US4852732A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Package for dry-resist material
Assignee: Hoechst AG
•
Filing: 1986-07-03
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Granted: 1989-08-01
•
Expires: 2006-07-03
Abstract
Abstract A package for photoresist material, particularly a dry resist, is substantially impermeable to water vapor, thereby preventing humidity-related effects which adversely influence the processability of the photoresist. The package can comprise a film tubing, the ends of which are closed by welding or gluing, into which a photoresist roll is placed. As the material for the film tubing, a composite material can be used which is formed of a polyester film as the support film, to which an aluminum foil is laminated or which is vacuum-metallized with aluminum and a polyethylene film laminated on top. A tinplate container can also be used as a package, the container being closed by soldering after placing the photoresist material inside the container. These packages generally have a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, at a humidity gradient of 97% and an ambient temperature of 23° C.
Inventors
- 👤 Hans Wilski
- 👤 Hermann Schmidt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:07
CPC Classifications
B; B65; B65D; B65D65/00; B65D65/38; B65D65/40; B65D81/00; B65D81/24; B65D81/26; B65D81/266; B65D81/268; Y; Y10; Y10T; Y10T428/00; Y10T428/13; Y10T428/1334; Y10T428/1338; Y10T428/1352; Y10T428/1355; Y10T428/1359
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
69 words
A packaged photoresist material comprising: photoresist material which is wound up into a roll, and means providing a substantially water vapor impermeable enclosure comprising a sealed package enclosing said roll, said package comprising a material having a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, under conditions of a humidity gradient of 97% and an ambient temperature of 23° C.
Claim 2
Dependent Claim
69 words
A packaged photoresist material comprising: photoresist material which is wound up into a roll, and means providing a substantially water vapor impermeable enclosure comprising a sealed package enclosing said roll, said package comprising a material having a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, under conditions of a humidity gradient of 97% and an ambient temperature of 23° C.
Claim 3
Dependent Claim
23 words
A package as claimed in claim 1, wherein said permeability is less than 0.001 gram of water vapor per square meter per day.
Claim 4
Dependent Claim
69 words
A package as claimed in claim 1, wherein said package comprises a film tubing which is closed at both ends, said film tubing comprising the product of a process comprising the steps of (A) providing a polyester film to which an aluminum layer is applied by vacuum metallization or to which aluminum foil is laminated; and (B) applying a polyethylene film to said polyester film by laminating or extrusion-coating.
Claim 5
Dependent Claim
28 words
A package as claimed in claim 3, wherein step (B) follows step (A) and said polyethylene film is immediately adjacent to said aluminum layer or said aluminum foil.
Claim 6
Dependent Claim
29 words
A package as claimed in claim 3, wherein the interior of said film tubing is filled with a dry gas before said film tubing is closed at both ends.
Claim 7
Dependent Claim
27 words
A package as claimed in claim 3, wherein air in the interior of said film tubing is removed prior to closing the film tubing at both ends.
Claim 8
Dependent Claim
21 words
A package as claimed in claim 3, wherein both ends of said film tubing are hermetically sealed by gluing or welding.
Claim 9
Dependent Claim
14 words
A package as claimed in claim 3, wherein said film tubing contains a desiccant.
Claim 10
Dependent Claim
20 words
A package as claimed in claim 1, said package comprising a container comprised of tinplate, said container having closed ends.
Claim 11
Dependent Claim
18 words
A package as claimed in claim 9, wherein said container is cylinder-shaped or has a rectangular cross section.
Claim 12
Dependent Claim
15 words
A packaged photoresist material as claimed in claim 1, consisting essentially of the recited elements.
Claim 13
Dependent Claim
72 words
An article of manufacture comprising: plural layers of a dry photoresist material stacked in sheet form, and means providing a substantially water vapor impermeable enclosure comprising a sealed package enclosing said stacked layers, said package comprising a material having a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, under conditions of a humidity gradient of 97% and an ambient temperature of 23° C.
Claim 14
Dependent Claim
72 words
An article of manufacture comprising: plural layers of a dry photoresist material stacked in sheet form, and means providing a substantially water vapor impermeable enclosure comprising a sealed package enclosing said stacked layers, said package comprising a material having a permeability to water vapor of less than 0.01 gram of water vapor per square meter per day, under conditions of a humidity gradient of 97% and an ambient temperature of 23° C.
Claim 15
Dependent Claim
23 words
An article as claimed in claim 12, wherein said permeability is less than 0.001 gram of water vapor per square meter per day.
Claim 16
Dependent Claim
69 words
An article as claimed in claim 12, wherein said package comprises a film tubing which is closed at both ends, said film tubing comprising the product of a process comprising the steps of (A) providing a polyester film to which an aluminum layer is applied by vacuum metallization or to which aluminum foil is laminated; and (B) applying a polyethylene film to said polyester film by laminating or extrusion-coating.
Claim 17
Dependent Claim
28 words
An article as claimed in claim 14, wherein step (B) follows step (A) and said polyethylene film is immediately adjacent to said aluminum layer or said aluminum foil.
Claim 18
Dependent Claim
29 words
An article as claimed in claim 14, wherein the interior of said film tubing is filled with a dry gas before said film tubing is closed at both ends.
Claim 19
Dependent Claim
27 words
An article as claimed in claim 14, wherein air in the interior of said film tubing is removed prior to closing the film tubing at both ends.
Claim 20
Dependent Claim
21 words
An article as claimed in claim 14, wherein both ends of said film tubing are hermetically sealed by gluing or welding.
Claim 21
Dependent Claim
15 words
An article as claimed in claim 12, further comprising a desiccant contained in said package.
Claim 22
Dependent Claim
21 words
An article as claimed in claim 12, wherein said package comprises a container comprised of tinplate, said container having closed ends.
Claim 23
Dependent Claim
18 words
An article as claimed in claim 20, wherein said container is cylinder-shaped or has a rectangular cross section.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-07-31 | 1993-01-30 | 1993-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-07-31 | 1997-01-30 | 1997-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-07-31 | 2001-01-30 | 2001-08-01 | $7700.00 | Window Closed / Lapsed |