Dry film resist and production of resist images

Claim 2

A dry film resist possessing a solid photopolymerizable resist layer, which is laminatable and developable with an aqueous medium and is applied on a temporary, dimensionally stable base, the said photopolymerizable resist layer being formed from a homogeneous mixture consisting essentially of (a) not less than 40% by weight of one or more photopolymerizable oligomers which are soluble or disperible in aqueous alkaline solutions, contain free carboxyl groups and more than two acryloyl and/or methacryloyl groups and have a mean molecular weight (number average) of from about 1000 to about 10,000, which oligomers are obtained by reacting a diol or polyol compound containing acryloyl and/or methacryloyl groups with an anhydride of a poly-basic carboxylic acid with esteriication of some or all of the hydroxy groups of the diol or polyol compound and formation of the acidic partial ester of the poly-basic carboxylic acid, and further reaction of some of the free carboxyl groups of the resulting reaction product with a di- or polyepoxide, with chain extension and branching of the product, (b) from 1 to 35% by weight of one or more film-forming polymers which are soluble or dispersible in water or in aqueous alkaline solutions, are compatible with the oligomers of component (a) and have a mean molecular weight (weight average) greater than about 15,000, (c) from 1 to 30% by weight of one or more photopolymerizable monomers which are compatible with the oligomers of components (a) and the polymers of component (b), (d) from 0.001 to 10% by weight of one or more photopolymerizable initiators and (e) from 0 to 30% by weight of additives and/or assistants, the percentages in each case being based on the total mixture.

Claim 3

A dry film resist as claimed in claim 1 wherein the diol or polyol compound for the preparation of the oligomer or oligomers for component (a) is a diol or polyol obtained by reacting a di- or polyepoxide with an equivalent amount of acrylic acid and/or methacrylic acid.

Claim 4

A dry film resist as claimed in claim 1, wherein the oligomers present as component (a) in the photopolymerizable resist layer have on average from about 2.1 to 8 acryloyl and/or methacryloyl groups per molecule and an acid number of from 50 to 150.

Claim 5

A dry film resist as claimed in claim 1, wherein the polymer or polymers of component (b) is or are insoluble in water and soluble or dispersible in aqueous alkaline solutions.

Claim 6

A dry film resist as claimed in claim 1, which contains an N-vinylamide polymer as component (b).

Claim 7

A dry film resist as claimed in claim 5, wherein the polymer of component (b) is a copolymer which is insoluble in water but soluble or dispersible in aqeuous alkaline solutions and consists aof an N-vinyllactam, acrylic and/or methacrylic acid and one or more hydrophobic comonomers which as such form water-insoluble homopolymers.

Claim 8

A dry film resist as claimed in claim 1, wherein the polymer or polymers of component (b) is or are present in the photopolymerizable resist layer in an amount of from 10 to 30% by weight, based on the said resist layer.

Claim 9

A dry film resist as claimed in claim 1, which contains, as component (c), triacrylate, trimethacrylate, tetraacrylate and/or tetramethacrylate monomers.

Claim 10

A dry film resist as claimed in claim 1, wherein the monomers of component (c) are present in the photopolymerizable resist layer in an amount of from 10 to 25% by weight, based on the said resist layer.

Claim 11

A process for the production of a resist image on a substrate, comprising applying a solid, photopolymerizable resist layer, which is soluble or dispersible in aqueous developers, onto the substrate, exposing this resist layer imagewise to actinic light and washing out the unexposed parts of the resist layer with a developer, wherein the photo polymerizable resist layer is built from a film-forming homogeneous mixture consisting essentially of (a) not less than 40% by weight of one or more photopolymerizable oligomers which are soluble or dispersible in aqueous alkaline solutions, contain free carboxyl groups and more than two acryloyl and/or methacryloyl groups and have a mean molecular weight (number average) of from about 1000 to about 10,000, which oligomers are obtained by reacting a diol or polyol compound containing acryloyl and/or methacryloly groups with an anhydride of a polybasic carboxylic acid with esterification of some or all of the hydroxyl groups of the diol or polyol compound and formation of the acidic partial ester of the polybasic carboxylic acid, and further reaction of some of the free carboxyl groups of the resulting reaction product with a di or-polyepoxide, with chain extension and branching of the product, (b) from 1 to 35% by weight of one or more film-forming polymers which are soluble or dispersible in water or in aqueous alkaline solutions, are compatible with the oligomers of component (a) and have a mean molecular weight (weight average) greater than about 15000, (c) from 1 to 30% by weight of one or more photopolymerizable monomers which are compatible with the oligomers of component (a) and the polymers of component (b), (d) from 0.001 to 10% by weight of one or more photopolymerization initiators and (e) from 0 to 30% by weight of further additives and/or assistants, the stated perecentages in each case being based on the total mixture.

Claim 12

A process for the production of a resist image on a substrate, comprising applying a solid, photopolymerizable resist layer, which is soluble or dispersible in aqueous developers, onto the substrate, exposing this resist layer imagewise to actinic light and washing out the unexposed parts of the resist layer with a developer, wherein the photo polymerizable resist layer is built from a film-forming homogeneous mixture consisting essentially of (a) not less than 40% by weight of one or more photopolymerizable oligomers which are soluble or dispersible in aqueous alkaline solutions, contain free carboxyl groups and more than two acryloyl and/or methacryloyl groups and have a mean molecular weight (number average) of from about 1000 to about 10,000, which oligomers are obtained by reacting a diol or polyol compound containing acryloyl and/or methacryloly groups with an anhydride of a polybasic carboxylic acid with esterification of some or all of the hydroxyl groups of the diol or polyol compound and formation of the acidic partial ester of the polybasic carboxylic acid, and further reaction of some of the free carboxyl groups of the resulting reaction product with a di or-polyepoxide, with chain extension and branching of the product, (b) from 1 to 35% by weight of one or more film-forming polymers which are soluble or dispersible in water or in aqueous alkaline solutions, are compatible with the oligomers of component (a) and have a mean molecular weight (weight average) greater than about 15000, (c) from 1 to 30% by weight of one or more photopolymerizable monomers which are compatible with the oligomers of component (a) and the polymers of component (b), (d) from 0.001 to 10% by weight of one or more photopolymerization initiators and (e) from 0 to 30% by weight of further additives and/or assistants, the stated perecentages in each case being based on the total mixture.

Claim 13

A process as claimed in claim 10, wherein a prepared dry photopolymerizable resist layer is laminated with the substrate, any cover sheet present being peeled off from the photopolymerizable resist resist layer prior to lamination, and the temporary base being removed from the resist layer after lamination of the photopolymerizable resist layer with the substrate and either before or after the imagewise exposure.

Claim 14

A dry film resist as claimed in claim 1, wherein the diol or polyol compound for the preparation of the oligomer or oligomers for component (a) is a diol or polyol by reacting a di- or polyepoxide with an equivalent amount of acrylic acid and/or methacrylic acid.

Claim 15

A dry film resist as claimed in claim 1, wherein in component (a) said anhydride of the polybasic acid is a cyclic carboxylic anhydride.

Claim 16

A dry film resist as defined in claim 1, wherein a removable cover sheet is present on the resist layer.