US4643579A
Expired / Lapsed
US
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Aligning method
Assignee: Canon Inc
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Filing: 1984-11-19
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Granted: 1987-02-17
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Expires: 2004-11-19
Abstract
Abstract A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.
Inventors
- 👤 Yuki Toriumi
- 👤 Kazunori Suzuki
- 👤 Hiroo Katsuta
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 20:16
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7073; G03F9/7076; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/133354
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
139 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating said first and second objects having a first area type mark and a second area type mark, respectively; detecting the intensity of the light from said objects along at least two detection paths that include said marks, wherein each path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein each path further crosses a third region of the objects that does not include the area marks; and comparing the lengths of said superposed and non-superposed regions, which lengths are obtained from differences in the intensity of the light from said three regions, so as to calculate the deviation of the relative location of said objects.
Claim 2
Independent Claim
139 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating said first and second objects having a first area type mark and a second area type mark, respectively; detecting the intensity of the light from said objects along at least two detection paths that include said marks, wherein each path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein each path further crosses a third region of the objects that does not include the area marks; and comparing the lengths of said superposed and non-superposed regions, which lengths are obtained from differences in the intensity of the light from said three regions, so as to calculate the deviation of the relative location of said objects.
Claim 3
Dependent Claim
38 words
A method according to claim 1, wherein the detection of the lengths of the superposed region and the non-superposed region is affected with respect to the images of said first and second marks imaged on a television monitor.
Claim 4
Dependent Claim
14 words
A method according to claim 1, wherein said first and second marks are circular.
Claim 5
Independent Claim
138 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating said first and second objects having a first area type mark and a second area type mark, respectively; detecting the intensity of the light from said objects along a single detection path that includes said marks, wherein the path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein the path further crosses a third region of the objects that does not include the area marks; and comparing the lengths of said superposed and non-superposed regions, which lengths are obtained from differences in the intensity between the light from said three regions, so as to calculate the deviation of the relative location of said objects.
Claim 6
Independent Claim
138 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating said first and second objects having a first area type mark and a second area type mark, respectively; detecting the intensity of the light from said objects along a single detection path that includes said marks, wherein the path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein the path further crosses a third region of the objects that does not include the area marks; and comparing the lengths of said superposed and non-superposed regions, which lengths are obtained from differences in the intensity between the light from said three regions, so as to calculate the deviation of the relative location of said objects.
Claim 7
Dependent Claim
38 words
A method according to claim 4, wherein the detection of the lengths of the superposed region and the non-superposed region is effected with respect to the images of said first and second marks imaged on a television monitor.
Claim 8
Dependent Claim
23 words
A method according to claim 4, wherein said first and second marks are triangular, one of said marks having a triangular opening therein.
Claim 9
Independent Claim
139 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating the first and second objects having a first area type mark and a second area type mark, respectively; scanning the light from said objects including said marks along at least two detection paths that include said marks, wherein each path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein each path further crosses a third region of the objects that does not include the area marks; obtaining the differences in intensity between the light from said three regions, from scanning signals of the light from the first object and the second object, so as to calculate the deviation of the relative location of said objects.
Claim 10
Independent Claim
139 words
A method for positioning a first object and a second object with respect to each other, comprising: illuminating the first and second objects having a first area type mark and a second area type mark, respectively; scanning the light from said objects including said marks along at least two detection paths that include said marks, wherein each path crosses the marks in a first region where the marks are superposed and in a second region where the marks are not superposed, and wherein each path further crosses a third region of the objects that does not include the area marks; obtaining the differences in intensity between the light from said three regions, from scanning signals of the light from the first object and the second object, so as to calculate the deviation of the relative location of said objects.
Claim 11
Dependent Claim
14 words
A method according to claim 7, wherein said first and second marks are polygonal.
Claim 12
Dependent Claim
25 words
A method according to claim 8, wherein said first and second marks are square marks each inclined at 45° with respect to the detection paths.
Claim 13
Dependent Claim
18 words
A method according to claim 7, wherein the light from said first and second objects are simultaneously scanned.
Claim 14
Dependent Claim
22 words
A method according to claim 7, wherein the light from said first and second objects is scanned at a predetermined time interval.
Claim 15
Dependent Claim
82 words
A method according to claim 11, wherein said first object and said second object are scanned respectively at first and second scanning positions, and said first object is placed in the first scanning position before said second object is placed in the second scanning position, and the scanning signals obtained by scanning the light from said first object are stored and compared with the scanning signals obtained by the scanning after said second object has been placed in the second scanning position.
Claim 16
Dependent Claim
48 words
A method according to claim 12, wherein a binarization level of the scanning signals employed when scanning the light from the first object is identical to the binarization level of the scanning signals employed when scanning after the second object has been placed in the second scanning position.
Claim 17
Dependent Claim
30 words
A method according to claim 7, wherein said scanning along said detection paths is effected by scanning lines of a television by which said first and second objects are imaged.
Claim 18
Dependent Claim
23 words
A method according to claim 7, wherein at least one of said first and second marks is a mark attached to the object.
Claim 19
Dependent Claim
22 words
A method according to claim 7, wherein at least one of said first and second marks is an opening in the object.
Claim 20
Dependent Claim
18 words
A method according to claim 7, wherein said first mark is semitransparent and said second mark is reflective.
Claim 21
Independent Claim
165 words
An apparatus for positioning a first object and a second object with respect to each other, comprising: means for carrying onto an alignment stage said first object on which a first area type mark is formed; means for carrying onto the alignment stage said second object on which a second area type mark is formed; means for imaging said first and second objects on a television monitor so as to include at least said first and second marks; means for electrically scanning the images of said first and second objects along at least two scanning lines, each line including a superposed portion of said first and second marks; means for detecting a region in which scanning signals of the images of said first and second objects become greater than a predetermined intensity so as to calculate the deviation of the relative location of said objects; and means for displacing said first and second objects relative to each other so as to correct the positional deviation.
Claim 22
Independent Claim
165 words
An apparatus for positioning a first object and a second object with respect to each other, comprising: means for carrying onto an alignment stage said first object on which a first area type mark is formed; means for carrying onto the alignment stage said second object on which a second area type mark is formed; means for imaging said first and second objects on a television monitor so as to include at least said first and second marks; means for electrically scanning the images of said first and second objects along at least two scanning lines, each line including a superposed portion of said first and second marks; means for detecting a region in which scanning signals of the images of said first and second objects become greater than a predetermined intensity so as to calculate the deviation of the relative location of said objects; and means for displacing said first and second objects relative to each other so as to correct the positional deviation.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-16 | 1990-08-18 | 1991-02-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-16 | 1994-08-18 | 1995-02-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-16 | 1998-08-18 | 1999-02-17 | $7700.00 | Window Closed / Lapsed |