US4622919A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Film forming apparatus
Assignee: Nissin Electric Co Ltd
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Filing: 1984-09-21
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Granted: 1986-11-18
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Expires: 2004-09-21
Abstract
Abstract A process and an apparatus for forming films, up to several microns in thickness, on substrates by the combination of ion implantation and vapor deposition; said apparatus comprising a vacuum chamber, means for transporting a substrate within the vacuum chamber, a first ion source having an accelerating voltage of 500 V to 5 kV and disposed at a first position along the direction of movement of the substrate within the vacuum chamber, a first evaporator disposed at a second position along the direction of movement of the substrate within the vacuum chamber, and a second ion source having an accelerating voltage of 10 kV to 100 kV and disposed at a third position along the direction of movement of the substrate within the vacuum chamber, and optionally further comprising a second evaporator disposed at a fourth position along the direction of movement of the substrate within the vacuum chamber, which may be provided with high-frequency exciting means disposed in a path of release of vapor from the second evaporator toward the substrate for ionizing the vapor, and means for forming an electric field for accelerating the ionized vapor toward the substrate.
Inventors
- 👤 Yasuo Suzuki
- 👤 Yasunori Ando
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 20:19
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/562; C23C14/24; C23C14/32; C23C14/48; C23C14/568
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
102 words
A film forming apparatus comprising a vacuum chamber, means for transporting a substrate within the vacuum chamber, a first ion source having an accelerating voltage of 500 V to 5 kV and disposed at a first position along the direction of movement of the substrate within the vacuum chamber, a first evaporator disposed at a second position along the direction of movement of the substrate within the vacuum chamber, and a second ion source having an accelerating voltage of 10 kv to 100 kV and disposed at a third position along the direction of movement of the substrate within the vacuum chamber.
Claim 2
Dependent Claim
102 words
A film forming apparatus comprising a vacuum chamber, means for transporting a substrate within the vacuum chamber, a first ion source having an accelerating voltage of 500 V to 5 kV and disposed at a first position along the direction of movement of the substrate within the vacuum chamber, a first evaporator disposed at a second position along the direction of movement of the substrate within the vacuum chamber, and a second ion source having an accelerating voltage of 10 kv to 100 kV and disposed at a third position along the direction of movement of the substrate within the vacuum chamber.
Claim 3
Dependent Claim
31 words
A film forming apparatus as defined in claim 1 wherein a second evaporator is disposed at a fourth position along the direction of movement of the substrate within the vacuum chamber.
Claim 4
Dependent Claim
25 words
An apparatus as defined in claim 1 wherein the substrate transporting means comprises a feed roll and a take-up roll for transporting a tape-like substrate.
Claim 5
Dependent Claim
22 words
An apparatus as defined in claim 3 wherein the feed roll and the take-up roll are both disposed within the vacuum chamber.
Claim 6
Dependent Claim
40 words
An apparatus as defined in claim 3 wherein the feed roll and the take-up roll are both disposed outside the vacuum chamber, and the vacuum chamber is provided with an inlet portion and an outlet portion for the tape-like substrate.
Claim 7
Dependent Claim
158 words
A film forming apparatus comprising a vacuum chamber, means for transporting a substrate within the vacuum chamber, a first ion source having an accelerating voltage of 500 V to 5 kV and disposed at a first position along the direction of movement of the substrate within the vacuum chamber, a first evaporator disposed at a second position along the direction of movement of the substrate within the vacuum chamber, a second ion source having an accelerating voltage of 10 kV to 100 kV and disposed at a third position along the direction of movement of the substrate within the vacuum chamber, a second evaporator disposed at a fourth position along the direction of movement of the substrate within the vacuum chamber, high-frequency exciting means disposed in a path of release of vapor from the second evaporator toward the substrate for ionizing the vapor, and means for forming an electric field for accelerating the ionized vapor toward the substrate.
Claim 8
Dependent Claim
158 words
A film forming apparatus comprising a vacuum chamber, means for transporting a substrate within the vacuum chamber, a first ion source having an accelerating voltage of 500 V to 5 kV and disposed at a first position along the direction of movement of the substrate within the vacuum chamber, a first evaporator disposed at a second position along the direction of movement of the substrate within the vacuum chamber, a second ion source having an accelerating voltage of 10 kV to 100 kV and disposed at a third position along the direction of movement of the substrate within the vacuum chamber, a second evaporator disposed at a fourth position along the direction of movement of the substrate within the vacuum chamber, high-frequency exciting means disposed in a path of release of vapor from the second evaporator toward the substrate for ionizing the vapor, and means for forming an electric field for accelerating the ionized vapor toward the substrate.
Claim 9
Dependent Claim
25 words
An apparatus as defined in claim 6 wherein the substrate transporting means comprises a feed roll and a take-up roll for transporting a tape-like substrate.
Claim 10
Dependent Claim
22 words
An apparatus as defined in claim 7 wherein the feed roll and the take-up roll are both disposed within the vacuum chamber.
Claim 11
Dependent Claim
40 words
An apparatus as defined in claim 7 wherein the feed roll and the take-up roll are both disposed outside the vacuum chamber, and the vacuum chamber is provided with an inlet portion and an outlet portion for the tape-like substrate.
References Cited (Backward Citations)
US4091138A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-11-17 | 1990-05-19 | 1990-11-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-11-17 | 1994-05-19 | 1994-11-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-11-17 | 1998-05-19 | 1998-11-18 | $7700.00 | Window Closed / Lapsed |