US4674434A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for forming deposited film
Assignee: Canon Inc
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Filing: 1985-07-03
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Granted: 1987-06-23
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Expires: 2005-07-03
Abstract
Abstract An apparatus for forming a deposited film comprises a chamber, which can be brought into a reduced pressure, for forming a deposited film on a substrate by introducing a starting gas into said chamber and decomposing or polymerizing said gas, the apparatus is provided with both a means for decomposing or polymerizing said gas by discharging and a means for decomposing or polymerizing said gas by heat.
Inventors
- 👤 Shunichi Ishihara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 23:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; G03G5/08214
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
104 words
An apparatus for forming a deposited film comprising: a first compartment for forming a film on a substrate through thermal decomposition or polymerization of a starting gas, said first compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a heat applying means; a second compartment for forming a film on a substrate through discharge decomposition or polymerization of a starting gas, said second compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a dischargae generating means; and a means for delivering a substrate into and out of the first and second compartments.
Claim 2
Independent Claim
104 words
An apparatus for forming a deposited film comprising: a first compartment for forming a film on a substrate through thermal decomposition or polymerization of a starting gas, said first compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a heat applying means; a second compartment for forming a film on a substrate through discharge decomposition or polymerization of a starting gas, said second compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a dischargae generating means; and a means for delivering a substrate into and out of the first and second compartments.
Claim 3
Dependent Claim
20 words
An apparatus according to claim 1, wherein the means for decomposing or polymerizing gas by heat is an IR-ray lamp.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-06-22 | 1990-12-22 | 1991-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-22 | 1994-12-22 | 1995-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-22 | 1998-12-22 | 1999-06-23 | $7700.00 | Window Closed / Lapsed |