Method and apparatus for surface diagnostics

Claim 3

The method of claim 1 wherein said ionized sample is subjected to time-of-flight mass spectrometric analysis and said analysis includes the step of time focusing said ionized sample so as to compensate for a spread in velocities of ions in said sample, thereby enhancing the resolution of said analysis.

Claim 4

The method of claim 2, further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface.

Claim 5

The method of claim 2 wherein said time focusing step comprises the step of electrostatically reflecting said ionized sample.

Claim 6

The method of claim 1 wherein said ionized sample is subjected to time of flight mass spectrometric analysis and said analysis includes the step of energetically discriminating against secondary ions from the surface, thereby reducing unwanted background.

Claim 7

The method of claim 5, further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface.

Claim 10

The method of claim 2 wherein said ionized sample is subjected to time-of-flight mass spectrometric analysis and said analysis includes the step of time focusing said ionized sample so as to compensate for a spread in initial velocities of ions in said sample, thereby enhancing the resolution of said analysis.

Claim 11

The method of claim 8 further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface.

Claim 12

The method of claim 8 wherein said time focusing step comprises the step of electrostatically reflecting said ionized sample.

Claim 13

The method of claim 2 wherein said ionized sample is subjected to time-of-flight mass spectrometric analysis and said analysis includes the step of energetically discriminating against secondary ions from the surface, thereby reducing unwanted background.

Claim 14

The method of claim 11, further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface.

Claim 17

Apparatus for use in analyzing a surface including unknown species of matter comprising: probe beam means providing a probe beam directed at the surface under examination to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, and having an intensity sufficient to induce non-resonant photoionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; and a mass spectrometer disposed with respect to said spatial region for analyzing the ionized sample.

Claim 18

Apparatus for use in analyzing a surface including unknown species of matter comprising: probe beam means providing a probe beam directed at the surface under examination to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, and having an intensity sufficient to induce non-resonant photoionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; and a mass spectrometer disposed with respect to said spatial region for analyzing the ionized sample.

Claim 19

The apparatus of claim 14, wherein said mass spectrometer is provided by a time-of-flight mass spectrometer.

Claim 20

The apparatus of claim 15, further including means for pulsing said probe beam, thereby reducing damage to said surface.

Claim 21

The apparatus of claim 16, further including means for pulsing said ionizing beam in time correlation with said probe beam.

Claim 22

The apparatus of claim 5 wherein said time-of-flight mass spectrometer includes means for discriminating against secondary ions from the surface under examination.

Claim 23

The apparatus of claim 18 wherein said means for discriminating comprises ion reflector means.

Claim 24

The apparatus of claim 5 wherein said time-of-flight mass spectrometer includes means for time focusing said ionized sample so as to compensate for a spread in initial velocities of ions in said sample, thereby enhancing the resolution of said analysis.

Claim 25

The apparatus of claim 20 wherein said means for time focusing comprises ion reflector means.

Claim 26

Apparatus for use in analyzing a surface of a specimen including unknown species of matter comprising: an evacuation chamber; mounting means disposed within said chamber for holding said specimen; probe beam means providing a probe beam directed at a surface of said specimen to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, said ionizing beam having an intensity sufficient to induce non-resonant photoionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; wherein said evacuation chamber includes a field-free ion drift region; acceleration means disposed within said evacuation chamber for propelling the ionized sample across said drift region; and detector means disposed within said chamber for detecting the ionized sample exiting from said drift region, said above-named means being operatively connected for conducting time-of-flight mass spectral analysis of the ionized sample.

Claim 27

Apparatus for use in analyzing a surface of a specimen including unknown species of matter comprising: an evacuation chamber; mounting means disposed within said chamber for holding said specimen; probe beam means providing a probe beam directed at a surface of said specimen to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, said ionizing beam having an intensity sufficient to induce non-resonant photoionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; wherein said evacuation chamber includes a field-free ion drift region; acceleration means disposed within said evacuation chamber for propelling the ionized sample across said drift region; and detector means disposed within said chamber for detecting the ionized sample exiting from said drift region, said above-named means being operatively connected for conducting time-of-flight mass spectral analysis of the ionized sample.

Claim 28

The apparatus of claim 22, further comprising ion reflector means disposed in operative association with said ion drift region so as to reflect said ionized sample toward said detector means.

Claim 29

Apparatus for use in analyzing a surface including unknown species of matter comprising: probe beam means providing a probe beam directed at the surface under examination to cause a sample of matreial to be removed therefrom; ionizing beam means providing non-resonant ionizin beam of radiation directed at a spatial region proximate said surface, and having an intensity sufficient to induce non-resonant multiphoton ionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; and a mass spectrometer disposed with respect to said spatial region for analyzing the ionized sample.

Claim 30

Apparatus for use in analyzing a surface including unknown species of matter comprising: probe beam means providing a probe beam directed at the surface under examination to cause a sample of matreial to be removed therefrom; ionizing beam means providing non-resonant ionizin beam of radiation directed at a spatial region proximate said surface, and having an intensity sufficient to induce non-resonant multiphoton ionization of said sample in said spatial region, whereby species of matter included in said sample will be non-selectively ionized; and a mass spectrometer disposed with respect to said spatial region for analyzing the ionized sample.

Claim 31

The apparatus of claim 24 wherein said mass spectrometer is provided by a time-of-flight mass spectrometer.

Claim 32

The apparatus of claim 25 said time-of-flight mass spectrometer includes means for discriminating against secondary ions from the surface under examination.

Claim 33

The apparatus of claim 26 wherein said means for discriminating comprises ion reflector means.

Claim 34

The apparatus of claim 25 wherein said time-of-flight mass spectrometer includes means for time focusing sid ionized sample so as to compensate for a spread in inital velocities of ions in said sample, thereby enhancing the resolution of said analysis.

Claim 35

The apparatus of claim 28 wherein said means for time focusing comprises ion reflector means.

Claim 36

Apparatus for use in analyzing a surface of a specimen including unknown species of matter comprising: an evacuation chamber; mounting means disposed within said chamber for holding said specimen; probe beam means providing a probe beam directed at a surface of said specimen to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, said ionizing beam having an intensity sufficient to induce non-resonant multiphoton ionization of said sample in said spatial region, whereby species of matter included in said sample will be nonselectively ionized; wherein said evacuation chamber includes a field-free ion drift region; acceleration means disposed within said evacuation chamber for propelling the ionized sample across said drift region; ion reflector means disposed in operative association with said ion drift region so as to reflect said ionized sample toward said detector means; and detector means disposed within said chamber for detecting the ionized sample exiting from said drift region, said above-named means being operatively connected for conducting time-of-flight mass spectral analysis of the ionized sample.

Claim 37

Apparatus for use in analyzing a surface of a specimen including unknown species of matter comprising: an evacuation chamber; mounting means disposed within said chamber for holding said specimen; probe beam means providing a probe beam directed at a surface of said specimen to cause a sample of material to be removed therefrom; ionizing beam means providing a non-resonant ionizing beam of radiation directed at a spatial region proximate said surface, said ionizing beam having an intensity sufficient to induce non-resonant multiphoton ionization of said sample in said spatial region, whereby species of matter included in said sample will be nonselectively ionized; wherein said evacuation chamber includes a field-free ion drift region; acceleration means disposed within said evacuation chamber for propelling the ionized sample across said drift region; ion reflector means disposed in operative association with said ion drift region so as to reflect said ionized sample toward said detector means; and detector means disposed within said chamber for detecting the ionized sample exiting from said drift region, said above-named means being operatively connected for conducting time-of-flight mass spectral analysis of the ionized sample.

Claim 40

The method of claim 31 wherein said ionized sample is subjected to time-of-flight mass spectrometric analysis and said analysis includes the step of time focusing said ionized sample so as to compensate for a spread in initial velocities of ions in said sample, thereby enhancing the resolution of said analysis.

Claim 41

The method of claim 32 further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface,

Claim 42

The method of claim 32 wherein said time focusing step comprises the step of electrostatically reflecting said ionized sample.

Claim 43

The method of claim 31 wherein said ionized sample is subjected to time-of-flight mass spectrometric analysis and said analysis includes the step of energetically discriminating against secondary ions from the surface, thereby reducing unwanted background.

Claim 44

The method of claim 35, further comprising the step of adjusting the intensity of said probe beam so as to remove only minute amounts of material from said surface, whereby minimal damage is done to said surface.