US4759948A
Expired / Lapsed
US
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Film formation through co-deposition with high and low energy beams
Assignee: Hitachi Ltd
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Filing: 1987-01-29
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Granted: 1988-07-26
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Expires: 2007-01-29
Abstract
Abstract Manufacturing of film through co-deposition with a high-energy beam and a low-energy beam. The low-energy beam is produced by electron beam heating or resistance heating. The high-energy beam is produced by a bucket-type ion source in which a magnetic field of multi-cusp-like configuration are employed and is composed of pulse trains in which each pulse has a duration not longer than 10 sec. and preferably in a range of 1 to 100 msec. The high-energy beam serves to clean the surface of the workpiece and form a mixed layer at interface between the workpiece and the deposited film. A film having a high quality and a strong adhesion can be obtained.
Inventors
- 👤 Isao Hashimoto
- 👤 Yuzo Oka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:57
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
50 words
A method of forming a film on a workpiece in the evacuated atmosphere, comprising steps of: mounting the workpiece within a vessel capable of being evacuated; evacuating said vessel; producing a train of pulses of high-energy beam to irradiate said workpiece; and producing a low-energy beam to irradiate said workpiece.
Claim 2
Independent Claim
50 words
A method of forming a film on a workpiece in the evacuated atmosphere, comprising steps of: mounting the workpiece within a vessel capable of being evacuated; evacuating said vessel; producing a train of pulses of high-energy beam to irradiate said workpiece; and producing a low-energy beam to irradiate said workpiece.
Claim 3
Dependent Claim
31 words
A method of forming a film on a workpiece according to claim 1, wherein said workpiece is irradiated concurrently with both of said high-energy and low-energy beams during a same period.
Claim 4
Dependent Claim
38 words
A method of forming a film on a workpiece according to claim 2, further including a step of irradiating the workpiece with only the high-energy beam in precedence to co-deposition with said high-energy beam and said low-energy beam.
Claim 5
Dependent Claim
28 words
A method of forming a film on a workpiece according to claim 1, wherein said high-energy beam is constituted by particles having energy not lower than 1 KeV.
Claim 6
Dependent Claim
23 words
A method of forming a film on a workpiece according to claim 4, wherein said particles are ions produced from a gaseous substance.
Claim 7
Dependent Claim
32 words
A method of forming a film on a workpiece a according to claim 5, wherein said gaseous substance is one selected from a group consisting of oxygen, nitrogen, hydrogen and mixtures thereof.
Claim 8
Dependent Claim
24 words
A method of forming a film on a workpiece according to claim 1, wherein said low-energy beam is produced by heating a solid material.
Claim 9
Dependent Claim
23 words
A method of forming a film on a workpiece according to claim 7, wherein heating is accomplished by means of an electron beam.
Claim 10
Dependent Claim
43 words
A method of forming a film on a workpiece according to claim 1, wherein said high-energy beam and said low-energy beam are so controlled in respect to the quantity that a predetermined ratio of component can be realized when deposited on the workpiece.
Claim 11
Dependent Claim
35 words
A method of forming a film on a workpiece according to claim 9, wherein substance constituting said high-energy beam and substance constituting said low-energy beam are combined to form a compound in the deposite film.
Claim 12
Dependent Claim
132 words
A method for forming a film on a workpiece according to claim 1, wherein the vessel is a hermetically sealed vessel, and further comprising the steps of supporting the workpiece within the vessel, utilizing a low-energy beam source disposed within the vessel to produce the low-energy beam constituted by particles of low energy to irradiate the workpiece, utilizing a bucket-type ion source connected to the vessel and including magnets for forming a magnetic field of a multi-cusp configuration for producing the high-energy beam constituted by particles of high energy, utilizing a control circuit for controlling the bucket-type ion source to produce the train of pulses of the high-energy beam to irradiate the workpiece, and irradiating the workpiece with the high-energy beam and the low-energy beam to form a film on the workpiece.
Claim 13
Dependent Claim
41 words
A method of forming a film on a workpiece according to claim 1, wherein the step of producing a train of pulses of high-energy beam includes producing a train of pulses having a pulse duration of 1 msec to 10 msec.
Claim 14
Dependent Claim
37 words
A method of forming a film on a workpiece according to claim 12, wherein the step of producing a train of pulses of high-energy beam includes producing pulses having a duration of 1 msec to 100 msec.
Claim 15
Dependent Claim
59 words
A method of forming a film on a workpiece according to claim 12, when the steps of producing a train of pulses of high-energy beam and producing a low-energy beam includes producing a high-energy beam composed of particles having energy higher than about 1 Kev and producing a low-energy beam composed of particules of low energy produced by evaporation.
Claim 16
Dependent Claim
59 words
A method of forming a film on a workpiece according to claim 1, when the steps of producing a train of pulses of high-energy beam and producing a low-energy beam includes producing a high-energy beam composed of particles having energy higher than about 1 Kev and producing a low-energy beam composed of particles of low energy produced by evaporation.
References Cited (Backward Citations)
JPS582022A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-26 | 1992-01-25 | 1992-07-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-26 | 1996-01-25 | 1996-07-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-26 | 2000-01-25 | 2000-07-26 | $7700.00 | Window Closed / Lapsed |