprising patterning material and a matrix material next to the surface wherein the patterning material has a relatively low temperature of vaporization and the matrix material has a relatively high temperature of vaporization, said foil having a first side facing the deposition surface and a second side facing away from the deposition surface; introducing radiant or thermal energy from an external source to the second side of the foil; thermally conducting said energy from the second side of the foil to the first side of the foil; vaporizing the patterning material with said thermally conducted energy; and depositing a portion of the patterning material on the surface.
Claim 26
Dependent Claim
22 words
The method of claim 23 wherein the vaporization temperature of the patterning material is lower than the melting temperature of the substrate.
Claim 27
Dependent Claim
24 words
The method of claim 23 wherein the step of heating the foil is performed by transferring energy from a radiation source to the layer.
Claim 28
Dependent Claim
25 words
The method of claim 25 wherein the step of heating the layer is performed by directing a particle beam on a portion of the layer.
Claim 29
Dependent Claim
11 words
The method of claim 26 wherein the particle beam comprises electrons.
Claim 30
Dependent Claim
24 words
The method of claim 23 wherein the step of heating the layer is performed by directing coherent radiation on a portion of the layer.
Claim 31
Dependent Claim
11 words
The method of claim 28 wherein the coherent radiation is focused.
Claim 32
Dependent Claim
13 words
The method of claim 28 wherein the radiation is provided by a laser.
Claim 33
Independent Claim
80 words
A method for forming a pattern of material on a first layer having a deposition surface with a radiation source comprising the steps of: placing a second layer comprising patterning material next to the surface; transmitting radiant energy from the source and through the first layer to the second layer to provide sufficient thermal energy with the transmitted radiant energy to vaporize some of the patterning material; and depositing a portion of the vaporized patterning material on the deposition surface.
Claim 34
Independent Claim
80 words
A method for forming a pattern of material on a first layer having a deposition surface with a radiation source comprising the steps of: placing a second layer comprising patterning material next to the surface; transmitting radiant energy from the source and through the first layer to the second layer to provide sufficient thermal energy with the transmitted radiant energy to vaporize some of the patterning material; and depositing a portion of the vaporized patterning material on the deposition surface.
Claim 35
Dependent Claim
17 words
The method of claim 31 wherein vaporized patterning material is deposited on the deposition surface by condensation.
Claim 36
Dependent Claim
38 words
The method of claim 31 wherein: the patterning material is formed in combination with a matrix material; the patterning material has a relatively low temperature of vaporization; and the matrix material has a relatively high temperature of vaporization.
Claim 37
Dependent Claim
95 words
The method of claim 31 wherein the second layer is formed as a multi-layered structure comprising a substrate containing matrix material which is relatively non-transmissive to the radiant energy and a sublayer comprising patterning material which is relatively transmissive to the radiant energy; and wherein the step of vaporizing some of the patterning material is effected by: transmitting the radiation first through the deposition surface and then through the sublayer to the substrate to provide thermal energy to the substrate; and conducting the thermal energy from the substrate to the sublayer to vaporize patterning material.
Claim 38
Dependent Claim
21 words
The method of claim 34 wherein the substrate predominantly comprises the matrix material and the sublayer predominantly comprises the patterning material.
Claim 39
Dependent Claim
11 words
The method of claim 31 wherein the radiant energy is coherent.
Claim 40
Dependent Claim
11 words
The method of claim 31 wherein the radiant energy is focused.
Claim 41
Dependent Claim
15 words
The method of claim 34 wherein the radiant energy is focused onto the matrix material.
Claim 42
Independent Claim
116 words
A method of forming a pattern on a surface of a first layer having first and second sides facing away from one another comprising the steps of: placing a second layer comprising patterning material along the first side of the first layer, said second layer having a vaporization surface facing the first layer; transmitting radiation through the second side of the first layer, then through the first side of the first layer and to the second layer to impart thermal energy to the second layer, said energy sufficient to vaporize some of the patterning material from the vaporization surface; and condensing some of the vaporized patterning material on to the first side of the first layer.
Claim 43
Independent Claim
116 words
A method of forming a pattern on a surface of a first layer having first and second sides facing away from one another comprising the steps of: placing a second layer comprising patterning material along the first side of the first layer, said second layer having a vaporization surface facing the first layer; transmitting radiation through the second side of the first layer, then through the first side of the first layer and to the second layer to impart thermal energy to the second layer, said energy sufficient to vaporize some of the patterning material from the vaporization surface; and condensing some of the vaporized patterning material on to the first side of the first layer.
Claim 44
Dependent Claim
62 words
The method of claim 39 wherein: the second layer is formed as a multi-layered structure comprising a substrate containing material which is relatively non-transmissive to the radiant energy, and a sublayer comprising patterning material which is relatively transmissive to the radiant energy; and the step of vaporizing patterning material is effected by conducting thermal energy from the substrate to the patterning material.
Claim 45
Dependent Claim
21 words
The method of claim 2 wherein the step of transferring energy is effected by passing a radiation beam along the layer.
Claim 46
Dependent Claim
17 words
The method of claim 25 wherein energy is transferred by passing a radiation beam along the foil.
Claim 47
Dependent Claim
21 words
The method of claim 31 wherein the radiant energy is formed as a beam which is passed along the second layer.
Claim 48
Dependent Claim
23 words
The method of claim 39 wherein the radiation is formed as a collimated or focused beam which is passed along the second layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-01-22 | 1993-07-24 | 1994-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-01-22 | 1997-07-24 | 1998-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-01-22 | 2001-07-24 | 2002-01-23 | $7700.00 | Window Closed / Lapsed |