Optical instrument for measuring displacement

Claim 2

In an optical instrument for measuring displacement comprising a movable diffraction grating used as a scale, a light source, said diffraction grating illuminated by said light source and producing two or more diffracted beams, means for causing said two or more diffracted beams to interfere with each other, and two or more photodetectors receiving and detecting said two or more diffracted beams from said causing means whereby displacement of said diffraction grating is detected based on variations of the outputs of said two or more photo detectors the improvement wherein said light source is a multimode semiconductor laser device having a coherency enabling only two of said diffracted beams with an equal optical path length to interfere with each other.

Claim 3

An optical instrument for measuring displacement according to claim 1, wherein each of said photodetectors comprises a polarizing beam splitter arranged to receive said two or more interfered beams for dividing the incident light beam into two, one of which is a light beam proceeding along a first optical path which is the direction of the incident light beam and the other of which is a light beam proceeding along a second optical path, a first photo diode which is mounted on said first optical path, a second photo diode which is mounted on said second optical path, a first photo diode which is mounted on said first optical path, a second photo diode which is mounted on said second optical path, said first and second photo diodes connected in series, a reverse bias source connected to said first and second photo diodes, and an amplifier with its input connected to the connection point of said first and second photo diodes, said amplifier producing detected signals which contain no D.C. component when interference light enters said beam splitter.

Claim 4

In an optical instrument for measuring displacement comprising a movable diffraction grating used as a scale, a light source, said diffraction grating illuminated by said light source and producing two or more diffracted beams, means for causing said two diffracted beams to interfere with each other, and two photodetectors receiving and detecting said two diffracted beams from said causing means, whereby displacement of said diffraction grating is detected based on variations of the outputs of said two photodetectors, the improvement wherein the difference in optical path length between said two diffracted beams which interfere with each other is detected based on variations in the outputs of said two photodetectors and said outputs of said photodetectors are used to adjust the optical path length of said two diffracted beams as to reduce errors due to said light source wavelength variations and to said optical path length differences.

Claim 5

In an optical instrument for measuring displacement comprising a movable diffraction grating used as a scale, a light source, said diffraction grating illuminated by said light source and producing two or more diffracted beams, means for causing said two diffracted beams to interfere with each other, and two photodetectors receiving and detecting said two diffracted beams from said causing means, whereby displacement of said diffraction grating is detected based on variations of the outputs of said two photodetectors, the improvement wherein the difference in optical path length between said two diffracted beams which interfere with each other is detected based on variations in the outputs of said two photodetectors and said outputs of said photodetectors are used to adjust the optical path length of said two diffracted beams as to reduce errors due to said light source wavelength variations and to said optical path length differences.

Claim 6

In an optical instrument for measuring displacment comprising a movable diffraction grating used as a scale, a light source for producing a beam to be diffracted by said diffraction grating to produce two or more diffraction beams, means for causing said two beams diffracted by said diffraction grating to interfere with each other, and photodetectors for detecting an interference pattern, the improvement whereby means are provided which respond to the output of said photodetectors so that the errors in said beam due to the differences in optical path length between said two beams and errors due to light source wavelength variations are maintained less than predetermined values.

Claim 7

In an optical instrument for measuring displacment comprising a movable diffraction grating used as a scale, a light source for producing a beam to be diffracted by said diffraction grating to produce two or more diffraction beams, means for causing said two beams diffracted by said diffraction grating to interfere with each other, and photodetectors for detecting an interference pattern, the improvement whereby means are provided which respond to the output of said photodetectors so that the errors in said beam due to the differences in optical path length between said two beams and errors due to light source wavelength variations are maintained less than predetermined values.

Claim 8

An optical instrument for measuring displacement according to claim 4, further comprising means for examining variations in modulation of said output, and means for stopping the measurement in mid-course when said difference between the optical path lengths of said two beams is greater than a predetermined value.

Claim 9

An optical instrument for measuring displacement, comprising a light source composed of a semiconductor laser device, a beam splitter for dividing a beam emerging from said light source into two split beams, a diffraction grating on which the two split beams are projected, and reflectors which reflect the two first order beams diffracted by said diffraction grating and redirect them to said diffraction grating, the reflected first order diffraction beams being diffracted again by said diffraction grating, and the two first order diffraction beams thus rediffracted being caused to interfere with each other by said beam splitter.

Claim 10

An optical instrument for measuring displacement, comprising a light source composed of a semiconductor laser device, a beam splitter for dividing a beam emerging from said light source into two split beams, a diffraction grating on which the two split beams are projected, and reflectors which reflect the two first order beams diffracted by said diffraction grating and redirect them to said diffraction grating, the reflected first order diffraction beams being diffracted again by said diffraction grating, and the two first order diffraction beams thus rediffracted being caused to interfere with each other by said beam splitter.

Claim 11

An optical instrument for measuring displacement according to claim 6, further comprising second reflectors on the same side as said beam splitter with respect to said diffraction grating for directing said emerging beam and said rediffracted diffraction beams between said beam splitter and said diffraction grating.

Claim 12

An optical instrument for measuring displacement according to claim 6, wherein said diffraction grating is a volume type hologram, the direction of the grating vector of said hologram coinciding with the measurement direction.

Claim 13

An optical instrument for measuring displacement according to claim 6, wherein said reflectors are located below said diffraction grating.