Evaporator for depositing films in a vacuum

Claim 2

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; and tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible, said tube means having a variable cross section lengthwise.

Claim 3

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; and tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible, the midportion of said tube means defining at least one annular recess.

Claim 4

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; and tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible, the midportion of said tube means defining at least one annular recess.

Claim 5

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a membrane supported in said tube means and lying in the transverse symmetry plane of said tube means, said membrane defining an aperture in said symmetry plane and providing for correction of the distribution of intensity of a directional vapor flow.

Claim 6

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a membrane supported in said tube means and lying in the transverse symmetry plane of said tube means, said membrane defining an aperture in said symmetry plane and providing for correction of the distribution of intensity of a directional vapor flow.

Claim 7

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of identical membranes mounted on said tube means, each membrane defining an annular aperture, and said membranes being carried on the ends of said tube means equally spaced from said transverse symmetry plane, said membranes providing for correction of the distribution of intensity of a directional vapor flow.

Claim 8

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of identical membranes mounted on said tube means, each membrane defining an annular aperture, and said membranes being carried on the ends of said tube means equally spaced from said transverse symmetry plane, said membranes providing for correction of the distribution of intensity of a directional vapor flow.

Claim 9

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of membranes mounted in said tube means, said membranes defining identical apertures and being arranged in said tube means at an angle to the axis of said tube means with the membranes coupled along the perimeter of their apertures, said tube means formed of a pair of identical tube parts spaced from one another and rigidly coupled by said pair of membranes.

Claim 10

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of membranes mounted in said tube means, said membranes defining identical apertures and being arranged in said tube means at an angle to the axis of said tube means with the membranes coupled along the perimeter of their apertures, said tube means formed of a pair of identical tube parts spaced from one another and rigidly coupled by said pair of membranes.

Claim 11

An evaporator as claimed in claim 3, wherein said aperture of said membrane is shaped as two cones connected by their small bases.

Claim 12

An evaporator as claimed in claim 3, further including a pair of identical nozzles, each having shaped cutouts, formed in the ends of said tube means equally spaced from said transverse symmetry plane, and providing for correction of the shape of the directional vapor flow.

Claim 13

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of identical membranes, each having an aperture conforming in configuration to the configuration of a film to be deposited, said membranes being secured to the ends of said tube means equally spaced from said transverse symmetry plane.

Claim 14

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and a pair of identical membranes, each having an aperture conforming in configuration to the configuration of a film to be deposited, said membranes being secured to the ends of said tube means equally spaced from said transverse symmetry plane.

Claim 15

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material and adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means, said tube means defining a transverse symmetry plane to enable said tube means to be alternately mounted with one of its ends mounted in said crucible, and then removed and mounted with its other end in said crucible; and membrane means defining a plurality of apertures mounted in said tube means and lying in the transverse symmetry plane, the geometrical axes of said apertures being arranged at preselected angles with respect to one another and the geometrical axis of said tube means, said membrane means providing for correction of the distribution of intensity of a directional vapor flow.

Claim 16

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material and adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means, said tube means defining a transverse symmetry plane to enable said tube means to be alternately mounted with one of its ends mounted in said crucible, and then removed and mounted with its other end in said crucible; and membrane means defining a plurality of apertures mounted in said tube means and lying in the transverse symmetry plane, the geometrical axes of said apertures being arranged at preselected angles with respect to one another and the geometrical axis of said tube means, said membrane means providing for correction of the distribution of intensity of a directional vapor flow.

Claim 17

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material and adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means, said tube means defining a transverse symmetry plane to enable said tube means to be alternately mounted with one of its ends mounted in said crucible, and then removed and mounted with its other end in said crucible; and a porous insert received within said crucible and mounted spaced from the interior bottom and side walls of said crucible and having open pores with a volume at least equal to the volume of evaporant material to be contained in said crucible.

Claim 18

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material and adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means, said tube means defining a transverse symmetry plane to enable said tube means to be alternately mounted with one of its ends mounted in said crucible, and then removed and mounted with its other end in said crucible; and a porous insert received within said crucible and mounted spaced from the interior bottom and side walls of said crucible and having open pores with a volume at least equal to the volume of evaporant material to be contained in said crucible.

Claim 19

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and means for increasing the temperature gradient at the midportion of the tube means to shorten the length of the transition zone between the end of the tube means mounted in said crucible which is subjected to high temperature and the other end of the tube means which is subjected to low temperature.

Claim 20

An evaporator for depositing a film in a vacuum, comprising: a crucible for containing an evaporant material adapted to be heated to evaporate the evaporant material to establish a directional vapor flow toward a substrate upon which a film is to be deposited; tube means removably mounted in said crucible for forming a directional flow of vapor of evaporant material to be deposited and having mounting means on each end thereof for selectively removably mounting said tube means in said crucible, said tube means defining a transverse symmetry plane to enable said tube means to be mounted alternately with one of its ends mounted in said crucible and then removed and mounted with its other end in said crucible; and means for increasing the temperature gradient at the midportion of the tube means to shorten the length of the transition zone between the end of the tube means mounted in said crucible which is subjected to high temperature and the other end of the tube means which is subjected to low temperature.