US4795656A
Expired / Lapsed
US
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Cluster ion plating method for producing electrically conductive carbon film
Assignee: National Institute of Advanced Industrial Science and Technology
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Filing: 1988-04-14
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Granted: 1989-01-03
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Expires: 2008-04-14
Abstract
Abstract A carbon film having a large electrical conductivity is produced at a comparatively low substrate temperature by a method comprising forming the carbon film from a hydrocarbon by an ion beam method and heating the substrate at a temperature of 400 DEG C. to 1,200 DEG C.
Inventors
- 👤 Akira Mizoguchi
- 👤 Jun Shioya
- 👤 Yoichi Yamaguchi
- 👤 Yoshinobu Ueba
- 👤 Hironaga Matsubara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:06
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/221; C23C14/06; C23C14/0605
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
68 words
A method for producing an electrically conductive carbon film on a substrate comprising (a) ionizing a solid or liquid hydrocarbon to form a cluster ion beam which is being jetted towards a substrate by discharged electrons, (b) accelerating generated hydrocarbon ions in an electric field, and (c) depositing the hydrocarbon ions on a substrate which is heated at a temperture of 400 ° C. to 1,200 ° C.
Claim 2
Independent Claim
68 words
A method for producing an electrically conductive carbon film on a substrate comprising (a) ionizing a solid or liquid hydrocarbon to form a cluster ion beam which is being jetted towards a substrate by discharged electrons, (b) accelerating generated hydrocarbon ions in an electric field, and (c) depositing the hydrocarbon ions on a substrate which is heated at a temperture of 400 ° C. to 1,200 ° C.
Claim 3
Dependent Claim
20 words
The method according to claim 1, wherein the substrate is heated at a temperature of 400 ° to 1,000° C.
Claim 4
Dependent Claim
20 words
The method according to claim 2, wherein the substrate is heated at a temperature of 400 ° to 800° C.
Claim 5
Dependent Claim
27 words
The method according to claim 1, wherein a voltage of the electric field for accelerating the hydrocarbon ions is in the range from 1 to 3 kV.
Claim 6
Dependent Claim
19 words
The method according to claim 1, wherein the hydrocarbon is one having a hydrogen/carbon ratio of lower than 2.
Claim 7
Dependent Claim
13 words
The method according to claim 5, wherein the hydrocarbon is an aromatic hydrocarbon.
Claim 8
Dependent Claim
12 words
The method according to claim 6, wherein the aromatic hydrocarbon is benzene.
Claim 9
Dependent Claim
13 words
The method according to claim 1, wherein the substrate is a silicon wafer.
Claim 10
Dependent Claim
13 words
The method according to claim 1, wherein the substrate is a quartz substrate.
References Cited (Backward Citations)
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GB2114963A
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JPS60103099A
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US4571348A
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JPS61170570A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-03 | 1992-07-04 | 1993-01-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-03 | 1996-07-04 | 1997-01-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-03 | 2000-07-04 | 2001-01-03 | $7700.00 | Window Closed / Lapsed |