US4883359A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Alignment method and pattern forming method using the same
Assignee: Canon Inc
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Filing: 1988-04-25
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Granted: 1989-11-28
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Expires: 2008-04-25
Abstract
Abstract An alignment method and a pattern forming method using the same, wherein a substrate onto which a complete pattern is to be transferred is held by a holder having formed thereon at least two alignment marks disposed in a predetermined positional relation with each other. Separate masks having relatively complementing pattern segments are used. Each of the masks is aligned with corresponding portion of the holder through an associated one of the alignment marks. As the result, the pattern segments transferred onto the substrate is aligned with each other and the continuity of the pattern is assured on the substrate. Also provided is an alignment mark forming method and a pattern forming method using the same, wherein the region on a substrate in which a continuous pattern is to be formed is divided into at least two sections and alignment marks for these sections are simultaneously formed on the substrate by means of one single mask, so that the segments of the pattern which are first to be transferred onto the sections of the substrate can be aligned with each other when they are transferred onto the substrate.
Inventors
- 👤 Hideki Ina
- 👤 Akiyoshi Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:57
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
175 words
An alignment and exposure method comprising the steps of: placing a workpiece on a holder having first and second alignment marks; placing a first mask having a third alignment mark, which is alignable with the first alignment mark of the holder, so that the first mask is opposed to a first region of the workpiece; aligning the first mask and the first region of the workpiece by use of the first and third alignment marks; exposing the first region of the workpiece to an exposure beam transmitted through the first mask; placing a second mask having a fourth alignment mark, which is alignable with the second alignment mark of the holder, so that the second mask is opposed to a second region of the workpiece, the second region being contiguous to the first region of the workpiece; aligning the second mask and the second region of the workpiece by use of the second and the fourth alignment marks; and exposing the second region of the workpiece to an exposure beam transmitted through the second mask.
Claim 2
Dependent Claim
175 words
An alignment and exposure method comprising the steps of: placing a workpiece on a holder having first and second alignment marks; placing a first mask having a third alignment mark, which is alignable with the first alignment mark of the holder, so that the first mask is opposed to a first region of the workpiece; aligning the first mask and the first region of the workpiece by use of the first and third alignment marks; exposing the first region of the workpiece to an exposure beam transmitted through the first mask; placing a second mask having a fourth alignment mark, which is alignable with the second alignment mark of the holder, so that the second mask is opposed to a second region of the workpiece, the second region being contiguous to the first region of the workpiece; aligning the second mask and the second region of the workpiece by use of the second and the fourth alignment marks; and exposing the second region of the workpiece to an exposure beam transmitted through the second mask.
Claim 3
Dependent Claim
229 words
An alignment and exposure method, comprising the steps of: forming first and second alignment marks on a workpiece having a surface region onto which a pattern having first and second portions is to be transferred, in such a manner that the first alignment mark is close to a first portion of the surface region of the workpiece while the second alignment mark is close to a second portion of the surface region of the work piece; using the first alignment mark in order to position the first portion of the surface region of the workpiece relative to the first portion of the pattern; exposing the first portion of the surface region of the workpiece to the first portion of the pattern with radiation in order to transfer the first portion of the pattern onto the first portion of the surface region of the workpiece; using the second alignment mark in order to position the second portion of the surface region of the workpiece relatively to the second portion of the pattern; and exposing the second portion of the surface region of the workpiece to the second portion of the pattern with radiation in order to transfer the second portion of the pattern onto the second portion of the surface region of the workpiece, whereby the transferred first and second portion of the pattern are interrelated in the surface region.
Claim 4
Dependent Claim
229 words
An alignment and exposure method, comprising the steps of: forming first and second alignment marks on a workpiece having a surface region onto which a pattern having first and second portions is to be transferred, in such a manner that the first alignment mark is close to a first portion of the surface region of the workpiece while the second alignment mark is close to a second portion of the surface region of the work piece; using the first alignment mark in order to position the first portion of the surface region of the workpiece relative to the first portion of the pattern; exposing the first portion of the surface region of the workpiece to the first portion of the pattern with radiation in order to transfer the first portion of the pattern onto the first portion of the surface region of the workpiece; using the second alignment mark in order to position the second portion of the surface region of the workpiece relatively to the second portion of the pattern; and exposing the second portion of the surface region of the workpiece to the second portion of the pattern with radiation in order to transfer the second portion of the pattern onto the second portion of the surface region of the workpiece, whereby the transferred first and second portion of the pattern are interrelated in the surface region.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-27 | 1993-05-29 | 1993-11-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-27 | 1997-05-29 | 1997-11-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-27 | 2001-05-29 | 2001-11-28 | $7700.00 | Window Closed / Lapsed |