US4876114A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for the self fractionation deposition of a metallic layer on a workpiece
Assignee: International Business Machines Corp
•
Filing: 1988-08-29
•
Granted: 1989-10-24
•
Expires: 2008-08-29
Abstract
Abstract A process for the evaporation deposition of a layer of metal on a workpiece is described in which a charge of a metal is placed in a crucible formed of a material having a vapor pressure lower than the vapor pressure of the metal at a selected temperature, a shield is placed between the workpiece and the crucible, and the crucible is then heated to a first temperature sufficient to melt said charge, but insufficient to cause substantial evaporation of said charge following which the crucible is heated to a second temperature level for a time sufficient to fractionally distill the charge and sublime or vaporize any non-metallic contaminants in said charge and finally the crucible is heated to a third temperature sufficient to evaporate the charge at a selected rate at which time the shield is removed from between the cricuble and the workpiece to permit evaporant from the charge to coat the workpiece.
Inventors
- 👤 Richard R. Phinney
- 👤 David C. Strippe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/26; H; H05; H05B; H05B6/00; H05B6/02; H05B6/22; H05B6/24
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
192 words
A process for the evaporation deposition of a layer of metal on a workpiece comprising the steps of: depositing a charge of a solid metal, having a selected vapor pressure at a selected temperature, in a crucible formed of a material having a vapor pressure lower than the vapor pressure of the metal at said selected temperature, placing a shield between the workpiece and the crucible, applying sufficient energy to the crucible to increase the temperature of the charge to a first level sufficient to melt said charge contained therein, but insufficient to cause substantial evaporation of said charge, increasing the energy applied to the crucible to increase the temperature of the charge to a second level, maintaining said temperature at said second level for a time sufficient to fractionally distill the charge and sublime or vaporize any non-metallic contaminants in said charge, altering the level of energy applied to the charge to set the temperature of the charge at a third level to evaporate the charge at a selected rate, and removing the shield from between the crucible and the workpiece to permit evaporant from the charge to coat the workpiece.
Claim 2
Dependent Claim
192 words
A process for the evaporation deposition of a layer of metal on a workpiece comprising the steps of: depositing a charge of a solid metal, having a selected vapor pressure at a selected temperature, in a crucible formed of a material having a vapor pressure lower than the vapor pressure of the metal at said selected temperature, placing a shield between the workpiece and the crucible, applying sufficient energy to the crucible to increase the temperature of the charge to a first level sufficient to melt said charge contained therein, but insufficient to cause substantial evaporation of said charge, increasing the energy applied to the crucible to increase the temperature of the charge to a second level, maintaining said temperature at said second level for a time sufficient to fractionally distill the charge and sublime or vaporize any non-metallic contaminants in said charge, altering the level of energy applied to the charge to set the temperature of the charge at a third level to evaporate the charge at a selected rate, and removing the shield from between the crucible and the workpiece to permit evaporant from the charge to coat the workpiece.
Claim 3
Dependent Claim
10 words
The process of claim 1 wherein said metal is copper.
Claim 4
Dependent Claim
10 words
The process of claim 1 wherein said metal is gold.
Claim 5
Dependent Claim
28 words
The process of claim 1 wherein said first level is approximately 1200° C., said second level is approximately 1900° C., and said third level is approximately 1500° C.
Claim 6
Dependent Claim
65 words
The process of claim 1 wherein there is provided the further step of replacing said shield between the workpiece and crucible after a selected period of time, altering the energy to set the temperature of the charge at a fourth level for a selected period of time, replenishing said charge, and reducing the energy to reset the temperature of the charge at said first level.
Claim 7
Dependent Claim
137 words
A process for the self-fractionation deposition of a metallic layer on a workpiece consisting of the steps of: depositing a body of copper in a molybdenum crucible which body is less than five-eights of the volume of the crucible, shielding the workpiece from the crucible with a removable shield, applying RF power to the crucible to heat the body of copper contained therein to a stable temperature of about 1200° C., increasing the RF power applied to the crucible and the body of copper, to increase the temperature of the charge about 1900° C., lowering the power level applied to the device to lower the temperature of the body of copper to 1510° C., and removing the shield from between the crucible and the workpiece to permit evaporant from the body of copper to coat the workpiece.
Claim 8
Dependent Claim
137 words
A process for the self-fractionation deposition of a metallic layer on a workpiece consisting of the steps of: depositing a body of copper in a molybdenum crucible which body is less than five-eights of the volume of the crucible, shielding the workpiece from the crucible with a removable shield, applying RF power to the crucible to heat the body of copper contained therein to a stable temperature of about 1200° C., increasing the RF power applied to the crucible and the body of copper, to increase the temperature of the charge about 1900° C., lowering the power level applied to the device to lower the temperature of the body of copper to 1510° C., and removing the shield from between the crucible and the workpiece to permit evaporant from the body of copper to coat the workpiece.
References Cited (Backward Citations)
US3401055A
Cited
US3505131A
Cited
US3576670A
Cited
US3985281A
Cited
US3775157A
Cited
US3934059A
Cited
US4061800A
Cited
US4426569A
Cited
US4472453A
Cited
US4791261A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-23 | 1993-04-24 | 1993-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-23 | 1997-04-24 | 1997-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-23 | 2001-04-24 | 2001-10-24 | $7700.00 | Window Closed / Lapsed |